微电路封装产品内部水汽含量的分析与控制方法

为了使我所微电路封装产品能广泛满足航空、航天及其他特殊领域对内部水汽含量的要求(≤5000ppm),提出了降低金属或陶瓷结构封装的微电路封装产品内部水汽含量的控制方法和工艺要求。     

陶瓷封装电路内部水汽的稳定性控制

简述了集成电路陶瓷封装内部水汽含量的不稳定性,主要是由粘接材料导电胶在高温下分解释放出的水汽所造成的.不同的封装温度内部水汽含量不一样.说明导电胶应充分固化,尽可能在较低的温度下进行封盖.     

内部水汽含量分析比对

介绍了国内外电子元器件内部水汽含量分析比对的工作现状.为正确判定元器件的质量水平,制定了内部水汽含量分析比对的详细方案,包括比对方案设计、比对样品制作等.分析比对实验结果表明,此方案是切实可行的.     

密封电子元器件内部水汽含量问题探讨

提出了国产密封电子元器件封装内部水汽含量高的问题，阐述了内部水汽对元器件性能与可靠性的影响，探讨了降低内部水汽含量的主要技术途径。     

半导体器件和集成电路水汽含量控制的研究

半导体器件和集成电路水汽含量偏高,会影响产品的电性能和可靠性。随着可靠性要求的提高,半导体器件和集成电路的内部水汽含量要求控制在5×10^-3以下。导致水汽含量偏高的原因有3个方面：一是壳体的密封性能差;二是预烘焙不够充分或封帽时控制不当：三是封帽时氮气的纯度不高。针对这3个方面因素分别提出了相应的解决办法,将封装产品的水汽含量稳定地控制在5×10^-3以下,一般内控指标要求在2×10^-3以下,才能保证产品批次性质量要求,从而提高产品的可靠性．     

高可靠集成电路封装技术研究

针对半导体模拟集成电路内部水汽含量大,不能满足装备对集成电路长期可靠性要求的现状,对陶瓷熔封、金属储能焊封两种封装技术进行了系统分析,针对可能导致器件内部水汽含量增大的主要原因,进行工艺研究,实现了有效控制器件内部水汽含量的预定目标,使封装器件内部的水汽含量由10000-50000ppm提升到5000ppm以内的水平,大幅度提升器件封装的可靠性。     

气密性封装内部水汽含量的控制

气密性封装内部水汽含量过高,会使芯片及电连接系统发生各种物理化学反应,从而造成器件参数不稳定甚至失效,为了保证空封半导体器件的可靠性,生产上不仅需要检测器件封装的气密性,而且需对器件内部水汽含量进行有效的控制。因国内许多生产单位不具备对内部水汽含量进行有效控制的条件和检测设备,因而通过本文的讨论并采用有效防止水汽存在或引入器件的内部,使水汽含量控制在规定的范围内(GJB548A-96、GJB33A-97规定内部水汽含量为:100±5℃,烘24小时以上,小于5000ppmV,且这是最低要求)。因要使器件(未经钝化处理)无因水汽引起的失效,最稳妥的办法是使器件内部水汽含量小于500ppmv;实际上,对大多数器件内部水汽含量若能保持在1000ppmv 以下即能保证器件可靠运行。我们采用合金烧结芯片、合金封帽的器件其内部水汽含量控制在300ppmV 左右,聚合物导电胶装片、合金封帽的在1200ppmV 左右,银玻璃装片、Pb-Sn-Ag 合金封帽的在3000ppmV 左右,即便有某些偏差,亦能保证内部水汽含量控制在较低的范围内,使生产的器件可靠性大大提高,并能100%通过水汽含量检测。     

密封元器件的残余气氛分析

简要介绍了密封元器件内部残余气氛分析的概念,以及生产厂家和使用方了解产品内部残余气氛分析的意义和作用。如何进行内部气氛分析,了解残余气氛可能造成的失效模式。如何进行产品的工艺调整,改进生产工艺以控制水汽含量,有助于提高密封元器件产品的质量和可靠性水平。     

微电路内部气氛含量分析与控制

微电路内部水汽含量是影响器件可靠性的主要因素,水汽的控制包括粘接材料选择、清洗、密封前预烘烤、气密性焊接,等等.文章分析了微电路内部气氛的组成及来源,并根据实际案例,提出了与热应力和机械应力相关的间隙性漏气或单向漏气原理及其解决措施;给出了计算器件漏率的数学模型和内部气氛含量控制技术.     

国产光电耦合器密封试验和内部水汽含量检测结果分析

本文对国内三个光电耦合器主要生产有的多种型号品种气胱电耦合产品开展了密封试验和内部水汽含量检测,并着重对试验结果进行了分析讨论。     

Moisture assessment in transformers including overloading limits

Summary  A moisture model determines the moisture distribution in cellulose and oil. The model focuses on oil flow, moisture vapour pressure and the saturation properties of oil and cellulose. Measurements of material properties form the basis of each computation model. Direct measurements were performed. Samples of paper and pressboard were aged in oil. The measurements of moisture absorption were performed in air. For given moisture content the moisture vapour pressure reaches lower values than in previous results. Consequently, moisture values in oil reach lower values and the risk of bubbling at rising temperatures reduces. It has, for the first time, been established that bubbling requires a contribution of dissolved gas like air to reach critical vapour pressure levels to obtain bubbling at 150 °C hotspot and with 3% average moisture content and 1.2% in the hotspot respectively. Here oil must absorb on atmosphere air at 70 °C. Without dissolved gas an average moisture content of 4% and a hot spot temperature of about 165 °C would be necessary to come close to a risky condition. The low tendency to bubbling is also favoured by the reduced moisture content in the winding hotspot insulation which is caused by the temperature distribution due to axial oil gradient and winding gradient. The general calculation for individual spots in the transformer insulation like the hotspot is based on the moisture vapour pressure of cellulose and oil as the driving force of moisture migration. The axial temperature distribution, however, generates an axial gradient of moisture vapour pressures in oil. The cellulose insulation reaches the moisture pressure level of its neighbouring oil. The average cellulose moisture content provides basic information about the moisture condition. The calculation model is required to determine the moisture values in a transformer under operation conditions. Aging and bubbling considerations are based on the moisture content of the hotspot. Filling of a transformer with oil often happens at a moisture content of 5 ppm. At low temperatures and slow moisture diffusion into the bulk material the cellulose surface can develop extremely high moisture values. Therefore, a high temperature during filling is recommended. Furthermore, a transformer can, in principle, absorb moisture from the atmosphere or vice verse. The direction of migration is determined by the difference of local moisture vapour pressure between oil and atmosphere which depends on temperature and moisture. The slow migration velocity at low temperatures and tightness of the tank limits the value to below 7% moisture content in cellulose.     

Moisture evolution analysis of sealing glasses used in integrated circuit packaging

Free moisture in the cavity of a sealed hermetic integrated circuit is considered an important reliability hazard. The contribution to the cavity moisture by the packaging materials can be studied effectively using the technique of moisture evolution analysis (MEA). The technique involves passing a dry carrier gas over the sample at high temperatures and measuring its moisture uptake coulometrically. The standard moisture evolution technique has been modified to quantify the kinetics of moisture evolution from sealing glasses used for hermetic sealing of I.C. packages which are primary contributors to total cavity moisture. It is also shown that once the moisture evolution mechanisms are understood, the technique of moisture evolution analysis can be correlated to a more complex, industry standard method for free cavity moisture measurement in a sealed hermetic package (RGA-mass spectrometry). MEA can therefore be used for the process control and prediction of free cavity moisture of hermetically sealed I.C. packages.     

电离式碳纳米管气体湿度传感器

研究了一种新颖的碳纳米管气态离化结构的碳纳米管气体湿度传感器。该传感器具有一对或多对叉指状侧壁电极结构,电极上覆盖一层多壁碳纳米管薄膜,其利用碳纳米管高长径比的尖端电场收敛作用增大局部电场,有效地增强了传感器对气体湿度的敏感性。通过搭建的气体湿度测试平台,对传感器的静态和动态气体湿度特性进行了研究,结果显示传感器对60%以上相对气体湿度表现出了较强的灵敏度。与吸附式等传统气体湿度传感器对比,该气体湿度传感器具有较快的响应速度(约为0.15 s)和回复速度(约为0.6 s),较传统湿度传感器高了一个数量级,能够用于实时并且快速的气体湿度参量标定。     

基于作物茎杆生理电容式水分传感器的研究

准确检测作物生长的水分状况,对灌溉决策十分重要。本文介绍了作物茎杆生理电容式水分传感器的原理及电路设计,该传感器可实现对作物生长水分状况的无损检测,通过试验证明该电容传感器测量作物含水量的变化是可行的。基于茎杆生理电容变化的作物水分非破坏性检测技术,研制结构简单、测量准确、抗干扰能力强的作物水分测量传感器,对丰富节水灌溉技术和传感器技术具有重要的意义。     

Integrated vapor pressure, hygroswelling, and thermo-mechanical stress modeling of QFN package during reflow with interfacial fracture mechanics analysis

In this paper, a comprehensive and integrated package stress model is established for quad flat non-lead package with detailed considerations of effects of moisture diffusion, heat transfer, thermo-mechanical stress, hygro-mechanical stress and vapor pressure induced during reflow. The critical plastic materials, i.e., moldcompound and die attach are characterized for hygroswelling and moisture properties, which are not easily available from material suppliers. The moisture absorption during preconditioning at JEDEC Level 1, and moisture desorption at various high temperatures are characterized. The moisture diffusivity is a few orders higher at reflow temperature than moisture preconditioning temperature. Due to coefficient of moisture expansion mismatch among various materials, hygro-mechanical stress is induced. The concept is analogous to coefficient of thermal expansion mismatch which results in thermo-mechanical stress. Thermal diffusivity is much faster than the moisture diffusivity. During reflow, the internal package reaches uniform temperature within a few seconds. The vapor pressure can be calculated based on the local moisture concentration after preconditioning. Results show that the vapor pressure saturates much faster than the moisture diffusion, and a near uniform vapor pressure is reached in the package. The vapor pressure introduces additional strain of the same order as the thermal strain and hygrostrain to the package. Subsequently, the interfacial fracture mechanics model is applied to study the effect of crack length on die/mold compound and die/die attach delamination.     

压电波动法监测土壤含水率的可行性研究

基础工程施工的安全性常以基坑稳定性为前提,而土壤的含水率是边坡稳定性的关键因素。但是,土体内部含水率的观测困难,很难实时了解土体内部水分的变化情况。目前对土壤含水率进行监测的方法较少,故而迫切需要一种对土体结构含水率进行实时监测的方法。该文通过制作简易土箱,利用压电智能骨料并结合压电波动法对土箱内土壤进行含水率监测,获得了不同含水率下的压电信号及小波包能量。基于小波包分析方法发现,压电信号幅值及对应的小波包能量指数与土壤含水率呈正相关关系,且土壤含水率越大,小波包能量指数的上升速率越慢,并在其含水率接近饱和时基本不再变化,验证了该土壤含水率监测方法具有良好可行性。     

Impurities in hydride gases part 1: Investigation of trace moisture in the liquid and vapor phase of ultra-pure ammonia by FTIR spectroscopy

Trace moisture in ammonia is a critical impurity in the growth of epitaxial nitride films. Because moisture is very soluble in the liquid phase of ammonia, moisture in the vapor phase increases dramatically with cylinder use, and is often far higher than the nominal purity specification. A reliable method was developed for sampling and analyzing trace moisture in both liquid-and vaporphase ammonia using FTIR. Analysis of liquid-phase ammonia gives a stable and representative moisture value whereas gas-phase moisture levels strongly depend on sampling time, flow rate, temperature, mixing, and extent of cylinder use. The variation of vapor-phase moisture is discussed in terms of a variable vaporization model with applications to high flow.     

基于可见光红外与被动微波遥感的土壤水分协同反演

利用MODIS传感器的可见光、红外波段数据反演土壤水分在一定时段内的基准值,用被动微波传感器AMSR-E数据反演其变化量,提出将被动微波遥感数据与热红外遥感数据在模型级别协同反演大范围地表土壤水分的方法,这样每天可输出1 km×1 km的升、降轨土壤水分反演结果.以新疆为研究区,对上述方法进行了土壤水分协同反演实验,以地面实测数据为参考的验证结果表明,所提模型得到的土壤水分值与地面实测值之间相关性较高,均方根误差较小,优于单一传感器数据的反演结果,可更好地满足新疆土壤水分监测的需求.     

A fast moisture sensitivity level qualification method

In this paper, a fast moisture sensitivity level (MSL) qualification method and a fast moisture characterization method are discussed. The fast moisture characterization uses a stepwise method to obtain more reliable and more material moisture properties. The established relationships for moisture diffusion coefficients and moisture saturation levels with respect to the temperature and relative humidity can be used to predict moisture properties in the MSL range. Fast moisture sensitivity level qualification is accomplished with the aid of simulation combined with the characterized moisture diffusion properties. Moisture absorption processes at different conditions are simulated using a 3D model at conditions according to the moisture sensitivity test levels. Simulation of weight change at different condition and simulation of local moisture concentration are performed and compared between different conditions. Simulations show that at 696 h preconditioning time at 30 °C/60%RH for MSL level 2a can be decreased to 42 h at 85 °C/85%RH. Time required for package reliability and moisture sensitivity analysis is largely shortened.