新型双方向压电俘能装置设计与实验研究

研究了一种新型的双方向压电俘能器,简化拾振器结构,利于压电俘能装置的产品化.采用矩形压电晶片和悬臂梁结构对双方向压电俘能器结构进行设计;研究了附加质量对压电俘能器发电性能的影响.通过实验方法测试了新型的双方向压电俘能器在不同环境激励下的发电性能,结果表明:压电振子的固有频率与自由端附加质量成反比,在进行主副压电振子附加质量选取时,根据外界环境激励的频率范围,选取最容易激发压电振子共振的附加质量,使得主压电振子与副压电振子分别与激励频率产生共振,实现产生电能最大化.     

基于BP神经网络的矩形压电振子振动模态区分*

采用BP神经网络,把矩形压电振子的各阶振型位移输入到神经网络中进行训练,提取各阶模态的振型特征,可实现矩形压电振子的共振振幅分布和振动模态阶次的非线性映射,以此区分各个模态。仿真实验结果显示,建立的神经网络模型可以从ANSYS输出的各模态中准确识别出矩形压电振子的B(3,1)模态,对训练样本外的尺寸也有一定的识别效果,表明所建立的BP神经网络可以有效地用于该矩形压电振子的振动模态区分。     

一种新型石英振子传感器的机理

<正> 我们知道,1962年C. R. Mingins等人研究了作用在石英振子的力、角度和频率的关系,成功地解决了运动装置中晶振频标不受加速度影响的问题。反之,也提供了以石英振子作为力传感器的依据。不久,各式各样的石英振子力传感器相继出现,从而开始了这一新的应用。它的主要     

新型气味传感器

<正> 日本东京工业大学研制出一种新型气味传感器,这种传感器是利用能模拟人类嗅觉细胞的合成脂质膜覆盖在石英晶体振子上     

陀螺稳定平台的有限元模态分析

陀螺稳定平台是制导武器的核心部件之一,平台结构性能好坏直接影响制导武器的工作精度和可靠性.应用有限元模态分析理论,对该平台的结构动态特性进行研究,目的是为对平台进行结构动力学修改和结构优化设计提供依据,以便提高平台的工作精度和可靠性.运用uG建立某陀螺稳定平台的三维实体模型,进行合理简化后,建立该平台的有限元模型.采用有限元数值计算方法,计算得到该平台前七阶模态的频率及振型,各阶模态的频率均满足要求.并提出了改善该平台结构动态性能的措施.     

一种鲁棒性的结构未知表格分析方法

模型未知表格的分析是表格识别中文本分析阶段的一个重要且具有挑战性的问题.目前的一般方法仅能容忍表格线的微小断线.文章提出一种基于抽取表格线的分析结构未知表格的策略.利用抽取的表格线的特征知识和局部约束可以选择一些有效边.在扫描水平和垂直表格线时,如果环绕边都有效,则产生一个矩形块,引入迭代可以更好地利用全局信息并使抽取结果满足约束关系.这种矩形块的抽取可以容忍表格线大的断线或不合适的分割,可以处理诸如嵌入矩形块的复杂结构.矩形块被抽取后,表格的其他部件可以通过搜索剩余的部分来抽取.表格测试实验证明,该方法     

基于有限元分析QCM电极尺寸的优化设计

提出了一种优化石英晶体微天平(Quartz Crystal Microbalance,简称QCM)结构、抑制寄生振动模的设计方法.用Ansys9.0有限元软件直接对QCM进行三维有限元分析,从而避免了一般解析和半解析中对控制方程的简化.首先通过对QCM谐振频率收敛性的分析,验证了有限元计算的正确性;然后分析了不同电极尺寸对QCM振动及能陷情况的影响,并找到了较佳的电极尺寸;最后针对不同电极尺寸的QCM进行了液体测量实验,实验结果验证了基于有限元分析QCM电极尺寸设计方法的有效性.     

不同检测电容结构对MEMS电容传感器性能的影响分析

改进传感器检测电容几何结构能有效改善传感器的性能。本文对梳齿电极结构、栅形电极结构及梳栅电极结构检测电容的性能特点进行分析比较,重点分析了振子质量、空气阻尼、系统阻尼系数比以及灵敏度等特性,得出在相同的外轮廓尺寸、支撑梁、振子厚度以及振子到衬底的距离的条件下,栅形结构传感器的振子质量最大,空气阻尼最小,适合制作高分辨率的传感器;在大气下,梳齿结构灵敏度增加的同时空气阻尼力也会增加,且振子质量较小,适合制作高灵敏度,低分辨率传感器结构;梳栅结构的特点居于两者之间,适合制作需要兼顾分辨率和灵敏度的传感器。通过实例计算,证明了该结果。     

一种改进的二值图像矩形划分编码

矩形划分编码根据两点能够确定一个矩形的原理,把二值图像划分为矩形区域从而达到压缩图像数据的目的.由于图像边缘区域黑白像素混杂,导致图像划分时会标识出许多长而狭窄的矩形,这样得到的压缩效果并不理想,压缩比不高.针对这一局限进行了改进,提出了矩形窗口搜索算法,对图像中黑白像素区域都进行矩形窗口滑动搜索划分,以获取数量较少的能够覆盖像素区域的矩形.实验证明,改进的算法在划分矩形时能极大地减少矩形数目,提高压缩效率.     

基于ANSYS的压电圆片振子径向振动模式分析

压电陶瓷问世不过几十年,然而发展非常迅速,压电陶瓷振子的应用日趋广泛.为了更深入研究压电振子的特性,在ANSYS的软件平台上,对压电圆陶瓷片振子进行建模仿真;利用有限元分析方法,得到压电圆陶瓷片的多阶振动模式.再根据谐振理论,对其输入导纳-频率关系进行分析.结合模态分析结果文件进行筛选,得到了压电陶瓷圆片径向振动频率,最后通过理论分析和实验测试,验证了仿真值比理论值更接近测试值.相对传统的振动模式分析方法,此方法更为简单、准确、直观.     

Reducing Anchor Loss in MEMS Resonators Using Mesa Isolation

In microelectromechanical systems resonators, dissipation of energy through anchor points into the substrate adds to resonator energy loss, contributing to low values of $Q$. A design for improving $Q$ based on the reflection of anchor-generated surface acoustic waves is presented here. In this design, the resonator is surrounded by a trench, or a mesa, that partially reflects the wave energy back to the resonator. Depending on the distance from the resonator to the mesa, the reflected wave interferes either constructively or destructively with the resonator, increasing or decreasing $Q$. The proposed design is experimentally tested using a dome-shaped flexural mode resonator for a range of distances of the mesa from the resonator. Improvements in $Q$ of up to 400% are observed. The resonator/mesa system is modeled using a commercially available finite-element code. Experiments and simulations compare well, suggesting that a finite-element-method analysis can be used in the preliminary design of mesas for the optimization of $Q$. The concept of using mesas to improve $Q$ is simulated for both flexural and in-plane modes of vibration.$hfill$[2008-0149]      

台面结构硅基法珀型光纤MEMS压力传感器的研究

提出了一种新的光纤压力传感器的设计,该传感器敏感膜采用了台面结构而非传统的平面结构.用法布里-珀罗(Fabry-Perot)干涉理论阐述了传感器的工作原理,提出了敏感膜的力学模型.基于Fabry-Perot干涉理论推导出光纤MEMS压力传感器中台面敏感膜受到的压力与干涉光强的关系表达式,通过ANSYS有限元软件分析了台面膜型的力学性能,结果表明台面敏感膜在平行度上优于平面膜.通过数值模拟分析了传感器的关键参数对其性能的影响,为光纤MEMS压力传感器的加工和制作提供了理论依据.     

Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications

This paper presents the design and development of a silicon-based three-axial force sensor to be used in a flexible smart interface for biomechanical measurements. Normal and shear forces are detected by combining responses from four piezoresistors obtained by ion implantation in a high aspect-ratio cross-shape flexible element equipped with a 525 μm high silicon mesa. The mesa is obtained by a subtractive dry etching process of the whole handle layer of an SOI wafer. Piezoresistor size ranges between 6 and 10 μm in width, and between 30 and 50 μm in length. The sensor configuration follows a hybrid integration approach for interconnection and for future electronic circuitry system integration. The sensor ability to measure both normal and shear forces with high linearity (99%) and low hysteresis is demonstrated by means of tests performed by applying forces from 0 to 2 N. In this paper the packaging design is also presented and materials for flexible sensor array preliminary assembly are described.     

Automatic ECG wave extraction in long-term recordings using Gaussian mesa function models and nonlinear probability estimators

This paper describes the automatic extraction of the P, Q, R, S and T waves of electrocardiographic recordings (ECGs), through the combined use of a new machine-learning algorithm termed generalized orthogonal forward regression (GOFR) and of a specific parameterized function termed Gaussian mesa function (GMF). GOFR breaks up the heartbeat signal into Gaussian mesa functions, in such a way that each wave is modeled by a single GMF; the model thus generated is easily interpretable by the physician. GOFR is an essential ingredient in a global procedure that locates the R wave after some simple pre-processing, extracts the characteristic shape of each heart beat, assigns P, Q, R, S and T labels through automatic classification, discriminates normal beats (NB) from abnormal beats (AB), and extracts features for diagnosis. The efficiency of the detection of the QRS complex, and of the discrimination of NB from AB, is assessed on the MIT and AHA databases; the labeling of the P and T wave is validated on the QTDB database.     

Micromachining of (hhl) silicon structures: experiments and 3D simulation of etched shapes

The micromachining of various (hhl) silicon plates in a 35% KOH-water etchant is studied. Experimental shapes for membranes and mesa etched with initially circular masks are discussed. Theoretical 3D etched shapes for such microstructures are derived from a numerical simulation based on the tensorial model for the anisotropic wet etching. Experimental and theoretical shapes show a fair agreement, indicating a satisfactory adjustment of the dissolution slowness surface related to the etching of silicon in KOH etchant. The interest of the 3D simulation for designing mask patterns is outlined.     

High-efficiency nanowire light-emitting diodes for augmented reality and virtual reality displays

Through 3D dipole cloud model, RGB (red, green, and blue) nanowire light-emitting diode (LED) structures are geometrically optimized to exhibit a narrower radiation pattern, weaker angular color shift, and higher optical efficiency. In comparison with micro-LEDs whose external quantum efficiency is dependent on the mesa size, these RGB nanowire LEDs are more efficient than micro-LEDs when the chip size is below 20, 80, and 10 μm, respectively. As a result, nanowire LED is a promising candidate for augmented reality and virtual reality displays where high-resolution density and efficient directional light emission are desired.     

MEMS制造中精确测量薄膜厚度的方法研究与比较

精确测量各种功能薄膜的厚度在微机电系统（ MEMS）制造加工过程中有非常重要的意义。利用接触式表面轮廓仪、光谱椭偏仪、电感测微仪、扫描电镜、原子力显微镜和工具显微镜分别测量了10 nm～100μm各种薄膜的厚度。比较了不同测量仪器的测量范围、分辨率和对样品的适用性,分析了薄膜厚度测量过程中误差产生的机理。实验结果表明：当存在膜层台阶时,10 nm～100μm的膜厚测量均可采用接触式表面轮廓仪,对于硬度较高的膜层可采用电感测微仪,对于厚度小于0.5μm的膜层可采用原子力显微镜;对于可观察样品侧面、厚度大于0.7μm的膜层可采用扫描电镜,工具显微镜适用于μm级膜层,对于厚度大于20μm的膜层不宜采用光谱椭偏仪。     

基于遥感与GIS的北京市土地利用动态演化模式研究

将土地利用动态变化模型与景观生态学景观格局模型相结合，在1988－2000年北京市遥感数据的基础上，分析了北京市土地利用动态变化模式。研究表明，地形条件对北京市土地利用类型的形成及土寺利用动态变化具有重要影响。在平原地区，农田、城乡居民点及独立工矿用地居于主导地位，土地利用动态变化主要表现为城乡居民点扩展占用耕地及生态退耕。在台地、丘陵和山地地区，林地、草地等自然景观居于主导地位，土地利用动态变化主要表现为生态退耕。北京市土寺利用格局的动态变化表现了城市化、工业化高速发展与退耕还林等生态建设政策实施对土地利用空间格局产生的影响。自然景观增加，景观多样性半加。在自然景观中，林地面积增加，破碎度减小，斑块边界趋于平滑；草地面积减少，趋于破碎。在人文景观中，城镇、农村居民点斑块增大，趋于紧凑，有利于用地节约。农田受到城镇农村居民点扩展及退耕还林政策的双重影响，面积大量减少，破碎度增加。     

Identifying multiuser activity with overlapping acoustic data for mobile decision making in smart home environments

Smart services, one of the most intriguing areas of current Internet of Things(IoT) research, require improvement in terms of recognizing user activities. Sound is a useful medium for making decisions based on activity recognition in the smart home environment, which includes mobile devices such as sensors and actuators. Instead of visual sensors to recognize human activity, acoustic sensor data is acquired in an unobtrusive manner for greater privacy. However, multiuser activity provides a formidable challenge for acoustic data-based activity recognition systems because of the difficulty of identifying multiple sources of activity from among a variety of sounds. In our study, we propose a statistical method to detect the interval of interference, which is also known as the unexpected mesa, distinguishing activities based on the pre- and post-mesa intervals. The results suggest that the proposed method outperforms previously presented classification algorithms in terms of the accuracy of multiuser activity recognition. Future studies may utilize this method for improvement of existing smart home systems.     

Self-supporting uncooled infrared microbolometers with low-thermalmass

A new micromachined microbolometer array structure is presented that utilizes a self-supporting semiconducting yttrium barium copper oxide (Y-Ba-Cu-O) thin film thermometer. The Y-Ba-Cu-O thermometer is held above the substrate only by the electrode arms without the need of any underlying supporting membrane. This represents a significant improvement in the state-of-the-art for microbolometers by eliminating the thermal mass associated with the supporting membrane. The reduced thermal mass permits lowering the thermal conductance to the substrate to obtain increased responsivity or having a shorter thermal time constant to allow for higher frame rate camera. The simple structure does not suffer from warping problems associated with stress imbalances in multilayer microbolometer structures that utilize a supporting membrane such as Si₃N₄. Devices were fabricated by growing Y-Ba-Cu-O films on a conventional polyimide sacrificial layer mesa. Subsequent etching of the sacrificial layer provides the air gap that thermally isolates the microbolometer. Y-Ba-Cu-O possesses a relatively high temperature coefficient of resistance of 3.1%/K at room temperature. The 400-nm-thick Y-Ba-Cu-O film exhibited absorptivity of about 30%. The responsivity and detectivity approached 10⁴ V/W and 10⁸ cm Hz^1/2/W to filtered blackbody infrared (IR) radiation covering the 2.5 to 13.5 μm band. This extrapolates to noise equivalent temperature difference (NETD) less than 100 mK. The micromachining techniques employed are post-complementary metal-oxide-semiconductor (CMOS) compatible, allowing for the fabrication of focal plane arrays for IR cameras