氮化硅干法刻蚀工艺设备模型的试验与测量

通过对氮化硅薄膜干法刻蚀工艺实验结果的测量,得到硅片表面非均匀性分布的具体测量数据,并对这种现象的成因进行了定性的理论分析,为下一步建立刻蚀工艺设备模型准备了充足的实验数据.     

孔腐湿法去胶金属沾污可靠性评估

在半导体制造工业中,参数测试作为有效的对在线制品的监控手段,一方面反映了工艺线的工艺水平状况,另一方面它也是制造公司与设计公司之间进行沟通的主要依据。而对于新工艺研发来说,参数测量及分析更是整个研发过程中极其重要的一部分,及时准确的参数测量结果是产品工程师快速作出工艺研发方向的判断依据。因此,芯片参数测量分析的主要作用在于:在工业生产中得到大量的测量数据,用于评价工艺设备、半导体材料和电路结构,监视和控制工艺和器件参数的均匀性、重复性、协调性,分析工艺中存在的缺陷,诊断电路性能失常规律,预测成品率,预报可靠性信息等等。文章主要介绍了运用参数测试对在线工艺异常进行可靠性评估的方法。     

睿励发布TFX3000 300mm全自动精密薄膜线宽测量系统

睿励科学仪器（上海）有限公司宣布推出自主研发的适用于65nm和45nm技术节点的300mm硅片全自动精密薄膜和线宽测量系统（TFX3000）。针对65nm及45nm生产线的要求，本产品的测量系统采用了先进的非接触式光学技术，并进行了全面的优化，能准确地确定集成电路生产中有关工艺参数的微小变化。     

KLA-Tencor针对32nm光刻控制推出新的Archer200型叠对测量系统

KLA-Tencor公司日前推出最新型叠对测量系统Archer200,它包含一个能够显著改善性能的增强型光学系统,这对于帮助客户在32nm设计规格节点达到双次成像光刻更严格的叠对要求至关重要。客户还可以选择在Archer 200上增加KLA-Tencor先进的散射测量技术,以在达到其特定的32nm及更小线距测量要求中提供更大的灵活性。     

CFT-LCD制造过程中篚盒厚控制工艺研究

以国内最先进的第5代TFT-LCD生产线为基础,对生产过程中影响盒厚的因素进行探讨和研究,为TFT-LCD生产中的盒厚控制提供参考。主要探讨了TFT-LCD生产中,液晶滴下工艺、垫料散布工艺、封框胶涂敷工艺对液晶盒厚的影响。     

TFT-LCD制造过程中的盒厚控制工艺研究

以国内最先进的第5代TFT-LCD生产线为基础,对生产过程中影响盒厚的因素进行探讨和研究,为TFT-LCD生产中的盒厚控制提供参考。主要探讨了TFT-LCD生产中,液晶滴下工艺、垫料散布工艺、封框胶涂敷工艺对液晶盒厚的影响。     

得可带给慕尼黑下一代太阳能金属镀膜解决方案

得可于3月4日～6日的慕尼黑2009年光电技术展上展示其下一代太阳能金属镀膜生产线。此丝网印刷专家将主要推出大批创新的太阳能技术,并于C2展馆D-37展位现场运行其最先进的金属镀膜生产线。     

广播电视机房工艺设备用电量调研及评估

本文在对具有代表性的广播电视中心工艺机房进行深入调研的基础上，了解广播电视中心工艺设备的实际使用情况，统计实际使用中工艺设备用电量；通过分析、归纳、整理，提出有针对性、可参照性强、并具有一定前瞻性的广播电视中心工艺设备用电量数据建议，为未来广电中心工程建设提供可参照的工艺设备用电量要求。     

先进的前道CMP设备及整合解决方法

概述了未来IC器件可采用的前道CMP设备及整合解决方法的巨大进展。为提高设备的可用性和生产线的运作效率,在一台设备上采用多用途的整合解决方法。而且,对这些方法与下一代无磨料网膜抛光设备的能力进行了比较。未来数代器件要求的CMP工艺技术包括先进的抛光头、先进的现场终点系统、多平台、多抛光头结构。与下一代消耗品(单独硬抛光垫、高平面性磨料、无磨料抛光等)结合,能使直接抛光浅沟槽隔离(STI)工艺方法满足0.18μm乃至更小特征尺寸的器件要求。采用新型多步工艺进行了多晶硅CMP。先进的多晶硅金属介质(PMD)抛光工艺展示了更长寿命的抛光垫和更高的金刚石盘片生产效率和更强的设备可用性。这些工艺技术已全部成功地使用在生产线,并正在生产中进行测试。     

ASIC将采用铜连接线和0.15μ线宽的工艺生产

正当VLSI Technology公司(位于美国加州的San Jose)的0.20μmVSC10工艺的生产线刚刚开始满负荷生产的时候,公司紧接着就宣布了它的下一代,0.15μm VSC11工艺生产的器件的特性参数。VSC11工艺的引入,一方面在缩小器件特征尺寸上进了一步,另一方面也将该公司带入能够采用铜连接线的先进行列,能够采用铜连接线的集成电路制造厂家目前     

使用在线RGA的先进半导体生产

Role of Automated RGA in AEC, APC,and FDCAutomated RGA can provide detailed informa-tion on the behavior of the process tool and process.Specifically, this data can provide insight into thechemistries of a process step, and into unexpectedor expected changes in the process chemistries. Byconverting raw bits of data into information, thiscan greatly reduce the data crunching for the AEC,APC, and FDC programs. In addition, automatedRGAs can provide real-time process control by alert…     

等离子体刻蚀过程的APC技术研究进展

先进过程控制(APC)是一个多层次的控制系统,其包含了实时的设备及工艺控制和非实时的RtR控制.APC引入等离子体刻蚀过程控制可极大提高刻蚀机的使用效率.针对等离子体刻蚀过程,本文分别从实时控制和RtR控制两个不同层次展开了论述,概述了RtR控制器中所使用的线性回归模型和神经网络模型.最后,讨论了APC技术的发展趋势.     

尘埃粒子计数器计数损失的分析研究

光散射式尘埃粒子计数器是用来测量空气洁净度的重要仪器，粒子计数器的主要测量误差为重叠损失误差。本文介绍了产生计数损失误差的原因，应用Poisson随机过程分析确定了粒子计数器的计数损失，并提出了测量计数损失的实验方法。最后，给出使用粒子计数器测量中减少计数损失的方法。     

乙烯裂解装置APC仿真系统的实施

通过对先进控制软件在裂解APC仿真系统的实际应用的介绍,简要说明先进控制的DMCPlus控制器的建立过程及其主要变量的构成,说明APC仿真系统的网络结构,并着重介绍了在CENTUM-CS3000系统中相应先进控制所做的控制与操作组态内容,对先控项目在实际生产中应用和先控控制器建立与维护做了介绍。     

Restoration scheme of mobility databases by mobility learning andprediction in PCS networks

This paper proposes a restoration scheme based on mobility learning and prediction in the presence of the failure of mobility databases in personal communication systems (PCSs). In PCSs, mobility databases must maintain the current location information of users to provide a fast connection for them. However, the malfunction of mobility databases may cause some location information to be lost. As a result, without an explicit restoration procedure, incoming calls to users may be rejected. Therefore, an explicit restoration scheme against the malfunction of mobility databases is needed to guarantee continuous service availability to users. Introducing mobility learning and prediction into the restoration process allows systems to locate users after a failure of mobility databases. In failure-free operations, the movement patterns of users are learned by a neuro-fuzzy inference system (NFIS). After a failure, an inference process of the NFIS is initiated and the users' future location is predicted. This is used to locate lost users after a failure. This proposal differs from previous approaches using a checkpoint because it does not need a backup process nor additional storage space to store checkpoint information. In addition, simulations show that our proposal can reduce the cost needed to restore the location records of lost users after a failure when compared to the checkpointing scheme     

Ad hoc innovation: distributed decision making in ad hoc networks

Mobile ad hoc networks by their nature are highly adaptive systems that can come into existence on an as needed basis. They can grow, reduce in size, fragment, and dismantle as desired. The dynamic and very flexible nature of ad hoc networks can be taken to a further level of sophistication by allowing these networks to retune and adapt themselves according to prevailing network conditions. We are interested in scenarios in which ad hoc nodes must reconfigure as part of a network-wide adaptation process such that network-wide consensus is needed before any change can take place. We present an elegant solution for attaining global consensus in MANETs based on the social science theory of the diffusion of innovations. We present results of the application of this novel approach to an ad hoc network with an adaptive reconfigurable network layer.     

Simulation of patient specific cervical hip fracture surgery with a volume haptic interface

The interest for surgery simulator systems with anatomical models generated from authentic patient data is growing as these systems evolve. With access to volumetric patient data, e.g., from a computer tomography scan, haptic and visual feedback can be created directly from this dataset. This opens the door for patient specific simulations. Hip fracture surgery is one area where simulator systems is useful to train new surgeons and plan operations. To simulate the drilling procedure in this type of surgery, a repositioning of the fractured bone into correct position is first needed. This requires a segmentation process in which the bone segments are identified and the position of the dislocated part is determined. The segmentation must be automatic to cope with the large amount of data from the computer tomography scan. This work presents the first steps in the development of a hip fracture surgery simulation with patient specific models. Visual and haptic feedback is generated from the computer tomography data by simulating fluoroscopic images and the drilling process. We also present an automatic segmentation method to identify the fractured bone and determine the dislocation. This segmentation method is based on nonrigid registration with the Morphon method.     

半导体激光器的自动功率控制(APC)功能模块

半导体激光器的自动功率控制(APC)是光纤通信系统实用化过程中提出来的重要课题之一。为了保证激光器工作的安全可靠,APC模块除了稳定LD的预偏置以外还采用了钳位、限流和反向电压过冲等保护措施,并设置了激光器信号终断和寿命告警等监测点及输出端子。     

Accuracy and Real-Time Considerations for Implementing Various Virtual Metrology Algorithms

In the semiconductor industry, run-to-run (R2R) control is an important technique to improve process capability and further enhance the production yield. As the dimension of electronic devices shrink increasingly, wafer-to-wafer (W2W) advanced process control (APC) becomes essential for the critical stages of production processes. W2W APC requires the metrology values of each wafer; however, it will be highly time and cost consuming to obtain actual metrology values from each wafer by physical measurement. Recently, an efficient and cost-effective approach denoted “virtual metrology (VM)” was proposed to substitute the actual metrology. To implement VM in W2W APC, both conjecture-accuracy and real-time requirements need to be considered. In this paper, various VM algorithms, including back-propagation neural networks (BPNN), simple recurrent neural networks (SRNN), and multiple regression (MR), are evaluated to see whether they can meet the accuracy and real-time requirements of W2W APC or not. The fifth generation TFT-LCD chemical–vapor deposition process is used to test and verify the requirements. Test results show that both one-hidden-layered BPNN and SRNN VM algorithms achieve acceptable conjecture accuracy and meet the real-time requirements of semiconductor and TFT-LCD W2W APC applications.      

A fast automatic power control circuit for a small form-factor pluggable laser diode drive

A fast automatic power control (APC) circuit for a laser diode driver (LDD) has been implemented in a 0.6-μm BiCMOS process. The APC circuit adopts double-loops and variable-bandwidth techniques to achieve a turn-on time of < 400 μs for most kinds of TOSAs. Thus, it meets the small form-factor pluggable (SFP) agreement. Such techniques make a good tradeoffbetween stability, accuracy, turn-on time, noise and convenience. The measured results indicate that the APC circuit is suitable for SFP LDD.