高性能CVD金刚石薄膜涂层刀具的制备和试验研究

采用电子增强热丝EACVD法,以WC-Co硬质合金刀具为衬底制备金刚石涂层刀具,研究了提高涂层附着力的衬底预处理新方法,探讨了抑制Co催石墨化作用的有效措施,提出了改善金刚石薄膜表面粗糙度CVD后处理新工艺。研究结果表明,采用了Ar-H2微波等离子体刻蚀脱碳预处理方法对于提高金刚石薄膜涂层的附着力有明显效果,添加适量粘结促进剂,可有效地抑制CVD沉积过程中钴向表层扩散引起的催石墨化作用。采用分步沉积新工艺是减小金刚石薄膜表面粗糙度的有效方法。所制备的高附着力和低粗糙度的金刚石薄膜涂层刀具切削性能明显改善,对实现高效高精度切削加工具有十分重要的意义。     

CVD金刚石薄膜涂层轴承支撑器的制备和应用

轴承支撑器是轴承精密加工中的关键部件。本文采用热丝化学气相沉积(简称CVD)法,以丙酮和氢气为碳源,在WC-Co硬质合金轴承支撑器衬底上沉积金刚石薄膜,制备CVD金刚石薄膜涂层轴承支撑器,并应用于轴承的精密磨削加工。结果表明,合理控制衬底材料的预处理和CVD沉积工艺对金刚石薄膜质量、形貌、粗糙度和薄膜与衬底间的附着力有显著影响。与传统硬质合金轴承支撑器相比,CVD金刚石涂层轴承支撑器的耐用度和使用性能显著提高。     

提高CVD金刚石薄膜刀具膜—基附着力的工艺方法评述

提高金刚石薄膜与硬质合金基底之间的附着力是CVD金刚石薄膜刀具得以推广应用的关键因素。本文介绍了国内外采用CVD法制备金刚石薄膜刀具时提高膜—基附着力的典型工艺方法 ,评述了WC Co基底预处理及沉积工艺对CVD金刚石薄膜与基底之间附着力的影响     

CVD金刚石薄膜涂层铜线拉丝模的制备与应用

提高金刚石薄膜的表面质量和附着力是实现CVD金刚石涂层在耐磨器件领域中广泛应用的关键因素.本文通过优化沉积工艺参数,采用直拉丝化学气相沉积法在WC- Co硬质合金拉丝模内孔表面沉积金刚石薄膜.检测了该涂层的表面形貌、薄膜质量以及表面粗糙度,并把所制备的CVD金刚石薄膜涂层拉丝模具在拉拔铜线材生产线上进行了应用试验,结果...     

CVD金刚石薄膜的掺硼研究

采用固体三氧化二硼，在单晶硅（100）衬底上用微波CVD法生长金刚石薄膜和进行p型掺杂，对不同掺杂碳源浓度下CVD金刚石薄膜的掺杂和生长行为、薄膜表面形貌、薄膜的电性能等进行了研究。结果表明，硼确实已掺入金刚石膜中；在SEM下观察到硼掺杂金刚石膜结构致密没有孔洞；用Ti和Ag分别在掺杂金刚石薄膜表面制备电极，测试了在不同温度下电流随温度的变化。     

CVD金刚石涂层拉丝模温度场数值分析

衬底温度是热丝化学气相沉积(HFCVD)制备金刚石薄膜的重要参数之一,在拉丝模表面沉积CVD金刚石涂层时,均匀的衬底温度场显得尤为重要.对HFCVD系统中制备CVD金刚石涂层时拉丝模衬底温度场进行数值分析,得到了拉丝模温度场的分布和热丝参数对衬底温度场的影响规律,为CVD金刚石涂层拉丝模的制备提供重要指导.     

高性能复杂形状金刚石薄膜涂层刀具的制备和切削性能研究

通过偏压辅助增强热丝化学气相沉积法,采用螺旋形热丝排布方式以及优化的预处理方法和沉积工艺,在硬质合金印刷电路板铣刀的表面沉积了均匀的金刚石薄膜,采用扫描电镜和拉曼光谱研究了金刚石薄膜的表面特征.随后,通过铣削试验研究了金刚石涂层刀具的附着强度和切削性能.试验结果表明,复杂形状金刚石薄膜涂层铣刀既具有附着力强、耐磨性好的特点,同时又具备优异的切削性能,并且其制备无需后续抛光处理就能得到平整光滑的表面,这对于推动金刚石薄膜在复杂形状刀具上的产业化应用具有重要意义.     

复杂形状金刚石薄膜涂层刀具的制备与试验研究

为了提高金刚石薄膜与衬底附着力,以整体式硬质合金麻花钻为例,对刀具衬底的预处理技术和ＣＶＤ涂层技术进行了研究;以碳化硅颗粒增强铝基复合材料的加工为例,对复杂形状金刚石薄膜涂层刀具的制备及应用技术提出了合理建议。     

改善CVD金刚石薄膜涂层刀具性能的工艺研究

用热丝CVD法,以丙酮和氢气为碳源,在WC-Co硬质合金衬底上沉积金刚石薄膜,在分析了工艺条件(衬底温度、碳源浓度、反应压力)对金刚石薄膜性能的影响的基础上,提出了分步沉积法改善金刚石薄膜涂层刀具性能的新工艺.结果表明,合理控制工艺条件的新工艺对涂层薄膜质量、形貌和粗糙度、薄膜与衬底间的附着力、刀具的耐用度及切削性能有显著影响,对获取实用化的在硬质合金刀具基体上沉积高附着强度、低粗糙度金刚石薄膜的新技术具有重要的意义.     

以SiC过渡层为预处理工艺的金刚石涂层硬质合金微径铣刀研究

研究了采用强电流直流伸展电弧等离子体CVD技术,以SiC过渡层为预处理工艺,直径为0.8mm的微径铣刀上纳米金刚石涂层的制备。通过铣削6063DL31铝合金并与未涂层的微径铣刀进行对比,验证SiC过渡层+金刚石涂层微径铣刀的切削性能。结果表明,SiC过渡层可以有效降低Co对金刚石涂层沉积的不利影响,改善金刚石涂层的附着力,同时,铝合金铣削试验表明,金刚石涂层微径铣刀可以有效降低切屑的黏结和毛刺的形成,并且显著降低加工工件的表面粗糙度;因此,薄SiC过渡层可以作为预处理工艺应用于微径铣刀上金刚石涂层的制备。     

Friction and Wear Performance of Boron Doped,Undoped Microcrystalline and Fine Grained Composite Diamond Films

Chemical vapor deposition(CVD) diamond films have attracted more attentions due to their excellent mechanical properties. Whereas as-fabricated traditional diamond films in the previous studies don’t have enough adhesion or surface smoothness, which seriously impact their friction and wear performance, and thus limit their applications under extremely harsh conditions. A boron doped, undoped microcrystalline and fine grained composite diamond(BD-UM-FGCD) film is fabricated by a three-step method adopting hot filament CVD(HFCVD) method in the present study, presenting outstanding comprehensive performance, including the good adhesion between the substrate and the underlying boron doped diamond(BDD) layer, the extremely high hardness of the middle undoped microcrystalline diamond(UMCD) layer, as well as the low surface roughness and favorable polished convenience of the surface fine grained diamond(FGD) layer. The friction and wear behavior of this composite film sliding against low-carbon steel and silicon nitride balls are studied on a ball-on-plate rotational friction tester. Besides, its wear rate is further evaluated under a severer condition using an inner-hole polishing apparatus, with low-carbon steel wire as the counterpart. The test results show that the BD-UM-FGCD film performs very small friction coefficient and great friction behavior owing to its high surface smoothness, and meanwhile it also has excellent wear resistance because of the relatively high hardness of the surface FGD film and the extremely high hardness of the middle UMCD film. Moreover, under the industrial conditions for producing low-carbon steel wires, this composite film can sufficiently prolong the working lifetime of the drawing dies and improve their application effects. This research develops a novel composite diamond films owning great comprehensive properties, which have great potentials as protecting coatings on working surfaces of the wear-resistant and anti-frictional components.     

在WC-TiC-Co硬质合金基体上制备金刚石薄膜的试验研究

通过采用Cu/Ti复合过渡层在WC TiC Co硬质合金基体上制备金刚石薄膜的试验 ,研究了沉积工艺对金刚石薄膜的质量、表面粗糙度及附着力的影响。研究结果表明 ,采用Cu/Ti复合过渡层有利于提高金刚石薄膜的附着力 ;适当降低沉积温度虽然会导致金刚石薄膜中非金刚石碳含量增加 ,但有利于增强膜层附着力。     

Approach for Polishing Diamond Coated Complicated Cutting Tool: Abrasive Flow Machining(AFM)

Lower surface roughness and sharper cutting edge are beneficial for improving the machining quality of the cut?ting tool, while coatings often deteriorate them. Focusing on the diamond coated WC?Co milling cutter, the abrasive flow machining(AFM) is selected for reducing the surface roughness and sharpening the cutting edge. Comparative cutting tests are conducted on di erent types of coated cutters before and after AFM, as well as uncoated WC?Co one, demonstrating that the boron?doped microcrystalline and undoped fine?grained composite diamond coated cutter after the AFM(AFM?BDM?UFGCD) is a good choice for the finish milling of the 6063 Al alloy in the present case, because it shows favorable machining quality close to the uncoated one, but much prolonged tool lifetime. Besides, compared with the micro?sized diamond films, it is much more convenient and e cient to finish the BDM?UFGCD coated cutter covered by nano?sized diamond grains, and resharpen its cutting edge by the AFM, owing to the lower initial surface roughness and hardness. Moreover, the boron incorporation and micro?sized grains in the underly?ing layer can enhance the film?substrate adhesion, avoid the rapid film removal in the machining process, and thus maximize the tool life(1040 m, four times more than the uncoated one). In general, the AFM is firstly proposed and discussed for post?processing the diamond coated complicated cutting tools, which is proved to be feasible for improving the cutting performance     

A multilayer approach for enhancing the erosive wear resistance of CVD diamond coatings

The erosive wear behavior of mono-, bi- and multilayered diamond composite coatings grown by hot filament chemical vapor deposition (HFCVD) is investigated. The effect of the surface pre-treatment on the silicon nitride substrates was firstly evaluated revealing that flat lapping mechanical treatment combined with chemical CF₄ plasma etching is the best surface preparation to achieve high adhesion levels. Multilayers were designed to combine the excellent adhesion of microcrystalline diamond (MCD) with a top nanocrystalline diamond (NCD) layer of reduced surface roughness. Indeed, the multilayered diamond coatings revealed the best erosive resistance, whose damage occurred by gradual loosening of material from the outer layer after longer testing time. The absence of areas with film spallation or substrate exposure is given by the action of the MCD/NCD interfaces in deflecting cracks, thus acting as “energy sinks” to further propagation. An analytical model of the stress field distribution within the coatings based on the von Mises criterion was developed to elucidate the erosive mechanical behavior of the different diamond composites.     

金刚石薄膜与 WC-Co 硬质合金的附着性研究

以甲烷和氢气为气源，用热丝ＣＶＤ法，在ＷＣ－６％Ｃｏ的硬质合金基体上沉积金刚石薄膜。研究了基体表面经抛光、腐蚀、脱碳及镀中间层等不同的预处理对金刚石薄膜与基体的附着性的影响。试验结果表明：基体表面经抛光、腐蚀再经脱碳或镀ＴｉＮ中间层，可改善和提高附着性，金刚石薄膜的形核率和沉积速率有所降低；基体表面只经抛光、腐蚀预处理，金刚石薄膜的形核率和沉积速率较高，结晶性好，但附着性较差；采用分段沉积，可以提高金刚石薄膜的附着性。     

硬质合金基体预处理工艺对CVD金刚石涂层附着性能的影响

采用热丝CVD法通过不同基体处理工艺在YG8和YG6硬质合金基体上沉积了金刚石涂层,考察了基体表面预处理工艺对基体表面形貌、残留钴含量以及涂层结合力的影响。实验结果表明,一步法酸刻蚀的最佳作用时间为15min左右,无论采用一步法还是二步法,处理后的YG8硬质合金基体表面残留钴均已大幅降低至3%左右,而二步法处理后YG6基体表面钴含量仅为0.66%。通过压痕实验对比分析得出,一步法酸处理15min后的硬质合金基体上沉积的金刚石涂层压痕较小,其最大压痕尺寸为145μm,两步法处理硬质合金基体金刚石涂层压痕面积最小,表现出良好的附着性能。     

Structural, optical and mechanical properties of nanostructure diamond synthesized by chemical vapor deposition

Nanostructure diamond (NSD) films on Si substrate are prepared by microwave plasma enhanced chemical vapor deposition (MPECVD) using methane and hydrogen as the reactants with two-step negative substrate bias (SB). The dependencies of the NSD film morphology, grains, surface roughness, crystal and bonding structures and hardness on the negative SB at the bias-enhanced growth (BEG) step and substrate temperature during growth have been investigated by conducting atomic force microscopy (CAFM), X-ray diffraction (XRD), Raman spectroscopy and nanoindentation. The hardness of the NSD film is found to be as high as 80 GPa with CAFM average and root mean square roughness of 7 and 9 nm, respectively, under optimal negative SB at the BEG step. From the studies of substrate temperature effect, the hardness of the NSD film is as high as 70 GPa, with average and root mean square CAFM roughness of 9 and 11 nm, respectively, which were obtained at a substrate temperature of 500 °C. In both cases, the film hardness was found to be affected by the size of clusters, which are composed of many small NSD particles, the amount of NSD in an amorphous matrix as well as surface roughness. We also synthesized transparent NSD films by MPECVD under optimized single-step growth conditions on quartz substrates, which are scratched with several micrometers diamond powder. A hardness as high as 60 GPa and a maximum transmittance of 60% in the visible light region are achieved for an NSD coating of 1.0 μm thickness with small surface roughness.     

基体偏压对Cr/DLC薄膜结构及力学性能的影响

采用高功率脉冲磁控溅射方法在不同基体偏压下的钢基体上沉积含Cr过渡层的DLC薄膜.利用原子力显微镜、场发射扫描电镜、Raman光谱、动态超显微硬度计和划痕仪对薄膜的表面形貌、截面形貌、结构成分、力学性能进行表征.结果表明:随着基体偏压的增大,薄膜表面更加平整,表面粗糙度减小;不同基体偏压下制备的DLC薄膜与基体结合良好...