0.70～2.48MeV质子在F和Mg上160°背散射截面测量

应用北京师范大学2×1.7MV串列静电加速器提供的质子束,采用相对测量方法测量了0.70～2.48MeV宽能区质子在轻核F和Mg上160°（实验室坐标系）背散射截面。测量得到F、Mg各自对应能区的质子共振背散射截面数据,为含F、Mg轻元素的新型薄膜材料的高灵敏分析提供了实验数据。     

0.70～2.48 MeV质子在F和Mg上160°背散射截面测量

应用北京师范大学2×1.7MV串列静电加速器提供的质子束,采用相对测量方法测量了0.70～2.48MeV宽能区质子在轻核F和Mg上160°（实验室坐标系）背散射截面。测量得到F、Mg各自对应能区的质子共振背散射截面数据,为含F、Mg轻元素的新型薄膜材料的高灵敏分析提供了实验数据。     

注氟MOSFET的质子辐照效应

对干Ｏ２和Ｈ２＋Ｏ２栅氧化注Ｆ的Ｓｉ栅Ｐ沟和Ｎ沟ＭＯＳＦＥＴ进行了８ＭｅＶ和１２ＭｅＶ质子辐照试验，通过分析阈电压和Ｌｄｓ－Ｖｇｓ亚阈特性的辐射响应，发现ＭＯＳ结构栅介质中Ｆ的引入能明显抑制辐射感生氧化物电荷的积累和Ｓｉ／ＳｉＯ２界面态的产生，导致ＰＭＯＳＦＥＴ较小的阈电压负向漂移和ＮＭＯＳＦＥＴ阈电正向回漂，且不受质子辐照能量的影响。     

核子微探针多站多参量数据系统用于单颗粒大气飞灰的研究

核子微探针多站多参量数据系统包括由ＳＵＮ工作站和ＶＭＥ计算机总线组成的系统硬件，以及数据获取和分析软件。基于新的数据系统用Ｍｉｃｒｏ－ＰＩＸＥ和Ｍｉｃｒｏ－ＲＢＳ分析了单颗粒大气飞灰，得到了含Ｐｂ的单颗粒大气飞灰元素图谱。     

0.96-2.74MeV质子在铝上的160°散射截面测量

采用薄靶对能量0.962.74MeV质子在纯度为99.99%铝上的160非卢瑟福弹性背散射截面进行了测量。质子束由21.7MV串列加速器提供,测量仪器采用金硅面垒探测能谱仪。实验中最低能区进入卢瑟福弹性散射能区,测量结果用图表形式给出,并与以前发表的结果进行了比较。所测量数据可供从事背散射分析技术的有关人员参考。     

尖晶石－石榴石相转变过程中矿物的微量元素组成与分布特征

利用质子微探针和微束ＰＩＸＥ定量分析技术对山东梭罗树地慢橄榄岩中橄榄石、斜方辉石、单斜辉石、尖晶石和石榴石等矿物的微量元素组成与分布进行了研究。结果表明，不相容元素（Ｓｒ、Ｙ、Ｚｒ）主要富集于单斜辉石内，尖晶石则几乎富集质子探针所能检出的所有微量元素，而石榴石中微量元素含量最少。该研究表明，在矿物微区微量元素分布是十分不均匀的，推测可能受地幔交代过程中溶液的渗滤效应以及存在微粒包裹体的共同制约。     

用时间分辨反射率技术研究硅的固相外延

用时间分辨反射率技术实时测量了Ｓｉ＋、Ａｓ＋注入单晶硅的固相外延生长速率和外延层厚度，并与背散射沟道方法测得的非晶层厚度进行了比较。介绍了测量原理，分析了实验结果．     

在MEVVA源中银离子注入单晶6Hα—SiC的研究

室温下在５０ｋＶ电压的ＭＥＶＶＡ离子源中用不同不剂量的银离子注入到单昌６Ｈα－ＳｉＣ中，对未注入和注入的ＳｉＣ样品进行了显微硬度和压坑的扫描电子显微镜观察，并研究了其拉曼谱、卢瑟福背散射谱和Ｘ光电子能谱等。     

U3Si2热稳定性与防护研究

本文叙述了用热分析方法研究Ｕ３Ｓｉ２在Ａｒ、Ｎ２和空气中的热稳定性，以及Ｕ３Ｓｉ２／Ａｌ、Ｕ３Ｓｉ２／Ｚｒ间的相互反应。根据热分析结果，对Ｕ３Ｓｉ２／Ａｌ弥散型燃料板生产中各工序防护措施进行了改进．生产实践证明，这些防护措施既有效地保证了安全生产及产品质量，又降低了成本。     

用扫描质子微探针研究包裹金和微细粒金的赋存状态

用质子微探针设备研究了500μm×500μm区域内的金驹山金银矿和金牙微细粒金矿样品。结果表明,前者Au与Ag具有正相关关系,Au与Fe在微区范围内具有反相关关系;后者矿中Au与As、S、Fe,特别是与As具有密切的相关关系。     

Depth resolution calculations for heavy-ion microbeam RBS analysis

A detailed study has been made on the use of MeV heavy ions (Z₁ = 6–8) for microbeam Rutherford backscattering (RBS) analysis, to improve the depth resolution of this technique. The algorithm for determination of the depth resolution was created and applied to the Zagreb microbeam facility. Theoretical estimates of depth resolution for C and O ion RBS analysis of thin oxide films and semiconductors, using annular silicon surface barrier detector (SSBD), are compared to those for proton backscattering analysis. Depth resolution in certain cases may be improved by increasing the heavy-ion energy. Therefore, by the proper choice of the heavy ion and the heavy-ion energy, the depth resolution may be improved, maintaining the efficiency of the RBS method.     

PROGRESS IN ION BEAM ANALYSIS AT FUDAN UNIVERSITY

Progres in ion beam analysis at Fudan University in the recent years is briefly reviewed. Presented as examples of the research activities performed in this field are the following projects: (1) Nuclear potential resonance scattering of 6.25 MeV and 4.25 MeV helium ions for simultaneous compositional analysis of carbon and oxygen in a Mylar, a SnInO, and some other film samples: (2) Determination of stoichiometry of a high-temperature superconducting Y-Ba-Cu-O sample by backscattering of 8.8 MeV helium ions; (3) Backscattering and channeling analysis of multilayered structures periodically consisting of layers of pure Si and alternate layers of Ge and Si, grown on (100) Si substrates by molecular beam epitaxy: (4) Studies of surface structure of Al(100) by the use of MeV ions backscattering and channeling surface peak: and (5) MeV ion microbeam analysis and the use of PIXE method in DNA study. etc.     

高能离子弹性散射测定高温超导薄膜的元素配比

本文介绍了用8.8MeV氦离子弹性散射测定Y-Ba-Cu-O超导薄膜元素配比的一种新方法。由于在8.8MeV时~(16)O(α,α)~(16)O非卢瑟福共振散射截面比卢瑟福弹性散射截面大25倍,因而一次测量即能得到Y-Ba-Cu-O全部元素的配比。本方法也适用于Bi-Sr-Ca-Cu-O和Tl-Ba-Ca-Cu-O等其它超导体系元素配比的测定。     

A MICROBEAM SYSTEM OF HIGH ENERGY IONS AT FUDAN UNIVERSITY

Particle induced X- ray emission (PIXE) and Rutherford backscattering spectrometry (RBS) have been used extensively for analytical purpose because of their quantitative accuracy, reliability, simplicity and capability of non- destructive and multielement analysis. When these techniques are combined with a scanning microbeam system and a data acquisition system, three dimensional distribution of elemental composition can be displayed. Samples analyzed so far at Fudan University include a microelectronic circuit and some biological and archaeological samples. The PIXE and RBS spectra and the secondary electron images have been measured.     

COMPOSITIONAL ANALYSIS OF HIGH-TEMPERATURE SUPERCONDUCTOR THIN FILMS BY HIGH ENERGY ELASTIC BACKSCATTERING OF HELIUM IONS

High energy ion backscattering can be used to enhance the sensitivity of oxygen analysis. At He++ ion energy of 8.8 MeV, the yield due to oxygen is about 25 times larger than that predicted by Rutherford formula. The elemental stoichiometry of some bulk and thin film superconductor samples was determined. The details of the measuring method are discribed.     

低能γ射线反散射法测量纸张定量的研究

叙述了低能γ射线反散射法测量纸张定量的可能性,建立了纸张定量与反散射γ射线强度的关系式。研制了一套测量装置,并对测量误差进行了分析。     

The Progress of a Microbeam Facility in the Institute of Plasma Physics

The progress of a microbeam facility in the institute of Plasma Physics was discussed in this paper.This kind of equipment can supply single-particle beam which may be implanted into cells in micrometer-radius and measured by a new outstanding detector among global microbeam systems.Measurements by some plain targets showed that the highest current after the accelerator tube can be larger than 20μA ,the H2^ current before the second bending magnet is near 0.9μA ,the current after the second bending magnet is near 0.8μA,and the current of the beam line(after a 2-mm diameter aperture)is near 0.25nA which is enough for the single-particle microbeam experiment.It took scientists 3 months to do their microbeam experiment after setting up the qccelerator beam line and get the microbeam from this equipment.Two pre0collimators were installed between the 2-mm diameter aperture and the collimator to survey the beam.Tracks on the CR39 film ectched in the solution of NaOH showed that the beam can go through the collimator including a 10μm diameter aperture and the 3.5μm thick vacuum sealing film(Mylar).A new method,which is called optimization of the beam quality,was put forward in this paper,in order to get smaller diameter of beam-spot in microbeam system.     

Thin film analysis by low energy proton induced X-ray emission

A 100 keV proton beam has been used for measuring the thickness of thin films from the proton energy loss determined by using the energy dependence of the yield of X-rays emitted from a gold backing.Comparison between the proposed method and Rutherford backscattering is shown for erosion, thermal interdiffusion or ion beam mixing experiments with carbon and aluminum-gold films.     

单粒子微束品质优化装置研制的设想

对影响单粒子微束装置束品质的因素进行了全面分析，并提出了一种优化单粒子微束装置束品质的方法——用束流发射度精确测量与粒子束聚焦自动调节装置改进单粒子微束装置瞄准器出口束斑。