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1.
为了研究TiN/CrN多层薄膜微观结构与力学性能的关系,采用磁控溅射技术制备了TiN、CrN单层薄膜和3种不同调制周期的TiN/CrN多层薄膜。通过原子力显微镜和X射线衍射仪分析了膜的表面形貌和相结构。使用纳米压痕仪测试薄膜的硬度和压入塑性,用曲率法测定薄膜的残余应力。结果表明,TiN/CrN的多层薄膜是由TiN和Cr_2N两相组成,随着调制周期的增大,TiN层与CrN层之间的界面区域变小,界面平滑且明显。力学性能方面,多层薄膜的硬度和压入塑性比单层膜好,并且多层薄膜随调制周期的减小,硬度和压入塑性增大,残余应力随周期的增加而逐渐增大。综上可见,TiN/CrN多层薄膜的力学性能的改善取决于界面区域的大小和形貌,即调制周期。该结论与Hall-Petch理论相吻合。  相似文献   

2.
采用多弧离子镀技术在65Mn钢表面制备了不同调制周期的Cr/CrN纳米多层膜.采用俄歇能谱仪(AES)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米硬度仪、轮廓仪和划痕仪,分析了不同调制周期Cr/CrN纳米多层膜的成分分布、微观结构、力学性能、残余应力和结合强度.结果表明,Cr/CrN纳米多层膜的表面平整致密,截面层状调制结构清晰,其调制结构为Cr层-过渡层-CrN层的"三明治"结构,调制比约为1∶ 1.多层膜由CrN、Cr2N和Cr相组成,在CrN(200)方向上出现择优取向.当调制周期为80 nm时,多层膜的硬度值相对较高.随调制周期的增大,Cr/CrN多层膜的残余应力值减小,结合强度值先增大后减小.当调制周期为120 nm时,涂层的划痕临界载荷值相对较高,为69 N.  相似文献   

3.
气相沉积 Ti / TiN 多层薄膜的力学及耐腐蚀性能研究   总被引:1,自引:1,他引:0  
张啸宇  谭俊 《表面技术》2015,44(12):80-84,91
目的研究多层薄膜的界面对薄膜性能的影响。方法通过直流磁控溅射法在45#钢表面制备Ti N及Ti/Ti N多层薄膜,采用扫描电镜和XRD衍射分析仪对薄膜表面形貌及相结构进行观察和分析,使用纳米压痕仪、电子薄膜应力分布测试仪对Ti N及Ti/Ti多层薄膜的力学性能以及残余应力大小进行研究,并运用电化学设备对Ti N及不同调制周期的Ti/Ti多层薄膜的耐腐蚀性能进行研究。结果制备的Ti N及Ti/Ti N多层薄膜表面光滑且结构致密,Ti N晶粒细小且为非晶相;薄膜力学性能良好,内部均存在残余压应力。随着调制周期的减小,弹性模量和硬度先减小后增大,内部残余应力逐渐减小且分布不均匀程度逐渐增大。薄膜在H_2SO_4中的腐蚀试验表明:当Ti/Ti N多层薄膜调制周期为1μm时,多层薄膜的耐腐蚀性能不如Ti N薄膜,随着Ti/Ti N多层薄膜随调制周期的减小,多层薄膜的耐腐蚀性能逐渐升高;当调制周期为0.5μm时,Ti/Ti N多层薄膜的耐蚀性能已超过Ti N薄膜。结论 Ti/Ti N多层薄膜界面的增多有助于减小薄膜的残余应力,并且可提高薄膜的耐蚀性能。  相似文献   

4.
采用真空阴极电弧离子镀技术,在TC11钛合金和单晶Si片表面分别沉积不同调制周期、不同RTi/TiN:RZr/ZrN调制比和不同厚度的Ti-TiN-Zr-ZrN多层膜。用扫描电镜、X射线衍射仪、划痕仪、显微硬度计和应力测试仪分析测试了多层膜的截面形貌、厚度、结合力、硬度和残余应力;重点研究了调制周期、调制比和膜层厚度等调制结构的改变对多层膜残余应力和相关性能的影响。结果表明:增加调制周期,则残余应力降低,结合力和硬度均增大;降低RTi/TiN:RZr/ZrN调制比,则残余应力增大,结合力下降,硬度增加;增大多层膜厚度,则残余应力略有上升,结合力和硬度都提高,当膜层厚度达到7.54μm后,硬度稳定在30Gpa左右。  相似文献   

5.
为了阐明调制周期对薄膜微观组织及薄膜与基体结合力的影响,采用反应磁控溅射在Ti6Al4V基板上交替沉积了Ti层及TiN层制备了TiN/Ti多层膜。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、显微硬度仪和划痕仪测量分析了薄膜的晶体结构、微观组织、硬度以及薄膜与基体之间的结合力。研究结果表明:TiN/Ti多层膜中均存在TiN,Ti和Ti2N 3种相。TiN/Ti多层膜均以柱状晶方式生长,在调制周期较大(5层)时,TiN和Ti层的界面清晰;随着调制周期的减小(层数增加),TiN和Ti层的界面逐渐消失。与单层TiN薄膜相比,多层TiN/Ti薄膜的硬度显著提高;但随着薄膜层数的增加,多层TiN/Ti薄膜硬度略微降低。当调制周期为80nm(30层)时,薄膜与基体的结合力明显提高,达到73N。  相似文献   

6.
范迪  雷浩  郭朝乾  宫骏  孙超 《表面技术》2017,46(6):156-160
目的研究调制周期对磁控溅射WB_2/CrN多层膜结构及性能的影响。方法通过双靶直流磁控溅射法,在硅片、石英玻璃片及不锈钢上,制备Al B_2型WB_2薄膜与CrN薄膜及其多层复合薄膜,采用X射线衍射及扫描电子显微镜对其相结构及形貌进行观察和分析,使用维氏显微硬度仪及划痕仪对多层膜的硬度及膜基结合力进行研究。结果磁控溅射WB_2/CrN多层薄膜呈现出柱状生长趋势,且层状结构明显,仅当调制周期大于317 nm时,多层膜中才出现WB_2晶体的衍射峰。结论多层膜中的WB_2薄膜在本实验条件下的临界结晶厚度大于150 nm。随着调制周期的减小,CrN层生长取向发生由(200)晶面向多晶面的转变,WB_2层生长取向由(101)晶面向(001)晶面转变。多层膜硬度随调制周期的减小大体呈下降趋势,在调制周期为317 nm时达到最大值。结合力变化趋势与硬度相反,CrN层及多层界面有助于复合薄膜膜基结合强度的提高。  相似文献   

7.
赵阳  王娟  徐晓明  张庆瑜 《金属学报》2006,42(4):389-393
利用反应磁控溅射方法,制备了调制周期相同而调制比不同的TiN/TaN多层膜.利用XRD,HRTEM和纳米压痕仪分别对多层膜的结构、微观状态和力学性能进行了系统研究.结果表明:调制结构不仅改变多层膜的生长速率,而且能导致多层膜择优生长取向的变化;界面应力的存在使得薄膜生长速率随沉积层厚度的增加而下降;在TiN/TaN多层膜中存在着各自独立外延生长的[111]和[100]两种取向的调制结构,且具有不同的调制周期;调制周期为6nm左右的TiN/TaN多层膜的硬度与弹性模量分别提高约50%与30%;在调制比为3:1时,硬度最大值为34.2GPa,弹性模量为344.9GPa;根据结构和力学性能的分析结果,讨论了TiN/TaN多层膜的硬化机制.  相似文献   

8.
电弧离子镀方法制备的Ti/TiN多层膜的结构与耐腐蚀性能   总被引:1,自引:0,他引:1  
采用电弧离子镀技术,通过周期性变换环境气氛,在7075Al合金上制备了Ti/TiN多层膜,并研究调制周期对多层膜的结构组成和腐蚀性能的影响。结果表明:多层膜与铝合金衬底界面结合较好,基本没有孔洞等缺陷。多层膜具有明显的层状特征,层间界面清晰。多层膜中TiN与单层中TiN薄膜有着相同的晶体结构,并存在(111)择优取向,每个调制周期内的TiN层都呈柱状生长。随着调制周期变小,多层膜阳极极化曲线的腐蚀电位增加,交流阻抗谱的阻抗值增大,容抗弧的半径也增大,即膜层的耐腐蚀性增加。多层膜调制周期的减小使得薄膜中含有的层界面增多,而贯穿至衬底表面的针孔等缺陷的数量将减少,这样,腐蚀性介质经过针孔等缺陷与衬底接触的机会变少,这将使薄膜的抗腐蚀能力得到改善。  相似文献   

9.
目的 探究Cr/CrN/Cr/CrAlN多层膜的最佳调制比.方法 利用电弧离子镀技术,在TC4钛合金上制备了不同调制比的Cr/CrN/Cr/CrAlN多层膜.利用扫描电子显微镜观察膜层表面和截面形貌;用Image-Pro分析软件对表面的大颗粒进行定量分析;利用X射线衍射法表征膜层的晶体结构;采用维氏硬度计测量膜层的显微硬度;采用划痕试验仪测量膜层与基体之间的结合力(临界载荷);通过基片弯曲法测量并计算得到膜层的残余应力;利用根据ASTM G76-05标准特制的AS600-喷砂试验机进行了抗冲蚀性能测试;采用三维表面轮廓仪测量冲蚀坑深度.结果 膜层表面质量和生长取向与LCr/CrN:LCr/CrAlN调制比密切相关,随着Cr/CrN比例的增加,膜层表面质量越来越好,择优取向由(111)晶面转为(200)晶面.多层膜的硬度随Cr/CrN比例的增加,呈下降趋势,结合力、残余应力和韧性则随之呈先升后降的趋势,并在LCr/CrN:LCr/CrAlN为1:2时,达到最佳.多层膜的抗砂粒冲蚀性能变化与力学性能变化一致,在LCr/CrN:LCr/CrAlN为1:2时达到最佳,其抗冲蚀能力是TC4基材的3倍以上,多层膜呈典型的脆性断裂失效形式.结论 在调制比LCr/CrN:LCr/CrAlN=1:2时,膜层获得最佳的抗冲蚀性能.  相似文献   

10.
采用非平衡反应磁控溅射的方法在Si(100)基片上沉积Ti(C,N)复合膜和不同调制周期、调制比的TiN/Ti(C,N)纳米多层薄膜。薄膜的微观结构和力学性能采用X射线衍射仪(XRD)、显微硬度计进行表征。结果表明,Ti(C,N)复合膜的微观结构和力学性能与掺入C的含量有关;TiN/Ti(C,N)纳米多层膜的微观结构和力学性能与调制周期和调制比有关,其显微硬度在一定的调制周期和调制比范围内出现了超硬现象。Ti(C,N)、TiN/Ti(C,N)均为δ-NaCl面心立方结构;Ti(C,N)复合膜显微硬度提高是因为固溶强化,TiN/Ti(C,N)纳米多层膜硬度的提高主要是共格外延生长在界面处产生的交变应力场。  相似文献   

11.
In as-welded state, each region of 2219 aluminum alloy TIG-welded joint shows diff erent microstructure and microhardness due to the diff erent welding heat cycles and the resulting evolution of second phases. After the post-weld heat treatment, both the amount and the size of the eutectic structure or θ phases decreased. Correspondingly, both the Cu content in α-Al matrix and the microhardness increased to a similar level in each region of the joint, and the tensile strength of the entire joint was greatly improved. Post-weld heat treatment played the role of solid solution strengthening and aging strengthening. After the post-weld heat treatment, the weld performance became similar to other regions, but weld reinforcements lost their reinforcing eff ect on the weld and their existence was more of an adverse eff ect. The joint without weld reinforcements after the post-weld heat treatment had the optimal tensile properties, and the specimens randomly crack in the weld zone.  相似文献   

12.
After nearly two years' tense construction, the first phase of industrialized base of Shenyang Research Institute of Foundry (SRIF), located at the Tiexi Casting and Forging Industrial Park in the west of Tiexi District, has now been completed and formally put into operation.  相似文献   

13.
吴玉梅  熊晓云  靳蓉  孙敬民  杨林  罗晓星 《金属学报》2005,10(10):1100-1103
目的: 观察本实验室合成的一种治疗阿尔茨海默氏症(AD)的药物(1-二甲基磷酰基-2, 2, 2 -三氯)-乙基-1-醇烟酸醋(NMF),对体外培养的皮层神经细胞活性的影响以及对海人藻酸(KA)所致的神经损伤的保护作用。方法: 采用体外培养皮层神经元的方法,解剖分离 15 d胚胎小鼠皮层神经细胞, 接种于 96孔板,48 h 后加药并培养 72 h,以 MIT 法 观察 NMF 对小鼠皮层神经细胞活性的影响;同时将接种于 24 孔板的细胞预先给予 NMF,d 3 时加或不加KA处理后,以台盼蓝染色鉴别并计数死、活细胞,可得出细胞的存活率。结果: NMF 明显促进胎鼠皮层神经元活性,其中 NMF1、0. 1、10nmol·L-1促进神经元活性增殖率分别高达 34.7%、37.4%、36. 7%, NMF 明显促进正常胎鼠皮层神经元存活卒,与对照组比较,10nmol·L-1 NMF 对皮层神经元的存活率分别提高 39.3%、73.5%。 NMF能显著 对抗 KA 所致的神经元损伤,与 KA 损伤组相比, NMF0.1、10、10nmol·L-1对损伤皮层神经元的保护率分别为 77.30%、80.10%、84.15%。结论: NMF 明 显促进胎鼠皮层神经元的洁性、提高正常皮层神经元,的存活卒,并能有效地保护KA所致的神经元损伤,提示 NMF 是一种很有潜力的治疗 AD 的药物。  相似文献   

14.
Institute of Process Engineering, Chinese Academy of Sciences, China, has proposed a method for oxidative leaching of chromite with potassium hydroxide. Understanding the mechanism of chromite decomposition, especially in the potassium hydroxide fusion, is important for the optimization of the operating parameters of the oxidative leaching process. A traditional thermodynamic method is proposed and the thermal decomposition and the reaction decomposition during the oxidative leaching of chromite with KOH and oxygen is discussed, which suggests that chromite is mainly destroyed by reactions with KOH and oxygen. Meanwhile, equilibrium of the main reactions of the above process was calculated at different temperatures and oxygen partial pressures. The stable zones of productions, namely, K2CrO4 and Fe2O3, increase with the decrease of temperature, which indicates that higher temperature is not beneficial to thermodynamic reactions. In addition, a comparison of the general alkali methods is carried out, and it is concluded that the KOH leaching process is thermodynamically superior to the conventional chromate production process.  相似文献   

15.
The effect of isochronal heat treatments for 1h on variation of damping, hardness and microstructural change of the magnesium wrought alloy AZ61 was investigated. Damping and hardness behaviour could be attributed to the evolution of precipitation process. The influence of precipitation on damping behaviour was explained in the framework of the dislocation string model of Granato and Lücke.  相似文献   

16.
The motion of melt droplets in spray degassing process was analyzed theoretically. The height of the treatment tank in spray degassing process could be determined by the results of theoretical calculation of motion of melt droplets. To know whether the melt droplets would solidify during spraying process, the balance temperature of melt droplets was also theoretically analyzed. Then proof experiments for theoretical results about temperature of melt droplets were carried. In comparison, the experimental results were nearly similar to the calculation results.  相似文献   

17.
On the basis of the single-particle framework, a new theory on inclusion growth in metallurgical melts is developed to study the kinetics of inclusion growth on account of reaction and collision. The studies show that the early growth of inclusion depends on reaction growth and Brawnian motion collision, and where the former is decisive, the late growth depends on turbulence collision and Stokes' collision, and where the former is dominant; collision growth is very quick during the smelting process, lessened in the refining process, but nearly negligible in the continuous casting process.  相似文献   

18.
Coherent second phase often exhibits anisotropic morphology with specifi c orientations with respect to both the second and the matrix phases. As a key feature of microstructure, the morphology of the coherent particles is essential for understanding the second-phase strengthening eff ect in various industrial alloys. This letter reports anisotropic growth of coherent ferrite from austenite matrix in pure iron based on molecular dynamics simulation. We found that the ferrite grain tends to grow into an elongated plate-like shape, independent of its initial confi guration. The fi nal shape of the ferrite is closely related to the misfi t between the two phases, with the longest direction and the broad facet of the plate being, respectively, consistent with the best matching direction and the best matching plane calculated via the Burgers vector content(BVC) method. The strain energy calculation in the framework of Eshelby's inclusion theory verifi es that the simulated orientation of the coherent ferrite is energetically favorable. It is anticipated that the BVC method will be applicable in analysis of anisotropic growth and morphology of coherent second phase in other phase transformation systems.  相似文献   

19.
An approach based on film buckling under simple uniaxial tensile testing was utilized in this paper to quantitatively estimate the interfacial energy of the nanostructured multilayer films(NMFs) adherent to flexible substrates. The interfacial energies of polyimide-supported NMFs are determined to be *5.0 J/m2 for Cu/Cr, *4.1 J/m2 for Cu/Ta,*2.8 J/m2 for Cu/Mo, *1.1 J/m2 for Cu/Nb, and *1.2 J/m2 for Cu/Zr NMFs. Furthermore, a linear relationship between the adhesion energy and the interfacial shear strength is clearly demonstrated for the Cu-based NMFs, which is highly indicative of the applicability and reliability of the modified models.  相似文献   

20.
A 17 vol% SiCp/Al–Mg–Si–Cu composite plate with a thickness of 3 mm was successfully friction stir welded(FSWed) at a very high welding speed of 2000 mm/min for the first time. Microstructural observation indicated that the coarsening of the precipitates was greatly inhibited in the heat-affected zone of the FSW joint at high welding speed, due to the significantly reduced peak temperature and duration at high temperature. Therefore, prominent enhancement of the hardness was achieved at the lowest hardness zone of the FSW joint at this high welding speed, which was similar to that of the nugget zone. Furthermore, the ultimate tensile strength of the joint was as high as 369 MPa, which was much higher than that obtained at low welding speed of 100 mm/min(298 MPa). This study provides an effective method to weld aluminum matrix composite with superior quality and high welding efficiency.  相似文献   

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