衬底温度对低功率直流磁控溅射ZnO薄膜特性的影响

采用低功率直流反应磁控溅射法,在Si衬底上成功制备出了具有高c轴择优取向的ZnO薄膜,利用X射线衍射仪、荧光分光光度计研究了沉积温度对ZnO薄膜微观结构及光致发光特性的影响.结果表明,合适的衬底温度有利于提高ZnO薄膜结晶质量;在室温下测量样品的光致发光谱(PL),观察到波长位于440nm左右和485nm左右的蓝色发光峰及527nm左右微弱的绿光峰,随衬底温度升高,样品的PL谱中蓝光强度都明显增大,低功率溅射对其蓝光发射具有很重要的影响.综合分析得出440nm左右的蓝光发射应与Zni有关,485nm附近的蓝光发射是由于氧空位形成的深施主能级上电子跃迁到价带顶的结果,而527nm左右的较弱的绿光发射主要来源于导带底到氧错位缺陷能级的跃迁.生长温度主要是通过改变薄膜中缺陷种类及浓度而影响着ZnO薄膜的发光特性的.     

ZnO薄膜的电沉积制备及其荧光特性研究

以Zn(NO3)2水溶液为电解液,用阴极电沉积法分别在透明导电玻璃ITO和FTO衬底上制备了ZnO薄膜.X射线衍射(XRD)和扫描电子显微镜(SEM)分析结果表明ZnO薄膜属六角纤锌矿结构,ZnO颗粒均匀,大小约1μm;在室温光致发光谱(PL)中(激发波长为385和390nm)分别观察到了波长位于439和442nm处的较强的蓝光发射峰.本文讨论了样品蓝光峰的发光机理,并指出蓝光峰与样品中由锌填隙引起的潜施主能级上的电子到价带的跃迁有关.     

Mn、Co掺杂ZnO薄膜结构及发光特性研究

利用脉冲激光沉积(PLD)方法在Si(100)衬底上制备了ZnO、Zn0.8Mn0.2O、Zn0.8Co0.2O薄膜.薄膜的晶体结构和表面形貌采用X射线衍射仪和原子力显微镜测试.表明薄膜具有明显的c轴择优生长取向,薄膜表面较为平整,颗粒尺寸在纳米量级,薄膜中晶粒的生长模式为"柱状"模式.此外,Mn、Co掺入后,薄膜的X射线衍射峰有小角度偏移,这与 Mn2 、Co2 离子半径有关.PL谱显示Mn、Co掺杂ZnO薄膜的蓝、绿发光峰的位置相对纯的ZnO薄膜没有改变,还出现了紫外发光峰,其中Mn掺杂的蓝、绿光峰的强度减弱,Co掺杂的蓝光峰强度减弱,绿光峰强度增强.这是因为Mn、Co掺入改变了ZnO本征缺陷的浓度,发光峰的强度也随之而改变.     

ZnO薄膜中与Zn原子缺陷相关的发光特性研究

ZnO薄膜中可见光的发射与缺陷有关,为了研究ZnO薄膜中与Zn原子缺陷相关的发光特性,将不同Zn缓冲层厚度的ZnO薄膜沉积在Si衬底上,且所有样品在400℃下真空中退火1 h,采用X射线衍射谱(XRD)、吸收谱和光致发光谱(PL)表征了样品的晶体结构和光学特性。结果表明,随着Zn缓冲层溅射时间的增加,ZnO薄膜中的紫光峰向长波段发生了红移,且所有的发光峰强度逐渐增加;缓冲层和真空中退火都使得样品中有过量的Zn原子缺陷出现,薄膜中所有的发光峰与Zn原子缺陷相关。     

Zn缓冲层对氧化锌薄膜的结构和光学特性的影响

采用射频磁控溅射法在玻璃衬底上制备了具有高c轴择优取向的不同Zn缓冲层厚度的ZnO(ZnO/Zn)薄膜。利用X射线衍射(XRD)法、扫描电子显微镜(SEM)技术和光致荧光(PL)发光谱(PL)等表征了ZnO/Zn薄膜的微观结构和发光特性。XRD的分析结果显示,随着缓冲层厚度的增加,(002)衍射峰的半高宽(FWHM)逐渐变小,表明薄膜的结晶质量得到改善。通过对样品PL谱的研究,发现分别位于435(2.85eV)和480nm(2.55eV)的蓝光双峰以及530nm(2.34eV)的绿光峰,且缓冲层沉积时间为10min时,样品的单色性最好。推测位于435nm的蓝光发射主要来源于电子从锌填隙缺陷能级到价带顶的跃迁所致,而绿光峰的发光机制与氧空位有关。     

沉积气压对磁控溅射制备ZnO薄膜的结构与光学性能影响

采用CS-400型射频磁控溅射仪在Si(111)和石英基底上成功的制备了ZnO薄膜,分别用XRD、SEM、紫外-可见光分光光度计和荧光分光光度计表征样品的结构和光学性质.实验表明,采用射频磁控溅射制备的ZnO薄膜具有六角纤锌矿结构的(002)峰和(101)峰的两种取向.在沉积气压>1.0Pa时所制备的ZnO薄膜具有(002)择优取向,并且十分稳定.SEM图表明,ZnO薄膜颗粒大小较为均匀,晶粒尺寸随着气压升高而变小,沉积气压不同时,薄膜样品的生长方式有所差异.在400～1000nm范围内,可以看出除O.5Pa下制备的ZnO薄膜外,其余ZnO薄膜在可见光区域的平均透过率超过80%,吸收边在380nm附近,所对应的光学带隙约为3.23～3.27eV,并随着沉积气压上升而变大.ZnO薄膜的PL谱上观察到了392nm的近紫外峰和419nm的蓝峰;沉积气压对Zno薄膜的发光峰位和峰强有影响.     

ZnO:Zn的光致发光和电致发光性能

在N2 H2还原气氛中以ZnO粉末为原料制备了ZnO:Zn发光膜和粉末.利用X射线衍射、电子扫描显微镜、红外光谱仪、XPS、荧光分光光度计等测试手段表征了样品的结构、形貌、缺陷和发光性能.ZnO:Zn发光膜具有六角纤锌矿晶体结构和良好的c轴取向,结晶性较好,晶粒颗粒均匀.ZnO:Zn发光膜和粉末具有绿色的单谱光致发光和电致发光.发光薄膜的O1s结合能表明,此绿色发光与薄膜内的点缺陷状态密切相关.     

退火对Cr3+离子掺杂Al2O3薄膜的结构及发光性能影响

用脉冲激光沉积技术在Si(100)基底上制备了纯Al2O3、掺杂浓度为0.3%、1%(质量分数)的Cr3+∶Al2O3薄膜。制备态的薄膜为立方γ-Al2O3结构,经800℃真空条件下退火1h样品的结晶度有所提高,呈现α-Al2O3相与γ-Al2O3相的衍射峰。薄膜基本保持了靶材中原有各元素成分比例,平均粒径为250nm,形貌为条形。与Al2O3粉体相比,制备态薄膜在386nm处的发光峰强度明显提高。这可归因于薄膜中氧空位的增加使双氧空位吸收电子所产生的F2+色心浓度提高。薄膜经真空退火后在332、398nm附近的发光峰强度明显增强,这是由于薄膜中氧空位的增加提高了F+、F色心浓度。与此同时,制备态薄膜在386nm附近发光峰经退火后由386nm蓝移至381nm,可归因于退火后制备态薄膜的内应力得到了释放。1%(质量分数)Cr3+掺杂薄膜在646、694nm出现Cr3+离子由4 T2能级跃迁至4 A2能级及由E-能级跃迁至4 A2能级产生的荧光发光峰。     

锌膜退火氧化制备ZnO薄膜的单一紫光发射性能

通过锌膜在金属锌熔点以上的温度退火氧化的方法制备ZnO薄膜,研究了氧气压力对ZnO薄膜发光性能的影响.ZnO薄膜的室温光致发光谱是由发光中心在413nm～424nm处的单一紫光组成.随着氧气压力的增加,紫光的强度增加并且发光中心由424nm偏移到413nm.在低氧气压力下(50 Pa～500Pa),紫光的发射归因于电子从价带到锌间隙原子(Zni)之间的跃迁.在高氧气压力下(5000Pa～23000Pa),锌间隙原子(Zni)和锌空位(VZn)缺陷都和紫光发射有关.     

Ti缓冲层对ZnO薄膜吸收特性和荧光光谱的影响

采用射频磁控溅射法在Si衬底和玻璃衬底上制备了ZnO/Ti薄膜,利用紫外-可见分光光度计和荧光分光光度计等技术表征了ZnO/Ti薄膜的光学特性,研究了Ti缓冲层的厚度对ZnO薄膜的影响。透射吸收光谱显示所有ZnO薄膜在可见光区域的平均透过率超过80%,当引入缓冲层后,薄膜的紫外吸收边先向长波方向移动,且随着缓冲层厚度的增加紫外吸收边向短波方向移动。薄膜的荧光光谱显示,所有样品出现了位于390nm的紫外发光峰,435和487nm的蓝光双峰以及525nm的绿光峰,并对各发光峰的来源进行了探讨。     

Structural, Morphological and Optical Properties of ZnO Thin Films Grown on γ-LiAlO2 Substrate by Pulsed Laser Deposition

ZnO thin films were deposited on the substrates of (100) γ-LiAlO2 at 400, 550 and 700℃ using pulsed laser deposition (PLD) with the fixed oxygen pressure of 20 Pa, respectively. When the substrate temperature is 400℃, the grain size of the film is less than 1 μm observed by Leitz microscope and measured by X-ray diffraction (XRD). As the substrate temperature increases to 550℃, highly-preferred c-orientation and high-quality ZnO film can be attained.While the substrate temperature rises to 700℃, more defects appears on the surface of film and the ZnO films become polycrystalline again possibly because more Li of the substrate diffused into the ZnO film at high substrate temperature. The photoluminescence (PL) spectra of ZnO films at room temperature show the blue emission peaks centered at 430 nm. We suggest that the blue emission corresponds to the electron transition from the level of interstitial Zn to the valence band. Meanwhile, the films grown on γ-LiAlO2 (LAO) exhibit green emission centered at 540 nm, which seemed to be ascribed to excess zinc and/or oxygen vacancy in the ZnO films caused by diffusion of Li from the substrates into the films during the deposition.     

Effect of the oxygen pressure on the photoluminescence properties of ZnO thin films by PLD

ZnO thin films on Si(111) substrate were deposited by laser ablation of Zn target in oxygen reactive atmosphere; Nd-YAG laser with wavelength of 1064 nm was used as laser source. The experiments were performed at laser energy density of 31 J/cm², substrate temperature of 400 °C and various oxygen pressures (5–65 Pa). X-ray diffraction was applied to characterize the structure of the deposited ZnO films and the optical properties of the ZnO thin films were characterized by photoluminescence with an Ar ion laser as a light source using an excitation wavelength of 325 nm. The influence of the oxygen pressure on the structural and optical properties of ZnO thin films was investigated. It was found that ZnO film with random growth grains can be obtained under the condition of oxygen pressure 5–65 Pa. It will be clearly shown that the grain size and the formation of intrinsic defects depend on the oxygen partial pressure and that high optical quality of the ZnO films is obtained under low oxygen pressure (5 Pa, 11 Pa) conditions.     

Structural and optical properties of ZnO films grown on the AAO templates

Structural and optical properties of ZnO films grown on Al substrate and anodic alumina oxide (AAO) templates by rf magnetron reactive sputtering deposition were investigated using X-ray diffraction (XRD), atomic-force microscope (AFM) and photoluminescence (PL). We found that ZnO thin films on Al substrate show good C-axis orientation, while the orientation of ZnO film on AAO templates is disordered, this due to the fact that the crystalline of ZnO is greatly influenced by surface morphology of substrates. PL measurements show a blue band in the wavelength range of 400–500 nm caused by the interstitial Zn in the ZnO films. The intensity of emission peak of ZnO films deposited on AAO templates increases compared with that on the Al substrate. Combining electrical resistivity and carrier concentration measurements, we found that that the blue emission intensity is consistent with the concentration for the interstitial zinc in the ZnO films.     

Synthesis and photoluminescent properties of nanocrystalline CaMoO4 thin film via chemical solution processing

Stoichiometric CaMoO4 thin film was successfully fabricated based on chemical solution processing. The thin films were deposited on Si(100) substrates by means of the spin-coating technique. X-ray diffraction reveals that the CaMoO4 thin film prepared are pure and well crystalline thin films. Atom Force Microscope photographs indicate that the film prepared possesses a homogeneous and dense surface morphology. The average grain size of the films was 40-50 nm, and the root-mean-square (RMS) of the surface roughness and the average surface roughness of the film measured were 2.161 nm and 1.726 nm respectively. The photoluminescent properties of calcium molybdate thin film under ultraviolet light excitation were systematically measured from 12 K to room temperature and a green emission band of the films were observed. The results of present work confirm that the chemical solution processing is a promising technology on the fabrication of CaMoO4 thin film.     

Nano-polycrystalline vanadium oxide thin films prepared by pulsed laser deposition

Nano-polycrystalline vanadium oxide thin films have been successfully produced by pulsed laser deposition on Si(100) substrates using a pure vanadium target in an oxygen atmosphere. The vanadium oxide thin film is amorphous when deposited at relatively low substrate temperature (500 degrees C) and enhancing substrate temperature (600-800 degrees C) appears to be efficient in crystallizing VOx thin films. Nano-polycrystalline V3O7 thin film has been achieved when deposited at oxygen pressure of 8 Pa and substrate temperature of 600 degrees C. Nano-polycrystalline VO2 thin films with a preferred (011) orientation have been obtained when deposited at oxygen pressure of 0.8 Pa and substrate temperatures of 600-800 degrees C. The vanadium oxide thin films deposited at high oxygen pressure (8 Pa) reveal a mix-valence of V5+ and V4+, while the VOx thin films deposited at low oxygen pressure (0.8 Pa) display a valence of V4+. The nano-polycrystalline vanadium oxide thin films prepared by pulsed laser deposition have smooth surface with high qualities of mean crystallite size ranging from 30 to 230 nm and Ra ranging from 1.5 to 22.2 nm. Relative low substrate temperature and oxygen pressure are benifit to aquire nano-polycrystalline VOx thin films with small grain size and low surface roughness.     

Preparation,characterization and optical properties of nanostructured ZnO thin films

Nanostructured ZnO thin film on a glass slide has been prepared by the spin-coating method together with calcining at 500 °C for 2 h in flowing oxygen atmosphere. The grain size of the ZnO nanoparticles is estimated to be ca. 12 nm as determined by the absorption spectrum and powder X-ray diffraction analysis. The photoluminescent peaks that centered at ca. 379 and 388 nm are assigned to the spontaneous emission and exciton–exciton emission, respectively. The thin film also shows frequency-tripled properties for the output when the laser beam of 1.06 μm is input in convergent beam.     

Impact of various irradiation photon energies and gamma doses on the optical properties of ZnSe nanostructure thin film

ZnSe thin films were prepared by thermal evaporation technique under high vacuum (10⁻⁶ Torr) at 300 K and different film thickness. The structure of thin films was measured using grazing incident in-plane X-ray diffraction (GIIXD) and shows single phase zinc blende structure. The particle sizes of the deposited films were estimated for low film thickness by TEM and high film thickness by GIIXD. The particle size of ZnSe films was decreased from ~8.53 to 3.93 nm as film thickness lowered from 200 to 20 nm which ensures the nanocrystalline structure. The optical transmission (T) and reflection (R) in the wavelength range 190–2,500 nm for irradiated and unirradiated ZnSe thin films under investigation were measured. The effect of irradiation of different energies in range (0.1–1.25 MeV) from X-ray, ¹³⁷Cs and ⁶⁰Co irradiation sources were studied for ZnSe thin films of 100 and 200 nm thicknesses. The dependence of the absorption spectra and refractive index were investigated for different energies irradiation sources. The ZnSe films show direct allowed interband transition. The effect of particle size of nanocrystalline ZnSe thin films for unirradiated and irradiated by gamma (γ) doses from ¹³⁷Cs on the optical properties was studied. Both the optical energy bandwidth and absorption coefficient (α) were found to be (γ) dose dependent.     

Influence of annealing temperature and oxygen atmosphere on the optical and photoluminescence properties of BaTiO3 amorphous thin films prepared by sol–gel method

Homogeneous and transparent BaTiO₃ thin films were prepared by sol–gel dip coating method. The prepared BaTiO₃ thin films were annealed in air and O₂ atmosphere at different temperatures. The annealed BaTiO₃ thin films were amorphous in nature. Scanning electron microscopy (SEM) revealed the nucleation and particle growth on the films. Energy-dispersive X-ray (EDX) analysis data revealed the adsorption of oxygen atoms in the BaTiO₃ film. The direct energy band gap was found to vary (3.84–3.58 eV) as functions of annealing atmosphere and temperature. Photoluminescence (PL) revealed intense emission peaks at 393 and 675 nm. Quenching of PL intensity was observed in films annealed at high temperature and in O₂ atmosphere. This is due to reduction in the oxygen vacancy by the adsorption of oxygen in the film. Luminescence spectra also have been related to the results obtained by SEM and EDX analysis. The change in luminescence intensity of BaTiO₃ thin films makes it suitable for optoelectronic temperature sensor applications.     

Enhanced photocatalytic activity of Mg0.05Zn0.95O thin films prepared by sol–gel method through a cycle

Mg_0.05Zn_0.95O thin films were prepared on silicon substrates by a sol–gel dip-coating technique. Microstructure, surface topography and optical properties of the thin films were characterized by X-ray diffraction, atom force microscopy, Fourier transform infrared spectrophotometer and fluorescence spectrometer. The results show that the thin film annealed at 700 °C has the largest average grain size and exhibits the best c-axis preferred orientation. As annealing temperature increases to 800 °C, the grain along c-axis has been suppressed. Roughness factor and average particle size increase with the increase of annealing temperature. The IR absorption peak appearing at about 416 cm^?1 is assigned to hexagonal wurtzite ZnO. The thin film annealed at 700 °C has the maximum oxygen vacancy, which can be inferred from the green emission intensity. Photocatalytic results show that the thin film annealed at 700 °C exhibits remarkable photocatalytic activity, which may be attributed to the larger grain size, roughness factor and concentration of oxygen vacancy. Enhanced photocatalytic activity of Mg_0.05Zn_0.95O thin films after a cycle may be attributed to the increase of surface oxygen vacancy and photocorrosion of amorphous MgO on the surface of thin film under UV irradiation.     

退火条件对Sn掺杂ZnO薄膜光电性能的影响

采用溶胶-凝胶法在普通载玻片上制备Sn掺杂ZnO薄膜(SZO薄膜)。研究空气退火、低真空退火、高真空退火、氮气退火、三高退火、循环退火6种不同退火条件对SZO薄膜光电性能的影响。结果表明:6种不同的退火条件制备的SZO薄膜均为纤锌矿结构且具有c轴择优取向生长的特性。高真空退火下,SZO薄膜的结晶状况和电学性质最优,最低电阻率可达到5.4×10~(-2)Ω·cm。薄膜的可见光区平均透过率均大于85%。薄膜在390nm和440nm附近(325nm光激发下)都出现光致发光峰,在空气、氮气、低真空中退火后薄膜440nm处发光强度最为显著。