22nm工艺代的技术经济学

电路设计缩小到22nm的最可行的“路径”是什么？是否已有克服目前已预料到的在制造和设计方面所存在的问题的办法？极超紫外（EUV）（光刻）仍然面临着某些技术和经济上的不确定性。如利用193nm波长浸入式光刻系统批量生产22nm电路必须克服不止一项困难。     

应用于纳米制造的新型电子束抗蚀剂Calixarene的工艺研究

为了满足电子束光刻（EBL）对高分辨率、性能优秀抗蚀剂的需求,研究了将Calixarene衍生物作为电子束抗蚀剂在胶液配制、电子束曝光及显影等工艺过程中的相关技术.其中电子束曝光实验在JEOL JBX-5000LS系统上进行.实验结果表明,在入射电子能量50 keV、束流50 pA的条件下,Calixarene可以方便地形成50 nm的单线、50nm等线宽与间距的图形结构.通过与常用电子束抗蚀剂的对比,总结了Calixarene在电子束光刻性能上的优缺点,并分析了其成因.作为一种新型的高分辨率电子束光刻抗蚀剂,Calixarene有望应用在纳米结构制造、纳米尺寸器件及电路的研制等领域.     

分步式压印光刻研究

针对微纳制造中光刻环节的光衍射限制，讨论了可能成为下一代光刻技术路线的压印光刻。通过对比热压印、微接触转印及常温压印的技术特点，设计了一套低成本、结构简单的紫外光固化常温压印光刻机构。其大行程纳米级定位、纳米级下压系统消除了压印过程中的机构热变形误差、驱动间隙、蠕动误差等，具有分步式纳米级驱动多场压印及纳米级下压加载能力，可实现多次重复高保真图形复制。     

电子束散射角限制投影光刻掩模研制

掩模制作是电子束散射角限制投影光刻(SCALPEL)的关键技术。通过优化工艺,制作出具有“纳米硅镶嵌结构”的低应力SiNx薄膜作为支撑;开发了电子束直写胶图形的加法工艺,在支撑薄膜上得到清晰的钨 / 铬散射体图形。研制出的SCALPEL掩模,其晶片尺寸为80mm,图形线宽达到0.1m,经缩小投影曝光得到78nm的图形分辨力。     

抗蚀剂进展

1988年ISCC试制了16兆位随机存取存储器(16MDRAM),线宽达0.5μm,但16MDRAM的光刻照相技术目前仍处于探索阶段,现正研究在制造工艺中使用哪种波长的光源最为有利,诸如g线(436nm),i线(365nm),激态分子激光(248或193nm),x线,电子束等。现将目前开发的抗蚀剂作一简介,以探索今后的方向。 1.抗蚀剂特性硅片等基片涂布抗蚀剂后,经干燥、曝     

突破光学衍射极限,发展纳米光学和光子学材料及器件

微电子学(Micro-electronics)已突破Moore定律,进入纳米电子学(Nano-electronics)时代。光子的传播速度(1012cm/s)比电子传播速度(109cm/s)快得多,纳米光学和光子学材料及器件的发展正是迎合这种快速和高密度信息技术的需求。先进的纳米光学和纳米光子学器件应该是快速、高分辨率和高集成的,形成各类光学和光子学芯片和盘片。先进的材料是突破各类功能芯片的关键。在各类电子学以及光学和光子学的纳米芯片和器件制造过程中,纳米刻蚀工艺是一个关键。与电子束、离子束和X射线刻蚀工艺相比较,光刻是一种易控制、大面积、高速度和低价格的制造工艺。目前,光刻分辨率受限于光的衍射极限,分辨率取决于Airy斑的大小,主要靠缩短光束的波长和增大物镜的数值孔径来提高,已接近可达到实用化纳米光刻的极限。突破光的衍射极限,在光的远场和近场应用超分辨率技术,是当前重要的前沿课题。发展用于光学超分辨率的各种功能材料以及新的刻录介质材料是这一新的重大创新技术的关键。     

纳米压印光刻技术及其发展现状

纳米压印光刻技术的研究始于普林斯顿大学纳米结构实验室Stephen Y．Chou教授，是将一具有纳米图案的模版以机械力（高温、高压）在涂有高分子材料的硅基板上等比例压印复制纳米图案，其加工分辨力只与模版图案的尺寸有关，而不受光学光刻的最短曝光波长的物理限制。目前NIL技术已经可以制作线宽在5nm以下的图案。由于省去了光学光刻掩模版和使用光学成像设备的成本，因此NIL技术具有低成本、高产出的经济优势。此外，NIL技术可应用的范围相当广泛，涵盖纳米电子元件、生物或化学的硅片实验室、微流道装置（微混合器、微反应器）、超高存储密度磁盘、微光学元件等领域。     

图案化ZnO纳米线阵列制备与应用的研究进展

综述了多种图案化制备ZnO纳米线阵列的技术,包括电子束光刻技术、纳米球蚀刻技术、激光干涉光刻技术、纳米压印技术和嵌段共聚物蚀刻技术等。介绍了图案化ZnO纳米线阵列在传感器、太阳能电池和UV检测器等功能器件中的应用进展,分析了图案化ZnO纳米线阵列制备与应用中的优点、意义及存在的问题,并展望了其未来发展趋势。     

ArF光刻胶成膜树脂研究进展

ArF曝光分为干式光刻和浸没式光刻，结合多重曝光技术，分辨率覆盖90～97nm,是芯片制造的主流工艺。ArF光刻胶要求透光率高(193nm波长处)、分辨率高、感度快、抗刻蚀性强、边缘粗糙度小及缺陷少，因此对成膜树脂提出了更高要求。目前报道的ArF光刻胶成膜树脂大致分为三类：(甲基)丙烯酸酯体系；环烯烃体系；马来酸酐体系。主要对三类成膜树脂进行了分类总结，并介绍成膜树脂结构的特点。     

高精度6inch F/5.4球面标准具结构研究与设计

193 nm光刻投影物镜光学元件面形精度为纳米级,因此要求检测精度为纳米到亚纳米级.在高精度的光学元件面形检测中,为了保证检测的精度,干涉仪标准球面镜的精度要优于λ/40.根据检测要求,设计了一种新的标准镜装卡结构.采用有限元方法分析了参考面在重力作用下的面形变化情况,其最大面变形变化峰谷(PV)值仅为4.88 nm,...     

Insertion of triangulated surfaces into a meccano tetrahedral discretization by means of mesh refinement and optimization procedures

In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.     

From Industry 4.0 to Research 4.0. Development of High Performance Fibers in the Light of Digitization

We associate a variety of innovations with the term ＂Industry 4.0＂. The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...     

Roman iron and steel: A review

ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.     

The Research of Anti-Wear Properties of Organomolybdenum Compounds in the Engine Oils

A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils.     

Certification Institutions Expected to Update and Transfer Information on Present Standards

Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……     

Flow calorimeter for enthalpy increment measurements on condensed gases

A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.     

Synthesis of Alumina-Zirconia Nanocomposites by Solgel Process

Al₂O₃-ZrO₂ nanocomposites were developed starting with the solgel process. Composite alumina-zirconia nanopowders were synthesized from metallorganic precursors (Aluminium secondary butoxide and zirconium Iso propoxide) using the solgel process. The parameters affecting the synthesis—solvent, concentration of precursor, R/H ratio (i.e., dilution of water in solvent)—were varied as also the temperature and pH. BET and TEM were used to measure nanosize. Diffuse reflectance spectroscopy and also qualitative optical absorption led to identical particle size estimate. The variation of process parameters was used to study the effect and interdependence of process parameters. Artificial Neural Networks was used to rigorously analyze the process. Although this led to confirmation of interdependence of parameters, the presence of a single overwhelming solvent variable was also established. Then the optimal process was used to synthesize more nanopowder. To produce bulk nanocomposite the nanopowders were sintered by varying the temperature and time period. The sintered lithoids were probed with a vickers hardness tester to measure elastic modulus, hardness, and fracture toughness. The results showed high elastic modulus, modest hardness, and very high fracture toughness.     

Refrigerators Enter a New Era of Health Preservation Frestech initiates the establishment of China's first standard for household sterilization refrigerators

On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……     

Friction Stir Processing Strategies for Uniform Distribution of Reinforcement in a Surface Composite

Friction stir processing (FSP) is an important technique for preparing surface composites. Fabricating defect-free surface composites with uniform particle distribution by FSP is a challenging task. In this study, silicon carbide particles reinforced AA5083 alloy surface composites was fabricated using different FSP strategies including variation in process parameters, dual-tool processing and tool offset overlapping. Material flow of the processed material with reinforcement particles demonstrated that the distribution of particles was influenced by the stirring action of the probe as well as the extrusion of the plasticized material due to the movement of the tool. Process parameters, particularly rotational speed, showed a dominant influence on the distribution of silicon carbide particles.