钼添加对CrN涂层抗氧化性能的影响

研究钼添加对CrN涂层微观结构和抗氧化性能的影响,采用反应磁控溅射法在硅片和高速钢片上制备不同Mo含量的Cr-Mo-N涂层,并在500~800 ℃的高温空气中退火1 h,用X射线衍射（XRD）、拉曼光谱和扫描电子显微镜（SEM）对涂层退火前后的微观形貌进行表征。沉积的CrN和Cr-Mo-N涂层均表现出基于CrN晶格的B1面心立方相（fcc）。Mo离子取代Cr-N晶格中的Cr离子,形成Cr-Mo-N固溶体。在600 ℃时,XRD和拉曼光谱表明,Mo含量较高的Cr-Mo-N涂层中形成MoO₃相,表面较粗糙,含氧量较高。在700 ℃时,CrN涂层由于内应力的作用,其横截面形貌为疏松的柱状晶,并有一定的多孔区,而Cr-Mo-N涂层则为致密的柱状晶结构。低Mo含量（<17at%）的Cr-Mo-N涂层比CrN涂层具有更好的抗氧化性。     

Deposition and characterization of CrN/Si3N4 and CrAlN/Si3N4 nanocomposite coatings prepared using reactive DC unbalanced magnetron sputtering

Nanocomposite coatings of CrN/Si₃N₄ and CrAlN/Si₃N₄ with varying silicon contents were synthesized using a reactive direct current (DC) unbalanced magnetron sputtering system. The Cr and CrAl targets were sputtered using a DC power supply and the Si target was sputtered using an asymmetric bipolar-pulsed DC power supply, in Ar + N₂ plasma. The coatings were approximately 1.5 μm thick and were characterized using X-ray diffraction (XRD), nanoindentation, X-ray photoelectron spectroscopy and atomic force microscopy. Both the CrN/Si₃N₄ and CrAlN/Si₃N₄ nanocomposite coatings exhibited cubic B1 NaCl structure in the XRD data, at low silicon contents (< 9 at.%). A maximum hardness and elastic modulus of 29 and 305 GPa, respectively were obtained from the nanoindentation data for CrN/Si₃N₄ nanocomposite coatings, at a silicon content of 7.5 at.%. (cf., 24 and 285 GPa, respectively for CrN). The hardness and elastic modulus decreased significantly with further increase in silicon content. CrAlN/Si₃N₄ nanocomposite coatings exhibited a hardness and elastic modulus of 32 and 305 GPa, respectively at a silicon content of 7.5 at.% (cf., 31 and 298 GPa, respectively for CrAlN). The thermal stability of the coatings was studied by heating the coatings in air for 30 min in the temperature range of 400-900 °C. The microstructural changes as a result of heating were studied using micro-Raman spectroscopy. The Raman data of the heat-treated coatings in air indicated that CrN/Si₃N₄ and CrAlN/Si₃N₄ nanocomposite coatings, with a silicon content of approximately 7.5 at.% were thermally stable up to 700 and 900 °C, respectively.     

Mechanical and tribological properties of multilayered TiSiN/CrN coatings synthesized by a cathodic arc deposition process

The monolayered TiSiN and multilayered TiSiN/CrN were synthesized by cathodic arc evaporation. The Ti/Si (80/20 at.%) and chromium targets were used as the cathodic materials. With the different I_[TiSi]/I_[Cr] cathode current ratios of 1.8, 1.0, and 0.55, the multilayered TiSiN/CrN coatings possessed different multilayer periods (Λ) of 8.3 nm, 6.2 nm, and 4.2 nm. From XRD and TEM analyses, both the monolayered TiSiN and multilayered TiSiN/CrN revealed a typical columnar structure and B1-NaCl crystalline, no peaks of crystalline Si₃N₄ were detected. Among the multilayered TiSiN/CrN coatings, the multilayered coating with Λ = 8.3 nm possessed higher hardness of 37 ± 2 GPa, higher elastic modulus of 396 ± 20 GPa and the lower residual stress of − 1.60 GPa than the monolayered (Ti_0.39Si_0.07)N_0.54 coating(− 7.25 GPa). Due to the higher Cr/(Ti +Cr + Si) atomic ratio, the multilayered TiSiN/CrN with Λ = 5.5 nm possessed the lowest friction coefficient. But the lowest of wear rate was obtained by the multilayered TiSiN/CrN with Λ = 8.3 nm, because of higher H³/E^?2 ratio of 0.323 GPa. The monolayered TiSiN possessed the highest wear rate of 2.87 μm²/min. Therefore, the mechanical and tribological property can be improved by the design of multilayered coating.     

Structural and mechanical properties of AlTiN/CrN coatings synthesized by a cathodic-arc deposition process

Monolayered AlTiN and Multilayered AlTiN/CrN coatings were synthesized by a cathodic-arc deposition process, using TiAl (with 50/50 and 33/67 at.%) and Cr elemental cathodes. The atomic ratio of Al/(Ti + Al) in the AlTiN coatings was reduced to 0.44 and 0.61, respectively, compared with the corresponding Ti₅₀Al₅₀ and Ti₃₃Al₆₇ cathode materials. The multilayered AlTiN/CrN films showed smaller crystallite size, larger lattice strain, higher hardness, higher residual stress, and better adhesion strength as well than the monolayered AlTi films. The multilayered Al_0.35Ti_0.22N_0.43/CrN coating exhibited the highest hardness of about 38 GPa and the highest H³/E*² ratio value of 0.188 GPa, indicating the best resistance to plastic deformation, among all the coatings studied.     

Thermal stability behaviors of Cr(N,O)/CrN double-layered coatings by TGA/DTA analysis

In this study, Cr(N,O)/CrN double-layered coatings were synthesized using the cathodic arc deposition (CAD) process. CrN film was first deposited onto a substrate as an interlayer to ensure better adhesion, and Cr(N,O) film was subsequently deposited on top of the CrN layer as the surface layer. Variation in the Cr(N,O) coating composition was achieved through changing the O₂/N₂ flow ratio during the last stage of processing. Phase structure, chemical composition, and morphology of the resulting coatings were analyzed and observed using the X-ray diffractometer, Auger electron spectrometer and SEM. In addition, oxidation behavior of the coatings was investigated using TGA/DTA methods. The tests were carried out by increasing temperature up to 1000 °C in ambient air. With the introduction of oxygen gas during the CAD process, a superficial layer was produced in the Cr(N,O) constituent containing CrN and Cr₂O₃ phases. The formation of the oxide phase attributed to the reaction of chromium and oxygen was more favorable than that of chromium and nitrogen. The results also showed that Cr(N,O)/CrN double-layered coatings exhibited superior oxidation resistance at elevated temperature than that of CrN single-layer coated specimen (870 °C vs. 750 °C).     

Elastic properties of Ni and Ni + Mo coatings electrodeposited on stainless steel substrate

Adhesion coefficient and Young's modulus of Ni and Ni + Mo coatings electrochemically deposited on stainless steel were examined by applying vibrating reed technique. It was shown that adhesion coefficient of the Ni coating slightly decreases (about 8%) with increasing layer thickness (5-40 μm). Young's modulus E_f of these coatings at room temperature was found to be about 130 GPa. The relative adhesion coefficient of the Ni layer decreases with increasing temperature (300-600 K) in relation to the thinnest examined layer (5 μm). Young's modulus of the Ni + Mo coatings decreases with increasing Mo content; for 9 wt.% of Mo E_f = 40 GPa and for 32 wt.% of Mo E_f = 23 GPa.     

Synthesis and structural properties of Mo-Se-C sputtered coatings

Transition metal dichalcogenides have attracted considerable attention due to their self-lubricant properties. Their drawbacks, such us low load-bearing capacity or environmental sensitivity, have been partially overcome by alloying or doping with metals, carbon, or nitrides. Nevertheless, there is still a considerable potential for further improvement, since the majority of studies has been aimed at MoS₂ and WS₂ based coatings and the properties of diselenides remain almost unknown.Mo-Se-C coatings were prepared by non-reactive r.f. magnetron sputtering from carbon target with embedded MoSe₂ pellets. The carbon content and Se/Mo ratio determined by electron probe microanalysis increased from 29 to 68 at.% and from 1.7 to 2.0, respectively, as a function of the decreasing number of pellets. The coating structure analyzed by X-ray diffraction, Raman spectroscopy and X-ray photoelectron spectroscopy showed that Mo-Se-C was a mixture of amorphous carbon and Mo-Se phases, since no traces of molybdenum carbides were observed. Linear increase of the hardness from 0.7 (29 at.% C) to 4.1 GPa (68 at.% C) showed a significant improvement compared to values typical for pure MoSe₂ coating.     

A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings

Approximately 1.5 μm thick CrN and CrAlN coatings were deposited on silicon and mild steel substrates by reactive direct current (DC) magnetron sputtering. The structural and mechanical properties of the coatings were characterized using X-ray diffraction (XRD) and nanoindentation techniques, respectively. The bonding structure of the coatings was characterized by X-ray photoelectron spectroscopy (XPS). The surface morphology of the coatings was studied using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The XRD data showed that the CrN and CrAlN coatings exhibited B1 NaCl structure. Nanoindentation measurements showed that as-deposited CrN and CrAlN coatings exhibited a hardness of 18 and 33 GPa, respectively. Results of the surface analysis of the as-deposited coatings using SEM and AFM showed a more compact and dense microstructure for CrAlN coatings. The thermal stability of the coatings was studied by heating the coatings in air from 400 to 900 °C. The structural changes as a result of heating were studied using micro-Raman spectroscopy. The Raman data revealed that CrN coatings got oxidized at 600 °C, whereas in the case of CrAlN coatings, no detectable oxides were formed even at 800 °C. After annealing up to 700 °C, the CrN coatings displayed a hardness of only about 7.5 GPa as compared to CrAlN coatings, which exhibited hardness as high as 22.5 GPa. The potentiodynamic polarization measurements in 3.5% NaCl solution indicated that the CrAlN coatings exhibited superior corrosion resistance as compared to CrN coatings.     

Cr基及其化合物过渡层对TiCN涂层性能的影响

为研究过渡层材料及结构对TiCN涂层性能的影响,设计3种Cr基及其化合物过渡层,利用多弧离子镀技术制备TiCN涂层。膜系分别为Cr/TiCN、Cr/CrN/TiCN和Cr/CrN/CrCN/TiCN。利用SEM、XRD、纳米压痕仪、划痕仪、摩擦磨损试验机和球磨仪对涂层的微观结构和性能进行表征。结果表明:随着过渡层由单层Cr依次加入CrN和CrCN,涂层原有的柱状晶生长被抑制并最终消除。与具有Ti过渡层的TiCN相比,涂层不再具有明显择优取向,(111)峰强度大大减弱而(200)峰发生宽化。具有CrN和CrCN过渡层的样品硬度和附着力明显高于以单层Cr为过渡层的样品,Cr/CrN/CrCN/TiCN膜系硬度和附着力最高,分别为(30.11±0.34)GPa和(37.21±0.46)N。摩擦磨损试验结果表明:CrCN过渡层的引入显著提升了涂层耐磨性,其对应样品摩擦因数最低,达到0.111,并在球磨测试中表现稳定,而其它膜系均出现不同程度的磨损形貌。     

Effects of nitrogen pressure and pulse bias voltage on the properties of Cr-N coatings deposited by arc ion plating

Cr-N coatings were deposited on 1Cr18Ni9Ti stainless steel in the pure N₂ atmosphere by arc ion plating (AIP). The relationships between deposition parameters and coating properties were investigated. X-ray diffraction showed a phase transformation from CrN + Cr₂N + Cr → CrN + Cr → CrN and the CrN preferred orientation changed from (200) to (220) as N₂ pressure increased. Increasing bias voltage led to CrN preferred orientation changed from (200) to (220) and the formation of Cr₂N. XPS results indicated that chemical composition of the coatings changed as N₂ pressure increased but it changed little with bias voltage. The lower melting point of chromium nitride formed on target surface induced the increase of macroparticles and deposition rate with increasing N₂ pressure; and bias voltage had an obvious effect on reducing macroparticles of the Cr-N coatings. Residual stresses were measured by substrate curvature technique, and the changing tendency coincided with the microhardness of the coatings.     

CrN/CrAlSiN涂层海水环境下的摩擦学性能

为提高海洋装备摩擦零部件的摩擦学性能,采用多弧离子镀技术在316L不锈钢上制备了CrN/CrAlSiN涂层。通过XRD、XPS表征涂层的物相及成分,SEM和TEM表征涂层的形貌和微观结构,并用纳米压痕仪测试其硬度,采用摩擦磨损试验机对涂层在大气和海水环境中的摩擦磨损性能进行测试。结果表明:CrN/CrAlSiN涂层的微观结构主要有CrN相、AlN相以及非晶态Si_3N_4包裹CrN、AlN相,(111)择优取向最为明显;基于微观结构与CrN过渡层的设计,CrAlSiN涂层硬度高达35.5 GPa;较之于316L基底,涂层致密的结构使其在海水环境下表现出更好的耐腐蚀性能;在大气和海水环境下,CrN/CrAlSiN涂层的摩擦因数及磨损率均明显降低,在海水环境下达到最优。     

Nanomechanical properties of novel intermetallic coatings developed on austenitic stainless steels by siliconisation in liquid phase

Advanced nanomechanical testing has been used to evaluate mechanical properties of Ni-free Al₁₂(Fe,Cr)₃Si₂ intermetallic coatings grown on the 316 LVM steel by hot dipping in a Al-12.6 at.% Si liquid alloy for various immersion times. Despite the ultrafine-grained structure of the coating (～200 nm), the indentation size effect is more pronounced for the intermetallic coating than for the steel, which is explained by the higher geometrical necessary dislocation (GND) density of the intermetallic coating. To determine the true hardness of the coatings, the model of Nix and Gao was used. It has been shown that the hardness of the coating decreases from 6.2 GPa for the shortest time of immersion (60 s), to 3.36 GPa for the highest immersion time (600 s), which is always much higher than that for the substrate (1.82 GPa). The decrease in both hardness and GND with increasing immersion time is related to the relaxation of residual stresses, which act as a hardening factor. The net effect is an increase of the plasticity index of the coating. Young’s modulus for the intermetallic phase (146 GPa) is lower than that for the austenitic steel 316 LVM (220 GPa), which will favour the load transfer at the bone/metal interface, weakening the so-called “stress shielding effect”. Hence, the nanomechanical properties of this novel Ni-free intermetallic coating, tightly adhered to the substrate, offer a window of opportunity for orthopaedic applications.     

Microstructure and mechanical properties of CrN coating deposited by arc ion plating on Ti6Al4V substrate

CrN coatings have been grown by arc ion plating (AIP) onto Ti6Al4V alloy substrate at various nitrogen pressures (PN₂). The goals of this investigation are to study the influence of nitrogen pressure content on the composition, structure and mechanical properties of AIP CrN coatings, as well as their tribological properties. With an increase of PN₂, the main phases in the coatings changed from CrN + Cr₂N + Cr to CrN, and the texture of CrN was transformed from CrN (111)-oriented to (220)-oriented. Furthermore, the multi-layers including a metal Cr layer, a Cr₂N layer and a CrN layer were observed by cross-sectional TEM (XTEM), besides an “unbalanced” state transition layer at the interface of CrN/substrate which was analyzed by nucleation thermodynamics subsequently. An increase in nitrogen pressure also resulted in a change of micro-hardness due to the variation in composition and structure. Finally, the tribological properties of the Ti6Al4V substrate and the CrN/Ti6Al4V coating system have also been explored, which shows that CrN coatings can act as good wear resistance layer for Ti6Al4V substrate.     

High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering

As a variation of high power pulsed magnetron sputtering technique, modulated pulse power (MPP) magnetron sputtering can achieve a high deposition rate while at the same time achieving a high degree of ionization of the sputtered material with low ion energies. These advantages of the MPP technique can be utilized to obtain dense coatings with a small incorporation of the residual stress and defect density for the thick coating growth. In this study, the MPP technique has been utilized to reactively deposit thick Cr₂N and CrN coatings (up to 55 μm) on AISI 440C steel and cemented carbide substrates in a closed field unbalanced magnetron sputtering system. High deposition rates of 15 and 10 μm per hour have been measured for the Cr₂N and CrN coating depositions, respectively, using a 3 kW average target power (16.7 W/cm² average target power density), a 50 mm substrate to target distance and an Ar/N₂ gas flow ratio of 3:1 and 1:1. The CrN coatings showed a denser microstructure than the Cr₂N coatings, whereas the Cr₂N coatings exhibited a smaller grain size and surface roughness than those of the CrN coatings for the same coating thickness. The compressive residual stresses in the CrN and Cr₂N coatings increased as the coating thickness increased to 30 μm and 20 μm, respectively, but for thicker coatings, the stress gradually decreased as the coating thickness increased. The CrN coatings exhibited an increase in the scratch test critical load as the thickness was increased. Both CrN and Cr₂N coatings showed a decrease in the hardness and an increase in the sliding coefficient of friction as the coating thickness increased from 2.5 to 55 μm. However, the wear rate of the CrN coatings decreased significantly as the coating thickness was increased to 10 μm or higher. The 10-55 μm CrN coating exhibited low wear rates in the range of 3.5-5 × 10⁻⁷ mm³ N⁻¹ m⁻¹. To the contrary, the Cr₂N coating exhibited relatively low wear resistance in that high wear rates in the range of 3.5 to 7.5 × 10⁻⁶ mm³ N⁻¹ m⁻¹ were observed for different thicknesses.     

Comparison in mechanical and tribological properties of Cr-W-N and Cr-Mo-N multilayer films deposited by DC reactive magnetron sputtering

Cr-W-N and Cr-Mo-N films were deposited on high speed steel substrate by unbalanced DC reactive magnetron sputtering. Cross-sectional scanning electron microscopy (SEM) morphologies of the films confirmed that the bilayer thickness of multilayer became thinner, and then structural transformation occurred from multilayer to composite with increasing the rotation velocity of substrate holder. X-ray diffraction (XRD) patterns indicated that the Cr-W-N films were composed of CrN and W₂N crystalline phases, and the Cr-Mo-N films consisted of crystalline CrN and amorphous/nanocrystalline Mo₂N. Mechanical and tribological properties were investigated by using a nanoindentor and a ball-on-disk tribometer, respectively. The Cr-W-N films exhibited excellent mechanical properties and wear resistance, while Cr-Mo-N films showed lower friction coefficient. Optimal mechanical and tribological properties were obtained in the Cr-W-N multilayer film with a bilayer period of 12 nm.     

TC4钛合金表面涂层改性:CrN素多层

目的 提高TC4钛合金的硬度和耐磨损性,改善CrN硬质涂层与TC4钛合金的适应性.方法 采用等离子体增强磁控溅射系统,通过调节热丝放电电流,在TC4钛合金基体表面沉积疏密CrN单层和素多层涂层.利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、能谱仪(EDS)、纳米压痕仪、洛氏压痕仪、摩擦磨损仪以及台阶仪,表征涂层形貌、成分、物相及性能.采用动电位极化法表征涂层的耐腐蚀性.结果 当热丝放电电流为较低的4 A×4时,沉积的CrN单层涂层为具有针孔、孔洞等缺陷的疏松结构,8 A×4沉积的CrN单层涂层具有致密结构,周期性调节热丝放电电流则获得疏密交替的CrN素多层涂层.CrN涂层均由单一面心立方结构的CrN相组成,疏松CrN单层涂层的衍射晶面为(111)、(200)、(220)及(222),致密CrN单层涂层沿(111)晶面择优生长,随着疏密子层调制比的增大,CrN素多层涂层的(111)衍射峰不断增强.疏松CrN单层涂层的最小H和最大E分别为13.0 GPa和207.5 GPa,调制比为1:4的疏密CrN素多层涂层的最小H和最大E分别为17.0 GPa和257.4 GP.在1470 N载荷下洛式压痕法表明,致密CrN单层涂层的结合强度最低,等级为HF5,其余涂层均为HF1—HF4.CrN涂层的自腐蚀电位较TC4钛合金均发生了正移.结论 CrN硬质涂层可以有效提高TC4钛合金的硬度和耐磨损性,表面得到明显强化.周期性调节等离子体密度所沉积的疏密CrN素多层涂层与单层相比,涂层性能明显改善.     

Nanolayer CrNx/WNy coatings used on micro drills for machining of printed circuit boards

A series of CrNx/WNy nanolayer coatings were synthesized using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS?), employing one W target and three Cr targets. For comparison, a monolayer CrN coating was also grown on the same deposition system. Characterization was conducted using EDX, SEM, TEM, AFM, XRD, nanohardness indentation tester, and scratch tester. Performance of cutting tools with the nanolayer coatings was carried out via machining tests using the coated micro drills to continuously make through-thickness holes on printed circuit boards. The results showed that nanolayer CrNx/WNy coatings with various modulation period (λ) could be obtained on an industrial-size deposition machine by means of control in the current applied to the W target. Of the studied nanolayer CrNx/WNy coatings, the one with λ = 27 nm showed the highest nanohardness and best micro drilling performance. This nanolayer coating showed significant improvements in cutting performance as compared with the referred monolayer CrN coating.     

Tribological behavior of CrN/WN multilayer coatings grown by ion-beam assisted deposition

CrN monolayer coating and CrN/WN multilayer coatings were deposited on the silicon (100) substrate by ion-beam assisted deposition process. The bilayer period of these coatings was controlled at 8 nm and 30 nm. The cross-sectional morphology of nanoscaled multilayer coatings was characterized by scanning electron microscopy and transmission electron microscopy. The wear resistance of CrN/WN multilayer coatings and CrN monolayer coating was investigated using a pin-on-disc tribometer. The surface roughness (Ra) of the coatings was evaluated by atomic force microscopy, and that of CrN and WN monolayer coating was 6.7 and 5.9 nm, respectively. The employment of multilayer configuration in CrN/WN coating with bilayer period of 8 nm and 30 nm effectively reduced the surface roughness down to 1.9 and 2.2 nm, respectively. The friction coefficient of CrN monolayer coating and CrN/WN multilayer film with a bilayer period of 30 nm was 0.63 and 0.31, respectively. Owing to the high hardness/elastic modulus ratio, as well as the dense structure and the smooth surface roughness, the CrN/WN multilayer coatings exhibited better wear resistance in the consideration of friction coefficient and the worn surface morphology.     

Structure and properties of selected (Cr–Al–N,TiC–C,Cr–B–N) nanostructured tribological coatings

The paper will present the state-of-art in the process, structure and properties of nanostructured multifunctional tribological coatings used in different industrial applications that require high hardness, toughness, wear resistance and thermal stability. The optimization of these coating systems by means of tailoring the structure (graded, superlattice and nanocomposite systems), composition optimization, and energetic ion bombardment from substrate bias voltage control to provide improved mechanical and tribological properties will be assessed for a range of coating systems, including nanocrystalline graded Cr_1−xAl_xN coatings, superlattice CrN/AlN coatings and nanocomposite Cr–B–N and TiC/a-C coatings. The results showed that the superlattice CrN/AlN coating exhibited a super hardness of 45 GPa when the bilayer period Λ was about 3.0 nm. Improved toughness and wear resistance have been achieved in the CrN/AlN multilayer and graded CrAlN coatings as compared to the homogeneous CrAlN coating. For the TiC/a-C coatings, increasing the substrate bias increased the hardness of TiC/a-C coatings up to 34 GPa (at −150 V) but also led to a decrease in the coating toughness and wear resistance. The TiC/a-C coating deposited at a −50 V bias voltage exhibited an optimized high hardness of 28 GPa, a low coefficient of friction of 0.19 and a wear rate of 2.37 × 10⁻⁷ mm³ N⁻¹ m⁻¹. The Cr–B–N coating system consists of nanocrystalline CrB₂ embedded in an amorphous BN phase when the N content is low. With an increase in the N content, a decrease in the CrB₂ phase and an increase in the amorphous BN phase were identified. The resulting structure changes led to both decreases in the hardness and wear resistance of Cr–B–N coatings.     

(Ti,Cr,Nb)CN coatings deposited on nitrided high-speed steel by cathodic arc method

The combined processes of plasma nitriding and cathodic arc deposition of (Ti,Cr,Nb)CN coatings were applied to HSS substrates. The nitrided layers, obtained in a mixture of H₂ (70%) and N₂ (30%) at two different temperatures (480 °C and 510 °C), were examined for the microhardness depth profiles. Characterization of the duplex coatings was performed by investigating elemental and phase composition, texture, hardness, friction and wear. XRD and XPS analyses revealed the formation of a mixture of a carbonitride fcc solid solution, in a dominant proportion, and metallic chromium. The film hardness was measured to be ~ 34 GPa. The duplex (Ti,Cr,Nb)CN coatings exhibited superior tribological behavior as compared to both nitrided layers and non-duplex coatings.