基于有源网络和受控辅助电阻支路的有源电感

针对传统共漏-共栅-共源(CD-CG-CS)有源电感的不足,结合有源网络和受控辅助电阻支路,设计了一款具有大电感值,且可在不同频率下获得高Q峰值和在同一频率下对Q峰值进行大范围调谐的新型有源电感.基于TSMC 0.18μm CMOS工艺,利用安捷伦公司的射频电路设计工具ADS软件对其进行仿真验证.仿真结果表明:当调节有源网络偏置时,在2.48～2.87 GHz的工作频带内,取得了10.89～ 13.16 nH的大电感值,在2.48,2.74和2.87 GHz三个不同频率下,分别取得了9 997,4 015和2 717的高Q峰值.当调节受控辅助电阻支路偏置时,在工作频率为3.10 GHz下,取得了11.65～17.61 nH的大电感值,Q峰值可在616～3 823之间进行大范围调谐.用Cadence Virtuoso工具进行版图设计,新型有源电感的版图面积较小,仅为21.5 μm×34.4 μm.     

一种改进型共源-共栅-共漏有源电感

在传统共源-共栅-共漏(CS-CG-CD)有源电感的基础上，提出一种改进型有源电感。在负跨导器的CG晶体管与正跨导器的CD晶体管之间引入带有并联电阻的第一反馈回路和具有小尺寸晶体管的第二反馈回路；另外，在负跨导器的CS晶体管与正跨导器的CD晶体管之间引入调控支路；最终，通过不同模块的相互配合及其他三个外部调控端电压的联合调节，实现了对电感性能的两种重构：1)在同一频率下取得高的Q峰值且Q峰值相对L值可大范围独立调节；2)在不同频率下取得高的Q峰值且Q峰值保持基本不变。验证结果表明，在频率5.81 GHz下，Q峰值可从1 132调谐到15 491,调谐范围高达1 268.5%,而电感值在7.65～7.67 nH之间变化，变化率仅为0.26%;在频率5.72 GHz、7.12 GHz和7.93 GHz下，分别取得了1 274、1 317和1 310的高Q峰值，Q峰值变化率仅为3.38%,同时分别取得了大的电感值7.62 nH、8.08 nH和8.81 nH;有源电感的直流功耗约为38.61 mW。     

一种Q值高且可独立调节的新型宽带有源电感

基于回转器原理,提出了一种可在较宽频带内工作、具有大电感值和高Q值、Q值相对于电感值可以独立调节的新型有源电感。在回转器的负跨导器中,引入了调制MOS管。一方面,增加了一个新的回转通路,进而增加了回转次数,实现了大电感值。另一方面,创建了一个反馈支路,减小了等效串联电阻,实现了高Q值。将为正跨导器提供偏置的电流源与负跨导器交叉耦合连接,形成负阻结构,增大了等效并联电阻,进一步提高Q值。在有源电感的输入端串接小尺寸MOS管,减小了等效输入电容,实现了高的谐振频率和宽的工作频带。对有源电感进行验证,结果表明,Q峰值可高达1 996,电感峰值可高达54 nH,工作频带为0~12 GHz。协同调节有源电感的两个外部偏置电压时,实现了Q值相对于电感值的独立调节。Q值峰值从52到995大幅度变化时,电感峰值的变化幅度仅为5.3%。     

一种Q-f与L-f特性增强的高线性有源电感

提出了一种品质因数(Q)-频率(f)特性与电感值(L)-频率(f)特性增强的新型高线性有源电感,主要由负跨导器、新型正跨导器、Q值增强调制模块、反馈电阻、两级电平转换电路和负跨导器分流支路组成。通过多个电路单元间的协同配合和所设置的三个外部偏置端电压的联合调谐,该有源电感不但具有高Q值,Q值相对于电感值可独立调节,而且高Q峰值及电感值在不同频率下能够基本保持不变,同时也有高的线性度。验证结果表明,在6 GHz下,Q值可在275~4 471之间变化,调谐率为176.8%,而电感值的变化率仅为1.5%；在4.8 GHz、5.2 GHz、5.6 GHz和6 GHz的4个频点下,分别获得了4 480、4 469、4 473和4 471的高Q峰值,变化率仅为0.24%,且电感值分别为7.532 nH、7.467 nH、7.909 nH、7.977 nH,变化率仅为6.3%；电感值的-1 dB压缩点为-13 dBV。     

一种Q-f特性和对工作电压波动鲁棒性增强的有源电感

提出一种品质因数(Q)-频率特性(Q-f特性)和对工作电压波动鲁棒性增强的新型有源电感。首先,通过回转器、直流偏置电路、分流支路三个构成模块的相互配合和它们的外部偏置端电压的协同调节,增强了Q-f特性,即实现了在同一频率下Q峰值相对于电感值可大范围独立调节以及在不同频率下Q峰值保持基本不变的2种Q值特性;其次,通过设置由感知单元与放大单元构成的稳压模块,增强了电感值和Q峰值对工作电压波动的鲁棒性。结果表明,在频率3.84 GHz下,Q值可从636调节到4032,调节率高达533%,而电感值变化率仅为0.13%;在3.84 GHz、2.40 GHz和1.54 GHz不同频率下,分别取得4032、4039和4043的高Q峰值,Q峰值变化率仅为0.2%;电感值和Q峰值的工作电压敏感度分别为0.011 nH/mV和20.0 /mV。     

一种双回转器有源电感

针对基于共源-共栅负跨导器的传统单回转器有源电感(TSAI-CS-CG)的不足,联合采用双回转器结构、负阻网络和负反馈网络,提出了一款兼有大电感值、高Q值、高线性度、宽频带、可调谐特性的双回转器有源电感(DGAI)。基于TSMC 0.13μm RF CMOS工艺,利用是德科技公司的射频高级设计系统（ADS）进行验证。结果表明：电感工作频率范围为0~22.5GHz;Q峰值可达6883;电感的-1dB压缩点高达-17dBm;调节外部偏置,在频率为15GHz下,在频率为15GHz下,电感值可从19.59nH到73.41nH之间进行大范围调节。     

射频前端宽带高Q值可调节集成有源电感

针对传统接地有源电感的电感值低、Q值低等缺点,提出了一种改进型的有源电感,并给出了等效电路图及等效阻抗的表达式。基于TSMC 0.35μm SiGe BiCMOS工艺,利用Cadence软件,完成了电路和版图设计。提出的有源电感,在频率小于5GHz时,其等效电感值随频率变化很小,大于5GHz后,随频率变化略有增大。通过改变外加偏置电压,实现了电感值和Q值的可调,电感值可调范围为1.035～5.631nH,Q值最大值可达到1 557;同时,也可调节有源电感Q值达到最大值时所对应的工作频率。     

一种电感值和Q峰值可相互独立调谐的高线性有源电感

设计了一种电感值和Q峰值可相互独立调谐的高线性有源电感。该电感主要由跨导增强模块、互补共源级模块以及单端负阻模块构成。其中,跨导增强模块不仅可以作为正跨导器,并且可实现对电感值的大范围调谐；互补共源级模块不仅可以作为负跨导器,并且可改善有源电感的线性度；单端负阻模块不仅提高了Q值,并且补偿由电感值的调谐导致的Q峰值的变化。最终,通过以上模块的相互配合及其外部端口电压的协同调控,改善了有源电感的线性度,而且实现了在同一频率下Q峰值相对于电感值可大范围独立调谐以及在不同频率下电感值相对于Q峰值可大范围独立调谐的优秀性能。验证结果表明,该有源电感电感值的-1 dB压缩点为-7 dBm；在2.07 GHz的频率下,Q峰值可从240调节到1573,而电感值从11.89 nH仅变化到12.11 nH；在0.989 GHz、2.070 GHz和3.058 GHz的不同频率下,取得了493.7、501.2和508.4的高Q峰值,变化率仅为3%,而相应频率下的电感值分别为16.1 nH、13.4 nH和6.8 nH,变化率为136.7%。     

一种同时具有优秀电感值和 Ｑ 值特性的压控有源电感

提出了一种同时具有优秀电感值和Q值特性的新型压控有源电感（VCAI）,主要由回转器单元、Q值增强单元、调控补偿单元和噪声抑制单元等4个模块组成,其中回转器单元和调控补偿单元分别设置了两个外部调控电压。通过4个电路单元的相互配合和协同调节4个外部调控电压,使得VCAI不但具有高Q值、大电感值、低噪声,而且在不同工作频率下同时获得了大的电感峰值以及高的Q峰值,同时频带也可相对于电感峰值独立调谐。基于TSMC 0.13 μm CMOS进行工艺验证,结果表明,该VCAI在9.1 GHz的高频下,电感峰值和Q峰值可分别高达62052 nH和895.6;在9.4 GHz的高频下,电感峰值和Q峰值可分别高达55847 nH和861.2;工作频带可从6.12 GHz调谐到10.31 GHz,调谐比率高达68.46%,而电感峰值只在1271.1 nH ~ 1271.2 nH之间变化,变化率仅为0.0079%;最大噪声仅为3.61 nV/。     

一种采用LC谐振电路的高频差分有源电感

提出了一种采用LC并联谐振电路的新型差分有源电感,实现了宽的工作频带、高的Q值、较大的电感值和可调谐功能。采用无源电感和MOS晶体管可变电容构成LC谐振电路,减小了等效串联电阻和等效并联电容,在增大电感值、Q值的同时,扩大了工作频带。仿真结果表明,在2~7.6 GHz频率范围内,该新型差分有源电感的电感值大于26 nH,Q值大于138;在7.6 GHz高频下,电感值达130 nH,Q值达418,实现了宽工作频带范围内的高Q值和高电感值。与传统差分有源电感和带LC谐振电路的单端有源电感相比,该新型差分有源电感的性能较好。     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

Critical Stage Rule-Based Real Time Dispatch（RTD）System in Highly-Mixed-Products （HMP） FAB

An improving utilization and efficiency of critical equipments in semiconductor wafer fabrication facilities are concerned. Semiconductor manufacturing FAB is one of the most complicated and cost sensitive environments. A good dispatching tool will make big difference in equipment utilization and FAB output as a whole. The equipment in this paper is In-Line DUV Scanner. There are many factors impacting utilization and output on this equipment group. In HMP environment one of the issues is changing of reticule in this area and idle counts due to load unbalance between equipments. Here we'll introduce a rule-based RTD system which aiming at decreasing the number of recipe change and idle counts among a group of scanner equipment in a high-mixed-products FAB.     

GaAsSb/InAlAs PA DHBTs Grown by Production MBE

The epi material growth of GaAsSb based DHBTs with InAlAs emitters are investigated using a 4 × 100mm multi-wafer production Riber 49 MBE reactor fully equipped with real-time in-situ sensors including an absorption band edge spectroscope and an optical-based flux monitor. The state-of-the-art hole mobilities are obtained from 100nm thick carbon-doped GaAsSb. A Sb composition variation of less than ± 0.1 atomic percent across a 4 × 100mm platen configuration has been achieved. The large area InAlAs/GaAsSb/InP DHBT device demonstrates excellent DC characteristics,such as BVCEO＞6V and a DC current gain of 45 at 1kA/cm2 for an emitter size of 50μm × 50μm. The devices have a 40nm thick GaAsSb base with p-doping of 4. 5 × 1019cm-3 . Devices with an emitter size of 4μm × 30μm have a current gain variation less than 2% across the fully processed 100mm wafer. ft and fmax are over 50GHz,with a power efficiency of 50% ,which are comparable to standard power GaAs HBT results. These results demonstrate the potential application of GaAsSb/InP DHBT for power amplifiers and the feasibility of multi-wafer MBE for mass production of GaAsSb-based HBTs.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.