提升8英寸工厂自动化水平Crossing Automation在上海发布SMIF标准低成本硅片加载设备

全球高效低成本自动化解决方案暨工程服务供应商Crossing Automation日前于上海举办的中国半导体设备暨材料展(SEMICON China)中,引进全新系列的标准机械化接口(SMIF)晶圆加载机(LPT),此一系列产品可应用于各类200 mm开放式晶圆匣的制程、量测和检测设备。这些可适应性标准机械化接口晶圆加载机(SMIF-LPT)提供由非标准机械化接口升级为标准机械化接口的低     

半导体炉管区E/T问题的动态调度算法

炉管区是半导体制造过程中用于热处理的重要区域.在多品种不同交货期的晶圆产品连续到达的环境下,提出了优化目标为极小化E/T(提前/延迟)值的WCRH(加权成本率)算法.该算法根据产品的交货期实时更新晶圆产品的加工优先级;通过计算和比较加权成本率来确定哪一种晶圆优先加工以及投入加工的时间.仿真结果表明,该算法在减小E/T值和缩短加工完成时间方面,优于文献中提及的启发式算法.     

基于机器视觉的晶圆裸片计数

半导体工业生产上很重要的一环就是晶圆生产,晶圆在划片一环会经过品质检测,机械手会取走合格的晶圆裸片,通过对取走后晶圆的分析,可以知道合格品的数目,就可以得到晶圆的良品率参数,便于及时调整工艺,对于生产环节来讲有着重要的地位。本文提出了一种基于机器视觉的晶圆裸片计数算法。该算法基于hough找直线算法,利用晶圆切片本身的一些规律,实现自动检测出取走的晶圆裸片数目。与现有的算法相比,本文的方法易于实现,同时实验显示该算法具有良好的计算性能。     

Si损伤缺陷分析与解决方案

在半导体制造工艺流程中,浅沟道隔离(STI)工艺环节中的Si损伤一直是个困扰的问题.由于Si损伤的存在,造成5%-10%的良率损失,同时,严重影响产品的可靠性.分析了Si损伤缺陷的形成机理,并通过合理的实验设计和分析,给出了具体的解决方案.通过工艺制程的改良,既解决了Si损伤缺陷,节省了晶圆加工的时间,也减少了表面尘粒粘污.这个新工艺已经在中芯国际8厂得到了验证,对产品的电性能没有影响,同时,产品的量率还提高了5%-10%,已正式投入使用.     

300mm晶圆后段制程发展趋势探讨

台湾省半导体产业结构完整,以其紧密延伸的芯片制造合作模式,在过去数年间已建立起完整的半导体制程供应链,并持续向高附加值的高端制程发展。而考虑到成本效益与缩短产品上市时间的要求,300mm晶圆厂已成为晶圆代工下一波的竞争主力。在国际整合组件大厂纷纷将产能委托代工的趋势下,造就了台湾省晶圆代工的亮丽表现。为了建立台湾省半导体产业的竞争优势,台湾省晶圆代工两大龙头台积电及台联电在新竹科学园区及台南科学园区皆开始投资兴建300mm晶圆代工制造厂,并进行小型试产,加上国际级的整合组件大厂也都朝300mm晶圆的发展趋势前进,使得后…     

美Cypress新设8吋Wafer工厂

美半导体大商Cypress最近在密苏里达州布鲁敏顿开设新的八吋晶圆工厂。这是该公司首次以0.5μm制程技术建造八吋晶圆厂,同时未来将再转移到0.35μm制程。     

GSI发布最新晶圆级芯片打标技术

在半导体制程领域提供雷射技术已经超过20年的GSILumonics公司,10月26日在上海举行了“先进晶圆级芯片打标技术研讨会“,向业界展示了从晶圆刻印到链结处理,晶粒刻印,混合信号电路修整,以及其它一系列最新技术和产品。研讨会上GSI Lumonics公司向与会者介绍了高端的集成电路封装趋势;以激光技术为基础的晶圆级芯片打标系     

环球仪器推出新型Advantis^TM贴装机

环球仪器为其晶圆送料器系统增加在线晶圆增强选项以满足先进半导体装配的要求。这一在线晶圆增强功能对处理单一300mm规格晶圆尤其有效。环球仪器还为多种规格的晶圆工艺保留了晶圆送料器的离线晶片扩容能力。     

SWAGELOK半导体服务公司推出全新原子层沉积（ALD）工艺用阀

在三月SEMICON展览期间，环球仪器展出在线晶圆增强功能CSM平台，以满足先进半导体装配的需要。这项在线晶圆增强功能对处理单-300mm规格晶圆尤其有效，同时还保留了晶圆送料器处理多种规格晶圆工艺的离线晶片扩容能力。     

AMD加速委外扩大释出CPU晶圆和封测代工订单

超微（AMD）结合中央处理器（CPU）、绘图芯片（GPU）和北桥芯片的革命性产品Fusion即将亮相。为了降低生产成本,超微扩大将CPU晶圆制造和封测代工委外。据半导体业界指出,晶圆将委由台积电和Global Founderies采40奈米以下制程制造,     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Nanoimprint Lithography -A Next Generation High Volume Lithography Technique

IntroductionNanoimprint Lithography is a well-acknowl-edged low cost, high resolution, large area pattern-ing process. It includes the most promising methods,high-pressure hot embossing lithography (HEL) [2],UV-cured imprinting (UV-NIL) [3] and micro contactprinting (m-CP, MCP) [4]. Curing of the imprintedstructures is either done by subsequent UV-lightexposure in the case of UV-NIL or by cooling downbelow the glass transition temperature of the ther-moplastic material in case of HEL…     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

Influence of PVK ： NPB hole transporting layer on the characteristics of organic light-emitting devices

A doping system consisting of NPB and PVK is employed as a composite hole transporting layer （CHTL）. By adjusting the component ratio of the doping system, a series of devices with different concentration proportion of PVK ： NPB are constracted. The result shows that doping concentration of NPB enhances the competence of hole transporting ability, and modifies the recombination region of charge as well as affects the surface morphology of doped film. Optimum device with a maximum brightness of 7852 cd/m^2 and a power efficiency of 1.75 lm/W has been obtained by choosing a concentration proportion of PVK ： NPB at 1：3.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.     

Analysis of error performance on Turbo coded FDPIM

Due to variable symbol length of digital pulse interval modulation（DPIM）, it is difficult to analyze the error performances of Turbo coded DPIM. To solve this problem, a fixed-length digital pulse interval modulation（FDPIM） method is provided. The FDPIM modulation structure is introduced. The packet error rates of uncoded FDPIM are analyzed and compared with that of DPIM. Bit error rates of Turbo coded FDPIM are simulated based on three kinds of analytical models under weak turbulence channel. The results show that packet error rate of uncoded FDPIM is inferior to that of uncoded DPIM. However, FDPIM is easy to be implemented and easy to be combined, with Turbo code for soft-decision because of its fixed length. Besides, the introduction of Turbo code in this modulation can decrease the average power about 10 dBm, which means that it can improve the error performance of the system effectively.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.