一种新颖的MEMS光开关测量平台的设计与实现

近年来,随着光电器件的广泛应用,微机械光开关(MEMS)成为核心光交换器件的主流。在研发过程中,其器件检测手段成为人们所关注的话题。文章介绍了一种新颖的测量平台,通过高幅值利用单片机控制脉冲频率的方法来选择器件。与当前同类方法相比,具有精度高、可靠性强、成本低、易操作等特点,具有广阔的使用前景。     

GaN材料系列的研究进展

ＧａＮ及其合金作为第三代半导体材料具有一系列优异的物理和化学性质，在光电子器件，高温大功率电子器件及高频微波器件应用方面具有广阔的前景，已成为当前高科技领域的研究重点，论述了这种材料的研究历史与发展现状，物理与化学性质，薄膜的生长方法及在光学电子和微电子器件应用于方面的研究进展。     

一种静电MEMS光开关的理论与实验研究

光开关是全光网络(All—Optical Network，AON)的一种基本器件。目前，制作光开关的方法有MEMS、波导、铁电液晶、Bubble、热毛细管、全息技术等。其中，MEMS光开关由于具有体积小、集成度高、能大规模生产等优点而成为光开关研究的热点之一。文章对一种静电驱动的光开关的设计进行了理论分析和仿真，并通过实验研究，证明了方案的可行性I同时，表明工艺技术是MEMS光开关研究成败的关键。     

谐振腔增强型光探测器的高速响应性能研究

高速长波长光探测器是高速光纤通信系统和网络的关键器件，它要求光探测器具有宽的频率响应带宽和高量子效率。常用的PIN光探测器由于量子效率和高速性能均受到吸收层厚度的牵制，使得二者相互制约，成为一对矛盾。谐振腔增强型(RCE)光探测器为这一矛盾的解决提供了有效的方案。基于谐振腔增强型光探测器的实际设计和制作模型，分析了器件吸收层中的光场分布，并将其运用于载流子的连续方程，从理论上详细地分析了器件的高速响应特性，给出了计算结果。针对研制的高速长波长谐振腔增强型光探测器，进行了理论分析和实际器件测试的结果比较，得到了比较一致的结果。     

光无源器件产业的发展和扩建的建议

简述了光无源器件的发展趋势，分析了市场的需求情况，认为天津市在发展光无源器件的产业方面具有一定的优势和基础，据此提出了发展和扩建天津无源光器件产业的建议。     

用硅光电负阻器件产生光学双稳态

本文利用作者近期研制出的硅光电表面负阻晶体管（PNEGIT），首次提出并通过实验成功地实现了一种新的光学双稳态即以PNEGIT作为光输入器件，用它驱动一发光管（LED）作为光输出器件，由于PNEGIT具有负阻输出特性，致使LED输出光功率（POUt）一输入光功率（Pin）特性上出现光学双稳环．这种器件具有光开关、光逻辑、光存贮等多种功能，将为硅光电器件在光信息处理、光计算、光通讯等领域中的应用，开辟一条新途径     

MEMS传感器

MEMS传感器成为全世界增长最快的产品之一，MEMS产品的可靠性高，技术附加值高，市场回报率大于传统产业。MEMS传感器与系统将会有更大的市场增长，惯性测量器件、微流量器件、光MEMS器件、压力传感器、加速度传感器、微型陀螺和汽车领域应用的MEMS器件(压力传感器、加速度传感器、微型陀螺)等的应用将具有巨大的潜力。     

聚合物光波导器件的最新进展

由于有机聚合物材料具有介电常数小、电光和热光系数大、热损耗小、易于加工及可垂直集成等优点，聚合物波导器件成为近几年研究的热点．本文在介绍光学聚合物材料优点和一些新型聚合物的基础上，重点讨论了聚合物波导器件的最新进展．     

光纤无源器件技术的发展方向

光纤无源器件是光纤通信系统中的重要组成部分。按其功能分类，有光纤连接器、光纤耦合器、波分复用器、光开关、光衰减器、光隔离器和光环行器等。光纤通信系统正在向接入网、宽带网、密集波分复用系统和全光网方向发展，对光纤无源器件的技术提出了新的更高的要求。因此，如何把握光纤无源器件的技术发展方向，以适应市场的需求，已成为业内人士所关注的问题。本文首先介绍光纤无源器件的技术概况，然后就光纤无源器件的技术发展方向，概括地说，就是光纤连接器的小型化、光纤耦合器的宽带化、波分复用器的密集化、光开关的矩阵化以及光纤…     

基于多重体全息光栅的光谱器件的研究

提出了一种新型的基于多重体全息存储的光栅光谱仪。在光折变晶体Fe:LiNbO3中的同一位置采用角度与波长混合复用的方法记录多个光栅，它们对相应波长的光具有光谱色散功能；采用布喇格角度与波长补偿的方法，它们还可以通过单一波长的激光器进行记录。给出了该器件的工作原理和参数设计，并在实验上制作了10通道的光谱间隔为10nm的光谱器件，实验结果表明，该光谱器件具有设计灵活、光谱范围宽、光谱分辨率高和衍射效率高等优点。     

Micromachining for optical and optoelectronic systems

Micromachining technology opens up many new opportunities for optical and optoelectronic systems. It offers unprecedented capabilities in extending the functionality of optical devices and the miniaturization of optical systems. Movable structures, microactuators, and microoptical elements can be monolithically integrated on the same substrate using batch processing technologies. In this paper, we review the recent advances in this fast-emerging field. The basic bulk- and surface-micromachining technologies applicable to optical systems are reviewed. The free-space microoptical bench and the concept of optical prealignment are introduced. Examples of micromachined optical devices are described, including optical switches with low loss and high contract ratio, low-cost modulators, micromechanical scanners, and the XYZ micropositioners with large travel distance and fine positioning accuracy. Monolithically integrated systems such as single-chip optical disk pickup heads and a femtosecond autocorrelator have also been demonstrated     

阵列光开关驱动结构制作工艺的研究

采用KOH溶液湿法腐蚀制作阵列光开关的微反射镜上电极.腐蚀表面的不平整影响了光开关的驱动扭臂结构的制作.采用合理配比的HF,HNO3和CH3COOH腐蚀剂对制作的微反射镜阵列硅片进行抛光处理,抛光后微反射镜表面和腐蚀的(110)面均有较大的改善,并且抛光不影响器件的结构,最后制作出了均匀一致的光开关阵列扭臂驱动结构.     

Design and Simulation of Silicon-based NiCrAu MEMS Torsion Micromirror with Tilted Back-electrode

Torsion micromirror is a key structure of optical devices in micro-electro-mechanical system (MEMS), such as MEMS optical switches, MEMS variable optical attenuator, MEMS scanning micromirror array and so on. A silicon-based NiCrAu MEMS torsion micromirror is theoretically analyzed. It is shown that in order to have 15~ rotation, the driven voltage should be about 20 V and the thickness of the supporting beam must be controlled in the range of submicron orders of magnitude. This very thin beam makes the structure more unstable and unreliable, and also makes the fabrication more complicated. Based on parallel backelectrode analysis and testing, a tilted back-electrode has been designed to replace the parallel back-electrode in order to decrease the driven voltage and difficulty of fabricating processing. By theoretical analysis and simulation, a conclusion can be drown that the thickness can be improved from submicron to micron by using tilted back-electrode when using the same driven voltage. Tilted back-electrode is very effective to improve the stability and reliability of the micromirror structure.     

体硅MOEMS阵列光开关的制作

设计了一种新型结构的MOEMS阵列光开关,开关由上电极阵列、倾斜下电极阵列和准直光纤阵列三部分组成.上电极阵列利用(110)硅片制作,其中包括反射镜阵列和扭臂驱动结构的上电极阵列.具有集成性好,制作工艺简单,微反射镜的表面平整垂直,各单元的微镜面平行,反射镜面的尺寸较大等优点.对光开关的参数进行了测试,指出了体硅MOEMS阵列光开关制作过程中存在的问题.     

Micromechanical optical switches based on thermocapillaryintegrated in waveguide substrate

This paper proposes micromechanical optical switches which are suitable for integration in an optical waveguide substrate. The switching mechanism is based on the capillary effect induced by a temperature gradient. The switch has a simple structure which consists of a oil filled slit and a pair of microheaters. We designed two types of thermocapillary optical switches. One was a bubble-driven type, the other was an oil-column-driven type. We fabricated both types of 1×3 micro-switches and demonstrated excellent optical switching and self-latching performance     

4×4纵横交换微电机械系统光开关阵列

微电机械系统(MEMS)光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。采用纵横交换网络和通断型微镜实现4×4微电机械系统光开关阵列,利用球透镜单模光纤准直器作为微电机械系统光开关阵列的输入、输出端口。运用高斯光束耦合理论对光开关阵列插入损耗(IL)进行了理论计算,并对引起插入损耗的主要因素进行了分析。对于失调容限:输入与输出光纤准直器位置失调2μm,定位角度失调0.15°,微镜非垂直反射角度失调0.15°,制作了4×4微电机械系统光开关阵列,对其各个通道的插入损耗进行了实验测试,其中最大值为2.77dB。     

Micro/nano-optoeletromechanical systems

This paper reviews the state of the art of micro and nano-optoelectromechanical systems, which in the last years have changed in many ways our common view about optical and quantum electronic devices. Starting with their technological realization through the micromachining of semiconductors, the paper then presents the physical principles of micromechanical devices, their integration with optoelectronic devices, as well as the realization of free-space optical components with the help of semiconductor technology. The application of microoptomechanical systems in optical signal processing, optical data computing, and optical field characterization is further presented in detail revealing the new physical principles used to achieve these goals. The emerging area of the microoptomechanical systems applications for the signal detection in infrared up to the highest far-infrared limit, i.e. the terahertz region, is also analyzed here. The paper ends with a presentation of nanooptomechnical systems analyzing their inherent difficulties of realization as well as their advantages with a special emphasis on the optical properties of carbon nanotubes.     

Coupling efficiencies in reflective self-organized lightwave network (R-SOLNET) simulated by the beam propagation method

The reflective self-organized lightwave network (R-SOLNET) enables the formation of self-aligned waveguides in the photorefractive (PR) material between misaligned optical devices by introducing a write beam. The incident write beam from one device and the reflected write beam from the second device induce self-focusing in the PR material and construct a coupling waveguide. A wavelength filter on the waveguide edge is used to facilitate the reflected beam. The beam propagation method reveals that R-SOLNET exhibits higher coupling efficiencies and better tolerances than the one-beam-writing SOLNET and the free-space coupling. The apparent usefulness of R-SOLNET is remarkable for gaps wider than 100 /spl mu/m in 8-/spl mu/m-wide waveguide circuits. For 240-/spl mu/m gap, coupling efficiency better than 50% can be achieved even when the lateral misalignment is as large as 4 /spl mu/m. The results indicate that R-SOLNET may be useful for vertical waveguide constructions of optical z-connections in three-dimensional intrachip optical interconnects and switching systems, as well as for self-aligned optical couplings with devices that cannot emit write beams such as vertical-cavity surface-emitting lasers, photodetectors, and electrooptic switches.     

Acoustooptic interactions and devices

A review of recent advances in the understanding of the interaction of light and ultrasonic waves in solids and liquids is presented, emphasizing the Bragg diffraction regime wherein the diffracted optical energy is confined near one angular direction. The usefulness of optical beam probing techniques, using laser light sources, for investigating such subjects as ultrasonic attenuation and diffraction, acoustic nonlinear phenomena, magnetoelastic interactions, and photoelastic properties of materials is described. The application of the acoustooptic interaction for the design of devices intended to perform optical information processing functions is also mentioned. Present applications include optical modulators, switches, sequential scanners (such as are useful for television display), random access optical deflectors, and optical correlators. An attempt is made to describe the assets and liabilities of acoustooptic devices and to speculate concerning their future in the practical world.