溅射法制备高取向Pt薄膜的工艺研究

采用射频磁控溅射工艺在SiO2／Si衬底上成功制备了适用于pZT铁电薄膜底电极的180nm厚、沿(111)晶向强烈取向的Pt薄膜。厚约50nm的Ti膜被用作过渡层，以增强Pt薄膜与衬底之间的黏着性。实验表明，在Pt薄膜的制备过程中，较高的衬底温度有利于薄膜晶化，促使Pt薄膜沿(111)晶向择优取向生长。而在薄膜沉积后加入适当的热处理工艺，能有效地提高Pt薄膜的择优取向性，同样可以得到沿(111)晶向强烈取向的Pt薄膜。原子力显微镜分析表明，制得的薄膜结构相对致密，结晶状况良好，晶粒尺寸约为50nm。     

PLZT薄膜的结构、介电与光学性能的研究

以硝酸镧、醋酸铅、钛酸丁酯和异丙醇锆为原料，乙二醇甲醚作溶剂。用简单的溶胶一凝胶法和快速退火工艺在Si(111)、石英和Pt／Ti／SiO2／Si(100)基片成功地制备出了高度多晶和(111)取向生长的(Pb，La)(Ti，Zr)O3(PLZT)薄膜。用原子力显微镜分析了薄膜的表面形貌；测试了薄膜的铁电和介电特性。PLZT薄膜的剩余极化强度和矫顽场分别为10．3μC／cm^2和36kV／cm；在100kHz，薄膜的介电常数和损耗因子分别为682和0．021。生长在石英基片上的薄膜具有好的透光性，当波长高于360nm，其透过率高达72％。     

溶胶-凝胶法制备掺镧钛酸铅铁电薄膜的研究

采用溶胶-凝胶法在Pt／Ti／SiO2／Si衬底上制备了La掺杂的PbTiO3铁电薄膜(PLT)，X-射线衍射测量表明PLT薄膜呈高度(100)择优取向，原子力显微镜和扫描电子显微镜测量表明制备的PLT薄膜的表面平整、结构致密。RT66A测量表明PLT薄膜有优良的铁电特性，500kV／cm的外加电场下，剩余极化为10．6μC／cm^2，矫顽电场为55kV／cm。用HP4194A分析了薄膜的介电特性。100kHz时的介电常数为652。     

溶胶-凝胶法制备钡钕钛薄膜及其介电性能研究

采用溶胶-凝胶法在Si(111)和Pt/Ti/SiO2/Si衬底上制备Ba4Nd9.33Ti18O54(BNT)介质薄膜,采用X线衍射仪(XRD)和扫描电子显微镜(SEM)研究了不同退火温度对薄膜结构和表面形貌的影响。结果表明当薄膜在950℃下退火2h后具有较好结晶质量的钨青铜结构,所得到的薄膜表面较为疏松;通过掺入质量分数为2%B2O3-2SiO2,可进一步将BNT薄膜的晶化温度降至900℃,且结构致密。介电性能测试表明,1 MHz频率下BNST薄膜的介电常数为45,介电损耗为1.1%,30V偏压下漏电流密度为4.13×10-6 A/cm2。     

高取向PZT厚膜的0-3复合法制备

采用0-3复合法,在Pt/Ti/SiO2/Si衬底上成功制备了单层厚度0.9μm,总厚度10μm,并且无裂纹的Pb(Zr0.53,Ti0.47)O3铁电薄膜.溶液中粉体的存在减小了加热时的体积收缩,降低了制备过程中膜内部产生的应力,从而使得单层厚度可达0.9μm,防止了薄膜开裂.X射线衍射分析表明薄膜为单一钙钛矿相结构且结晶状态良好,采用已烧结的粉末时,薄膜呈〈110〉取向;扫描电子显微镜分析表明,薄膜表面无裂纹;介电性能测试结果显示,其相对介电常数可高达1150.为了研究粉末的状态和薄膜取向之间的关系,将未经烧结的未结晶的PZT粉末加入前驱溶液中,在相同的制备条件下,可得沿〈100〉晶向强烈取向的PZT薄膜.     

高取向PZT厚膜的0-3复合法制备

采用0-3复合法,在Pt/Ti/SiO2/Si衬底上成功制备了单层厚度0.9μm,总厚度10μm,并且无裂纹的Pb(Zr0.53,Ti0.47)O3铁电薄膜.溶液中粉体的存在减小了加热时的体积收缩,降低了制备过程中膜内部产生的应力,从而使得单层厚度可达0.9μm,防止了薄膜开裂.X射线衍射分析表明薄膜为单一钙钛矿相结构且结晶状态良好,采用已烧结的粉末时,薄膜呈〈110〉取向;扫描电子显微镜分析表明,薄膜表面无裂纹;介电性能测试结果显示,其相对介电常数可高达1150.为了研究粉末的状态和薄膜取向之间的关系,将未经烧结的未结晶的PZT粉末加入前驱溶液中,在相同的制备条件下,可得沿〈100〉晶向强烈取向的PZT薄膜.     

Sol-Gel法制备硅基钛酸铋铁电薄膜

介绍溶胶一凝胶(Sol-Gel)法制备Bi4Ti3O12薄膜的工艺过程；对前驱体溶液进行了综合热分析，并对薄膜的性质进行了研究；成功地在p-Si衬底上制备出随机取向的Bi4Ti3O12铁电薄膜。在650℃下退火30min得到的Bi4Ti3O12薄膜的剩余极化强度Pr=12μC／cm^2，矫顽场强Ec=130kV／cm。     

两步法快速退火对PSTT5铁电薄膜性能的影响

采用射频磁控溅射法在LSCO/Pt/Ti/SiO2/Si(100)衬底上制备了 0.95Pb(Sc0.5Ta0.5)O3-0.05PbTiO3(PSTT5)铁电薄膜.研究了不同的快速退火(RTA)工艺对PSTT5薄膜的结晶性能和铁电性能的影响.实验结果表明,经两步法快速退火,PSTT5薄膜具有完全钙钛矿结构且呈(220)取向.PSTT5薄膜的铁电性能测试结果也表明,采用两步法RTA处理的PSTT5薄膜具有更好的铁电性能,其剩余极化强度(2Pr)可达25.4 μC/cm2.     

退火温度对 BNST薄膜结构和性能的影响

采用射频磁控溅射法在Pt/Ti/LaAlO3(100)衬底上制备了BaO-Nd2O3-Sm2O3-TiO2系(BNST)薄膜.研究了退火温度对BNST薄膜结构、表面形貌和介电性能的影响.X线衍射仪(XRD)分析表明,随着退火温度的升高,晶粒逐渐长大.经850℃退火处理的BNST薄膜具有很好的结晶质量.原子力显微镜(AFM)分析表明,在一定范围内提高退火温度所制备的薄膜晶粒致密、大小均匀.LCR测试分析表明,在测试频率为100 kHz时,随着退火温度的升高,BNST薄膜介电常数有所增加,介电损耗则先降低,后增加.实验表明,经850℃退火处理,所制备的BNST薄膜的介电常数达37,介电损耗小于1.2‰.     

(100)定向CVD金刚石薄膜的制备及其电学性能

采用HFCVD制备金刚石薄膜的方法,以乙醇为碳源，氢气为载气，在适当的衬底温度下，合成出具有(100)晶面取向均匀生长的金刚石薄膜．SEM，XRD和Raman分析表明,所合成的金刚石薄膜是高质量的多晶(100)取向膜，厚度均匀、化学性能稳定,结构和性能与天然金刚石相接近．研究了室温下(100)取向金刚石薄膜的暗电流电压特性、稳态55Fe 5.9keV X射线辐照下的响应和电容频率特性．结果表明，退火后(100)取向多晶金刚石薄膜具有较低的暗电流和较高的X射线响应；高频下，电容和介电损耗都很小且趋于稳定，不随频率的变化而变化．     

Interfacial reaction and shear strength of SnAgCu-xNi/Ni solder joints during aging at 150 °C

The interfacial microstructure and shear strength of Sn3.8Ag0.7Cu-xNi (SAC-xNi, x = 0.5, 1, and 2) composite solders on Ni/Au finished Cu pads were investigated in detail after aging at 150 °C for up to 1000 h. The interfacial characteristics of composite solder joints were affected significantly by the weight percentages of added Ni micro-particles and aging time. After aging for 200 h, the solder joints of SAC, SAC-0.5Ni and -1Ni presented duplex intermetallic compound (IMC) layers regardless of the initial interfacial structure on as-reflowed joints, whose upper and lower IMC layers were comprised of (CuNi)₆Sn₅ and (NiCu)₃Sn₄, respectively. Only a single (NiCu)₃Sn₄ IMC layer was ever observed at the SAC-2Ni/Ni interface on whole aging process. Based on the compositional analysis, the amount of Ni within the IMC regions increased as the proportion of Ni addition increased. The IMC (NiCu)₃Sn₄ layer thickness on the interface of SAC and SAC-0.5Ni grew more slowly when compared to that of SAC-1Ni and -2Ni, while for the (CuNi)₆Sn₅ layer the reverse is true. Except the IMCs sizes are increased with increased aging time, the interfacial IMCs tended to transfer their morphologies to polyhedra. In all composite joints testing, the shear strengths were approximately equal to non-composite joints. The fracturing observed during shear testing of composite joints occurred in the bulk solder, indicating that the SAC-xNi/Ni solder joints had a desirable joint reliability.     

有机发光二极管中ADN掺杂ErQ的1.54μm电致发光

自行设计了基于8-羟基喹啉铒(ErQ)为发射层(EMLs)和二硝酰胺铵(ADN)为蓝光主体材料的近红外有机发光二级管.器件的基本结构为(p-Si/NPB/EML/Bphen/Bphen:Cs2CO3/Sm/Au),设计并比较了三套不同发射层结构(ErQ/ADN为双层结构器件,(ErQ/ADN)×3为多层结构器件,ErQ:ADN为掺杂结构器件)的器件.三组器件在一定的偏压下,均可发出1.54μm的光,对应三价铒离子4I13/2→4I15/2的跃迁.其中,ADN:ErQ(1∶1)掺杂结构的近红外电致发光强度是ADN/ErQ双层结构中的三倍.此外,不同掺杂浓度的ADN:ErQ复合膜做了以下表征:吸收谱、光致发光谱和荧光寿命谱.实验结果证实了在近红外电致发光过程中存在从ADN主体分子到ErQ发射分子的高效率的能量转移.     

BNBST无铅压电陶瓷的制备工艺研究

设计了（Bi0.55Na0.5）1-X（BaaSrb）xTiO3（BNBST[100x-100a／100b]）无铅压电陶瓷新体系。该体系压电陶瓷具有工艺特性及压电响应好，压电常数高的特点，且有实际应用前景的新型压电陶瓷材料体系。采用传统的陶瓷工艺制备了（Bi0.55Na0.5）1-X（BaaSrb）xTiO3无铅压电陶瓷，研究了制备工艺参数对其物化结构性能的影响。生料的热重-差热（TGA-DTA）分析表明，粉料合成过程中，先是SrTiO3、BaTiO3的形成，然后是（Bi0．5Na0．5）Tio，的形成，同时三者形成固溶体；密度测试表明，陶瓷的体积密度随烧结温度的升高而增大，可较易获得理论密度94％的陶瓷；X-射线能谱分析（EDAX）研究表明，陶瓷的Bi、Na的挥发随着烧结温度的升高而加剧。研究结果表明，要制备性能优良的无铅压电陶瓷，需要精确控制制备工艺。     

Emerging interconnects: a state-of-the-art review and emerging solutions

Aluminium was a primary material for interconnection in integrated circuits (ICs) since their inception. Later, copper was introduced as interconnect material which has better metallic conductivity and resistance to electromigration. As the aggressive technology scaling continues, the copper resistivity increased because of size effects, which causes increase in delay, power dissipation and electromigration. The need to reduce the resistor-capacitor??????? delay, dynamic power utilisation and the crosstalk commotion is as of now the fundamental main impetus behind the presentation of new materials. The purpose of this paper is to do a survey of interconnect material used in IC from introduction of ICs to till date. This paper studies and reviews new materials available for interconnect application which are optical interconnects, carbon nanotube (CNT), graphene nanoribbons (GNRs) and silicon nanowires which are alternatives to copper. While doing a survey of interconnect material, it is found that multiwalled CNTs, multilayer GNR and mixed CNT bundles are promising candidates and are ultimate choice that can strongly address the problems faced by copper but on integration basis copper would last for coming years.     

聚对苯撑苯并双(口恶)唑发光及其器件制备

采用光谱技术,研究了聚对苯撑苯并双(口恶)唑(PBO)溶液的光敏发光特性,并用相对法估算出溶液发光效率在50%范围.结合光谱技术、半导体电学和电化学等研究手段,具体研究了以PBO为发光层的单层电致发光器件,研究结果显示,电致发光与薄膜的光致发光有具有相同的发光中心,峰值位于510 nm左右.同时发现,由于存制备过程中不同处理条件使得不同厚度薄膜残留的掺杂物质浓度不同,从而引起薄膜的导电性的不同.使得器件的阈值场强随PBO厚度的减小而逐渐增加.     

钠离子对poly(dT).poly(dA).poly(dT)三螺旋DNA分子呼吸模式的影响

利用分子结构的螺旋对称性,建立了一个包括钠离子的三链DNA分子poly(dT)*poly(dA)*poly(dT)的晶格动力学模型,计算了poly(dT)*poly(dA)*poly(dT)的氢键呼吸模式.结果发现钠离子的加入明显地淬灭了位于较低频率的几个最为强烈的Hoogensteen氢键呼吸模式,而对Watson-Crick氢键呼吸模式影响不明显,这说明钠离子能提高poly(dT)*poly(dA)*poly(dT)三螺旋结构的稳定性.该计算结果很好地解释了poly(dT)*poly(dA)*poly(dT)的热融化实验.     

人小肠粘膜免疫酶的定位研究—光镜和电镜免疫组织化学染色法

本文对免疫酶组织化学的样品制备程序和染色方法做了详细的阐述。用直接法、间接法和ABC法,对人小肠免疫酶的定位,进行了光镜和电镜的观察,染色阳性反应显著,获得了满意的效果。并对染色技巧做了分析和探讨。     

Arsenic deposition as a precursor layer on silicon (211) and (311) surfaces

We investigate the properties of arsenic (As) covered Si(211) and Si(311) surfaces by analyzing data from x-ray photoelectron spectroscopy (XPS) and low-energy electron diffraction (LEED) images. We then create a model using total surface energy calculations. It was found that both Si(211) and Si(311) had 0.68±0.08 surface As coverage. Si(211) had 0.28±0.04 Te coverage and Si(311) had 0.24±0.04 Te coverage. The Si(211) surface replaces the terrace and trench Si atoms with As for a lower surface energy, while the Si edge atoms form dimers. The Si(311) surface replaces all terrace atoms and adsorbs an As dimer every other edge site. These configurations imply an improvement in the mean migration path from the bare silicon surface by allowing the impinging atoms for the next epitaxial layer, tellurium (Te), to bind at every other pair of edge atoms, and not the step terrace sites. This would ensure a nonpolar, B-face growth.     

Joint estimation of TOA and DOA in IR-UWB system using a successive propagator method

Impulse radio ultra-wideband (IR-UWB) ranging and positioning require accurate estimation of time-of-arrival (TOA) and direction-of-arrival (DOA). With receiver of two antennas, both of the TOA and DOA parameters can be estimated via two-dimensional (2D) propagator method (PM), in which the 2D spectral peak searching, however, renders much higher computational complexity. This paper proposes a successive PM algorithm for joint TOA and DOA estimation in IR-UWB system to avoid 2D spectral peak searching. The proposed algorithm firstly gets the initial TOA estimates in the two antennas from the propagation matrix, then utilises successively one-dimensional (1D) local searches to achieve the estimation of TOAs in the two antennas, and finally obtains the DOA estimates via the difference in the TOAs between the two antennas. The proposed algorithm, which only requires 1D local searches, can avoid the high computational cost in 2D-PM algorithm. Furthermore, the proposed algorithm can obtain automatically paired parameters and has better joint TOA and DOA estimation performance than conventional PM algorithm, estimation of signal parameters via rotational invariance techniques algorithm and matrix pencil algorithm. Meanwhile, it has very close parameter estimation to that of 2D-PM algorithm. We have also derived the mean square error of TOA and DOA estimation of the proposed algorithm and the Cramer-Rao bound of TOA and DOA estimation in this paper. The simulation results verify the usefulness of the proposed algorithm.     

系统级封装新型埋入式电源滤波结构的研究

在高密度小尺寸的系统级封装(SiP)中,对供电系统的完整性要求越来越高,多芯片共用一个电源网路所产生的电压抖动除了会影响到芯片的正常工作,还会通过供电网路干扰到临近电路和其他敏感电路,导致芯片误动作,以及信号完整性和其他电磁干扰问题.这种电压抖动所占频带相当宽,几百MHz到几个GHz的中频电源噪声普通方法很难去除.结合埋入式电容和电源分割方法的特点,提出一种新型高性能埋入式电源低通滤波结构直接替代电源/地平面.研究表明,在0.65～4GHz的频带内隔离深度可达-40～75 dB,电源阻抗均在0.25ohm以下,实现了宽频高隔离度的高性能滤波作用.分别用电磁场和广义传输线两种仿真器模拟,高频等效电路模型分析这种低通滤波器的工作原理以及结构对隔离性能的影响,并进行了实验验证.