我国深度X射线光刻技术获突破

我国深度Ｘ射线光刻技术获突破最近，由中国科学院长春光机所采用自制的加厚金掩膜，与中国科学院高能物理所密切合作，在经改进的同步辐射束线上光刻出微电机联轴器部件的光刻胶膜图形。联轴器外径直径６００微米，壁厚６０微米，高度为５００微米，深宽比达８：３。这是...     

迈向21世纪的光刻技术

介绍了紫外光刻技术,电子束光刻技术,Ｘ射线光刻技术以及与这些技术相关的一些单元技术的最新进展,概要介绍了这些技术最热门的研究课题,阐述了这些技术的发展前景。     

X射线镂空硅掩模在同步辐射X射线深层光刻中的应用

阐述了Ｘ射线镂空硅掩模的研制及其在同步辐射深层光刻中的应用。在北京同步辐射国家实验室Ｘ射线光刻装置上，采用本文研制的Ｘ射线镂空硅掩模获得胶厚为３０－４０μｍ、侧壁很陡、边缘很直的Ｘ射线深层光刻胶图形。     

0.1-0.3μmX射线光刻技术在GaAs器件制作中的应用

对同步辐射Ｘ射线光刻及在ＧａＡｓ ＰＨＥＭＴ器件制作中的应用进行了研究,并制作出栅长０．１５μｍ的ＡｌＧａＡｓ／ＩｎＧａＡｓ／ＧａＡｓ ＰＨＥＭＴ晶体管。研究结果表明,Ｘ射线光刻在肃离图形册结构制作工艺中具有极好的光刻图形质量,在混合光刻工艺中,抑止ＧａＡｓ合金点的形成是取得良好的对准标记的关键。     

软X射线光刻研究现状和发展

新的一代光刻设备朝着两个方向发展 ,一是趋向于大数值孔径、短波长 ;另一方面国际上正在寻求适应二十一世纪、小于 0 .1 5微米线宽的软 X射线投影光刻技术 ,预计成为下世纪制造千兆位以上超大规模集成电路的主要设备。软 X射线光刻及其应用研究是目前国际上非常活跃的高技术领域。把软 X射线光刻列为重要发展项目。本文摘要综述德国、美国、日本、俄罗斯等国近年来在软 X射线光刻关键单元技术及整机研究和发展方面的概况、预计下世纪初美国和日本将有软 X射线投影光刻机投入工艺生产线     

中科大成功研制国内首个256位分子存储器电路

中国科学院微电子所纳米加工与新器件集成技术实验室借助中科大国家同步辐射实验室二次X射线光刻工艺，近日成功研制出国内首个256位分子存储器电路。     

带支撑结构的大高宽比硬X射线波带片制作

对利用X射线光刻制作大高宽比硬X射线波带片的设计和制作工艺进行了研究.采用电子束光刻制作X射线光刻掩模,并利用X射线光刻制作最终的硬X射线波带片.采用对光刻胶结构加入支撑点的方法,大大提高了X射线光刻制作硬X射线波带片的高宽比.对所加入支撑点的布置策略进行了优化,使得支撑点所占的面积比例减小.所制作的波带片最外环宽度为200 nm,厚度为2.8μm,具有优良的结构质量,预期可用于10 keV到25 keV波段,并具有优于250 nm的成像分辨率.     

LIGA技术及其应用

简要介绍了近几年发展起来的一种能进行三维微细加工的新技术－－ＬＩＧＡ技术。它由Ｘ光深层光刻。微电铸和微塑铸组成，其特点是获得的微器件具有较大的深宽比，厚度可达几百微米，并且侧壁陡峭，表面平整，用此技术可加工由高分子材料，各种金属和陶瓷组成的微器件。     

用VXI技术组建自动测试系统

本文对ＶＸＩ总线系统作了简要说明，介绍了自动测试系统的结构、ＶＸＩ测试系统的控制模式选取以及测试语言和测试软件，同时说明了ＶＸＩ产品现状和ＶＸＩ测试的系统的特点。与传统的ＧＰ－ＩＢ技术相比，ＶＸＩ技术具有无可比拟的优势，因此在测试系统中采用ＶＸＩ技术是必然的技术趋势。     

同步辐射X射线光刻中热辐射引起掩模畸变的研究

在同步辐射X射线光刻中,由于掩模的初始张应力和掩膜的非均匀受热将使掩模产生热畸变。本文基于BEPC(北京正负电子对撞机)的运行参数和光刻机系统,建立了掩模受热畸变研究的二维动态模型,对同步辐射X射线光刻中热辐射引起的掩模畸变进行了研究。这种研究方法对其他同步辐射光源和等离子脉冲X射线作用下的掩模畸变研究都是普遍适用的。     

Effect of friction stir welding process parameters on Mg-AZ31B/Al-AA6061 joints

In the present study, dissimilar alloys such as Mg-AZ31B and Al-AA6061 were joined by friction stir welding using different rotational (560, 710, 860 and 1010?rpm) and transverse speeds (16 and 25?mm/min). Metallographic studies (by optical, scanning electron microscope, SEM, and energy dispersive spectrometer, EDS) revealed that the speed parameters mainly influenced the microstructure growth mechanism, which further affects the mechanical properties and corrosion behavior. The combined dynamic action of rotational to transverse speed recrystallized and plasticized the material and produced an alternative lamellar shear band of Al and Mg in the stir zone (SZ). Peak temperature and high rotational speed formed an oxide on the top region and also caused liquation and intermetallic (IMCs) formation. Tensile strength and hardness increased as per the Hall–Petch (fine grains) effect. Higher impact energy was found at moderate rotational and low transverse speeds due to the presence of more soft Al patches. Tensile fractographs showed a river-like pattern, which indicated the brittle nature of the joints. High rotational and high transverse speed illustrated higher tensile strength, while better corrosion resistance was observed in high rotational and low transverse speed.     

Fault diagnosis and refrigerant leak detection in vapour compression refrigeration systems

The environmental impact of refrigeration systems can be reduced by operation at higher efficiency and reduction of refrigerant leakage. Refrigerant loss contributes both directly and indirectly to global warming through inefficient system operation, increased power consumption and greenhouse gas emissions and higher maintenance costs. Existing sensor-based leak detection methods are limited by the inability to detect gradual leakage and the need for careful sensor location. There is a requirement for a real-time performance monitoring approach to leak detection and fault diagnosis which overcomes these disadvantages.This paper reports on the development of a fault diagnosis and refrigerant leak detection system based on artificial intelligence and real-time performance monitoring. The system has been used successfully to distinguish between faulty and fault free operation, steady-state and transient operation, leakage and over charge conditions. Work currently underway is aimed at testing additional fault conditions and establishing further rules to distinguish between these patterns.     

中国制冷空调行业制冷剂替代策略的思考

中国制冷空调行业淘汰HCFCs面临国际上的巨大压力和挑战。为此,从直接排放和间接排放2个方面对制冷剂应用对环境影响以及从制冷剂管理方面进行分析与阐述,提出制冷空调行业应负责任地使用制冷剂:提高制冷空调设备效率,降低制冷剂间接排放,减少制冷剂充注量,加强控制制冷剂泄漏,提高制冷剂回收、再生利用率来减少制冷剂的直接排放;应进行可燃制冷剂应用的基础研究和制定产品及应用安全标准,寻找对环境影响最小、经济可行、替代成本市场可接受、安全的替代制冷剂。同时建议行业协会配合国家有关部门制定适合中国国情的HFCs制冷剂的减排基准线和减排时间表。     

Innovation, change, and order: Reflections on science and technology in India, China, and the United States

A comparative analysis of science and technology policies in China, India, and the United States shows striking similarities and sharp contrasts. These differences reveal much about the current problems and likely prospects in each country. This review distills the contributions of 15 distinguished leaders in science and technology who assess national goals and international ambitions. The review covers five themes: education, defense and space, R&D performers, science and technology in the economy, and governmental policies and funding. Other issues include: economic freedom, global competitiveness, energy and the environment, and population and demographic trends. Brief historical highlights provide context for understanding past trends in the present socioeconomic setting.     

科学 技术 工程及科学家 工程师 企业家

论述了科学、技术、工程的性质与相互关系以及科学家、工程师、企业家的任务；为科学技术创新，发展经济，振兴国家，指出了应采取的对策。     

Dispersion and surface functionalization of oxide nanoparticles for transparent photocatalytic and UV-protecting coatings and sunscreens

Abstract

This review describes recent efforts on the synthesis, dispersion and surface functionalization of the three dominating oxide nanoparticles used for photocatalytic, UV-blocking and sunscreen applications: titania, zinc oxide, and ceria. The gas phase and liquid phase synthesis is described briefly and examples are given of how weakly aggregated photocatalytic or UV-absorbing oxide nanoparticles with different composition, morphology and size can be generated. The principles of deagglomeration are reviewed and the specific challenges for nanoparticles highlighted. The stabilization of oxide nanoparticles in both aqueous and non-aqueous media requires a good understanding of the magnitude of the interparticle forces and the surface chemistry of the materials. Quantitative estimates of the Hamaker constants in various media and measurements of the isoelectric points for the different oxide nanoparticles are presented together with an overview of different additives used to prepare stable dispersions. The structural and chemical requirements and the various routes to produce transparent photocatalytic and nanoparticle-based UV-protecting coatings, and UV-blocking sunscreens are described and discussed.     

A review of sustainability metrics for the construction and operation of airport and roadway infrastructure

Sustainability has become increasingly important, however, relatively little attention has focused on metrics for the construction and operation of airport and roadway infrastructure. Most attention has focused on buildings, with high profile BREEAM and LEED projects taking center stage. Sustainability is also important in airport and roadway infrastructure projects, which have significant public impact but have a much lower profile than vertical construction when it comes to sustainability. Sustainable infrastructure is important in China and India where new infrastructure is under construction to meet growing and developing economies, and in the US, where infrastructure is in substandard condition and requires reconstruction. The purpose of this paper is to provide an overview and discussion of sustainability rating systems for airport and roadway infrastructure, including both construction and operation. Specific projects that highlight both proven and innovative sustainable practices are included to illustrate the application of these concepts. Finally, the relationship between sustainable transportation infrastructure and resilient transportation infrastructure is addressed since resiliency is of growing interest and there is overlap between these concepts.     

Thermodynamic analysis of the V-type Stirling-cycle refrigerator

The thermodynamic analysis of a V-type Stirling-cycle refrigerator is performed. The Stirling-cycle refrigerator consists of expansion and compression spaces, cooler, heater and regenerator, and divided into 14 fixed control volumes subjected to a periodic mass flow. The conservation of mass and energy equation are written for each control volume. A computer program is prepared in FORTRAN, and the basic equations are solved iteratively. The mass, temperature and density of working fluid in each control volume are calculated for a given charge pressure, engine speed, and fixed heater and cooler surface temperatures, and the results are obtained from a PC. The heat transfer coefficients are assumed constant. The work, instantaneous pressure and COP of the Stirling-cycle refrigerator are also calculated. The steady cyclic conditions are obtained for temperature after few cycles and the results are given by diagrams.     

Studies on Properties and Structure of Electroless Plating Tin Coating

The composition and structure of electroless tin coating were analyzed by SEM and X-ray diffraction. In the meantime, porosity, solderability and extensibility were determined by physical and chemical methods. The results showed that the porosity of the tin coating increases with the rise of bath temperature and decreases as the plating time rises. Solderability is improved with the rise of thickness of tin coating, and decreases when the tin deposit is heated at 180 ～ 200 ℃. The crystalline grain size becomes bigger and bigger with increasing plating time or bath temperature or coating thickness. X-ray diffraction indicates that only Cu and β-Sn phases show up in the diffraction patterns. Tin coating has a strong joint force with copper substrate and excellent function of electrochemical protection as anode coating.     

Study of Microstructure and Properties of Non-Electric Welded Joints

Non-electric welding, which combines the advantages of traditional welding and Self-propagating Hightemperature Synthesis (SHS), is a newly developed technology because of its simple process and no energy supplement during welding. In this paper, two pieces of 45 steel sheets were welded by Non-electric welding, and the properties of joints were studied. The microstructure and mechanical properties were investigated by SEM, EDAX, hardness tester and tensile tester.The interfaces of the joints and matrix show excellent metallurgical bonding, and the elements of joints have diffused into substrate. Welded joints have high mechanical properties. The bonding strength can reach 348 MPa, and the impact toughness is 44 J/cm2. Non-electric welding technology also can weld non-ferrous, and this technology especially suited to be used at the emergent maintenance of field.