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在静电传感器测量气/固两相流参数的基础上,以J.B.Gajewski教授的成果为基础,对电容的计算进行了研究。将静电传感器电极与屏蔽罩间的电容cp看作圆柱型电容,对其建立的静电传感器数学模型中的感应电极与屏蔽罩间电容值进行探讨,并得到了这个电容的计算式。 相似文献
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基于求不考虑边缘电容的静电微执行器动态Pull-in参数的能量分析法,并结合边缘电容的模型推导出考虑边缘电容情况下静电微执行器的动态Pull-in参数的计算方法。将不考虑边缘电容条件下的静电微执行器的动态Pull-in参数和考虑边缘电容条件下的静电微执行器的动态Pull-in参数进行比较,得到这两种条件下静电微执行器的动态Pull-in参数的不同以及边缘电容对静电微执行器动态Pull-in参数的影响:考虑边缘电容的Pull-in电压小于不考虑边缘电容的Pull-in电压;在边缘电容模型下,平行板长度的变化对Pull-in电压的影响很大,但是对Pull-in位移却没有影响,平行板宽度的变化对Pull-in电压的影响较小,但是对Pull-in位移的影响很大。 相似文献
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为了提高MENS微加速度计的各种性能,完成了基于电容式微加速度计的过载传感器信号调理电路的设计。设计了基于Model 1221电容式微加速度计的信号调理电路,通过静态和动态调试,在频率响应范围内的带内不平度≤±3 dB,超出频率响应范围的带外衰减≥30 dB/oct。最后通过传感器主动校准系统对传感器进行标定测试,测试结果显示:理论值与实际值的误差很小,系统的准确度很高,而且在±15 gn的测量范围内的输出电压满足(0.2±0.2)V4.8±0.2V。 相似文献
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一种硅微机械谐振器的单光源激振测振方法 总被引:1,自引:1,他引:1
提出一种用于硅微机械谐振传感器研究的单光源激振测振新方法,即微谐振器的激励及其谐振信号的测量使用同一光源。该方法采用全光纤斐索干涉仪结构,将干涉信号与光源强度变化信号进行运算后,通过选频技术解调出谐振器的振动信息,同时采用贝塞耳函数比值法扩大了振动幅度的测量范围,省去了一些难以获得准确数值的工作参数的计算。采用该方法实现了微悬臂梁结构形式的谐振器件的单光源激振与测振,获得了器件的谐振频率约为8.81kHz以及谐振状态下的振动幅度约为135nm。实验结果与采用其他双光源激振测振方法基本一致,新方法的可行性得到了验证。 相似文献
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提出了一种可以把脉搏压力信号直接转换为电流信号输出的高精度阵列脉搏传感器.采用牺牲层法加工晶体管的栅极与CMOS工艺具有良好的兼容性.对传感器栅电容和输出电流进行测试,在1.5~9.5kPa的动态范围,传感器电容的灵敏度约为0.5fF/hPa;传感器输出电流与压力呈现较好的线性和指数特性.分析结果表明MOS栅面积的改变对压力-电流响应曲线的线性度有一定影响. 相似文献
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提出了一种可以把脉搏压力信号直接转换为电流信号输出的高精度阵列脉搏传感器.采用牺牲层法加工晶体管的栅极与CMOS工艺具有良好的兼容性.对传感器栅电容和输出电流进行测试,在1.5~9.5kPa的动态范围,传感器电容的灵敏度约为0.5fF/hPa;传感器输出电流与压力呈现较好的线性和指数特性.分析结果表明MOS栅面积的改变对压力-电流响应曲线的线性度有一定影响. 相似文献
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Without adding feedback to modulate light path system, the dissymmetrical 3×3 coupled optical accelerometer reduces the complexity of the design of light path system. Experiments prove that it can attain good demodulation effects. As carrier is not needed in this system, the frequency range of input signal is diminished so as to decrease the sampling frequency of accelerometer. This makes for the system on programmable chip(SOPC) design of digital demodulating system. The upper limit of accelerometer working frequency can reach 3 500 Hz. But affected by the inherent frequency of sensitive components, its working frequency is 10 Hz~1 000 Hz, and the sensitivity is 8.718 0 V/(m·s-2). This accelerometer can detect the dynamic range of acceleration signal real-timely, steadily and accurately, solving the dissymmetrical problem of light path caused by circumstances and the complexity of process. 相似文献
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Without adding feedback to modulate light path system, the dissymmetrical 3×3 coupled optical accelerometer reduces the complexity of the design of light path system. Experiments prove that it can attain good demodulation effects. As carrier is not needed in this system, the frequency range of input signal is diminished so as to decrease the sampling frequency of accelerometer. This makes for the system on programmable chip(SOPC) design of digital demodulating system. The upper limit of accelerometer working frequency can reach 3 500 Hz. But affected by the inherent frequency of sensitive components, its working frequency is 10 Hz~1 000 Hz, and the sensitivity is 8.718 0 V/(m·s-2). This accelerometer can detect the dynamic range of acceleration signal real-timely, steadily and accurately, solving the dissymmetrical problem of light path caused by circumstances and the complexity of process. 相似文献
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提出一种应用径向基函数(RBF)神经网络进行加速度传感器动态性能补偿方法.介绍动态补偿原理以及算法,并将其与BP神经网络法和系统辨识法进行比较.该方法利用加速度传感器的动态标定数据,采用RBF神经网络搜索和优化补偿模型参数.结果表明,这种补偿模型误差小,比用系统辨识法有良好的鲁棒性、能实现在线软补偿,比用BP神经网络有更快的训练速度. 相似文献
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Wei Xue Jing Wang Tianhong Cui 《Mechatronics, IEEE/ASME Transactions on》2005,10(4):468-472
A prototype design of an inexpensive polymer-based tunneling accelerometer is described in this paper. Instead of silicon, polymethyl methacrylate (PMMA) is used as the mechanical material. By using silicon molds fabricated by conventional lithography and wet-etching techniques in hot embossing, PMMA structures can be replicated within 20 min. The performance of the tunneling sensor can be estimated and improved based on mechanical-level analysis by ANSYS and system-level analysis by MATLAB. The nonlinear tunneling mechanism and electrostatic actuation are linearized using small-signal approximation. To enhance the stability and broaden the bandwidth of the tunneling accelerometer system, a feedback control system with one zero and two poles is designed. The dynamic range of the system is greatly enhanced. The bandwidth of the closed-loop system is approximately 15 kHz. 相似文献
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为了消除传统电模拟法引入的激励信号对力矩器驱动模块造成的影响,提出了一种在数字闭环加速度计系统反馈回路数模转换器输入端叠加一个激励信号来测试系统带宽的方法.通过对该方法的电激励模型进行分析,表明在带宽测试时系统反馈回路D/A输入端叠加激励信号可以等效为外界输入的加速度.搭建测试平台测试系统带宽,实验表明,用该方法测得的数字闭环加速度计系统带宽与传统机械振动法的测试结果相接近.该方法未增加其它电路,降低了系统的复杂度,消除了电模拟法外加激励信号源对力矩器驱动模块的影响.此外,该方法操作快速简单、便于在线测试,可满足大多数数字闭环加速度计的带宽测试要求. 相似文献
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针对激光捷联惯性导航系统可靠性高,采用自然散热以及使用维护方便等优点,设计并实现了激光捷联惯导仿真系统。首先通过软件的动态协同算法,设计软件陀螺仪和软件加速度计,使其能够仿真真实激光陀螺仪和真实加速度计的姿态信息和线运动信息;然后仿真载体的飞行轨迹,并将飞行姿态及运动状态转换为软件陀螺仪和软件加速度计的输出;最后根据其输出信息与理想轨迹对应参数的对比进行性能分析。仿真结果表明,该系统不仅能够较好地模拟飞机的实际飞行状态,更能有效地检验激光捷联惯导算法的精确性和可靠性。 相似文献
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A resonator fiber optic gyro is a high accuracy inertial rotation sensor based on the Sagnac effect. Fiber ring resonator is the core-sensing element in the resonator fiber optic gyro. The dynamic response of the resonator has been studied, and the ringing phenomenon is observed when sweeping the laser frequency. The dynamic characteristics of the resonator, which are related with the frequency sweep rate, have a decisive effect on the dynamic performance of the gyro system. In order to further analyze and better design the gyro system, deep analysis of the dynamic resonance characteristics is in urgent need. This paper gives out the condition for the ringing phenomenon, and analyzes the parameters for the ringing and the dynamic resonance curve through simulation. It is concluded that increasing the sweep rate will lift the ringing and deteriorate the parameters of the resonance curve, and finally have negative effects on the performance of the gyro system. 相似文献