压电陶瓷执行器Preisach模型的分类排序实现

通过实验研究了压电陶瓷执行器迟滞的擦除特性和一致特性,提出了一种新的分类排序实现方法,改善了经典Preisach模型在非单调极值输入信号下描述迟滞输入输出特性的能力,消除了传统Preisach模型实现形式对输入信号的限制条件。实验表明,这种Preisach模型分类排序实现方法能有效地预测压电陶瓷执行器的位移,提高了迟滞建模精度。     

压电陶瓷驱动微进给刀架的迟滞建模

以对称式微位移缩小机构和柔性铰链相结合,压电陶瓷驱动的微进给刀架可实现精密加工,但刀架的迟滞特性影响其定位精度。该文根据非线性Preisach模型的理论知识及压电陶瓷驱动微进给刀架的电压位移特性,将模型进行修改后得到刀架迟滞特性的数学模型,并对数学模型式进行离散化处理。实验结果表明,改进后的迟滞模型形式简单,数据采集简便,模型描述精确,能较好地实现压电驱动微进给刀架的迟滞建模,提高了迟滞模型的实用性。为提高压电陶瓷驱动微进给刀架的定位精度,实现精密控制打下基础。     

压电陶瓷执行器的输入历史相关Preisach模型

压电陶瓷执行器的迟滞特性是影响其定位精度的主要因素。用于描述迟滞特性的经典Preisach模型的输出与历史时刻输入密切相关,在Preisach权函数中引入历史时刻输入信息,提出一种新的Preisach模型。采用简化迟滞算子对模型进行预处理后,构造神经网络实现模型的辨识。实验数据表明,在衰减正弦电压信号激励下,该模型预测位移误差绝对值的最大值与经典Preisach模型相比减少了76%,均方误差减少了78%。     

压电陶瓷迟滞逆模型的前馈PID控制

为减小压带陶瓷迟滞特性对系统跟踪精度的影响,在Preisach模型的基础上对压电陶瓷迟滞性进行建模。借助Matlab软件对实验数据进行拟合和采用逆控制思想,在迟滞逆模型的基础上提出前馈PID(即比例、积分、微分)控制算法。实验结果表明,压电陶瓷最大迟滞性控制在2.2%内,输入、输出具有较好的线性关系,带前馈的PID控制具有良好的控制性能。     

压电驱动器建模与控制技术研究

该文对压电驱动器建模与控制技术进行了研究。通过二阶系统描述了压电驱动器的线性动态特性。基于Preisach迟滞模型,提出了全新的简化模型,避免了Preisach模型中复杂的双重积分运算。通过前馈与反馈控制技术相结合,为压电驱动器设计了一个综合控制器。在前馈控制器中,通过Preisach模型描述逆迟滞环,有效解决了Preisach模型不可逆的问题。通过比例、积分、微分(PID)反馈控制器,有效提高了系统鲁棒性,并有效补偿了前馈控制器中模型不精确带来的误差。最终,通过实验分别验证了模型的有效性及控制器的控制作用。     

压电驱动器迟滞特性的Preisach模型研究

压电驱动器的迟滞特性是影响其位移输出精度的主要因素。该文采用改进的Preisach模型对压电驱动器的迟滞特性进行建模，并进行了相应的实验研究。实验结果表明该模型可以很好地预测压电驱动器在经过一定的控制电压序列以后的位移输出值．能够有效地降低迟滞特性对压电驱动器位移输出精度的影响。     

压电陶瓷驱动器迟滞非线性的改善方法

压电陶瓷驱动器在微位移定位方面被广泛应用,但压电陶瓷驱动器的迟滞非线性严重影响其定位精度,因此,介绍了各种改善压电陶瓷驱动器迟滞非线性特性的方法,并提出了用3次样条插值法和最小二乘曲线拟合法来实现压电陶瓷驱动器的精确定位,改善压电陶瓷驱动器的迟滞非线性特性,实验表明,以上方法可使压电陶瓷驱动器的定位误差小于5％.     

用VB数据库实现压电陶瓷Preisach模型及定位控制

压电陶瓷器件在精密定位和微位移控制中得到了广泛的应用，但是它也存在着迟滞、蠕变和非线性等不足。preisach数学模型可用来描述压电陶瓷的迟滞特性，并根据电压变化的历史预测电压的对应位移量。根据压电陶瓷的特性及利用VB数据库技术实现preisach数学模型的改进形式，使压电陶瓷的位移控制精度得到提高和改进。     

基于三线性插值法的preisach模型及数值实现

传统preisach模型具有次环一致特性,压电陶瓷执行器迟滞特性不满足其特性。采用传统preisach模型建模精度较低,因此,该文提出一种改进型preisach模型,推导出离散化计算方法,其数值实现采用三线性插值法。在PI公司生产的E 625系列压电陶瓷控制器平台上针对此算法进行相关实验设计和结果的验证。实验结果表明,该文提出的基于三线性插值法的preisach模型其绝对误差最大值为0.2 μm,提高了压电陶瓷preisach模型精度。     

压电陶瓷微位移器件迟滞模型的研究

在通过统计物理学角度分析压电陶瓷迟滞规律的基础上，结合数学建模方法，提出了一种简单实用的压电陶瓷迟滞数学模型。并设计了压电陶瓷实验控制系统，对迟滞数学模型进行了验证，实验结果表明，此模型可以有效减小压电陶瓷的迟滞非线性误差，提高压电陶瓷微位移的控制精度，本研究有助于实现基于压电陶瓷的高精度开环微位移控制。     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.