|
|||||
|
|
| 轰击离子能量对CNx薄膜中sp3型C-N键含量的影响 | |
| 引用本文： | 李俊杰,曹培江,郑伟涛,吕宪义,卞海蛟,金曾孙.轰击离子能量对CNx薄膜中sp3型C-N键含量的影响[J].高等学校化学学报,2003,24(5):880-883. |
| 作者姓名： | 李俊杰 曹培江 郑伟涛 吕宪义 卞海蛟 金曾孙 |
| 作者单位： | 1. 吉林大学超硬材料国家重点实验室,长春,130023;延边大学理工学院,延吉,133002 2. 吉林大学超硬材料国家重点实验室,长春,130023 3. 吉林大学材料科学与工程学院,长春,130023 |
| 基金项目： | 教育部优秀中青年项目，吉林省科学技术委员会计划发展基金项目(批准号:980544)资助 |
| 摘 要： | 对磁控溅射生长在单晶Si(001)衬底上的CNx薄膜样品的化学键合及结构进行了研究,利用不同的衬底负偏压(Vh)来控制轰击衬底表面的入射离子能量,从而影响膜中的化学键合的状态.样品的FTIR,Ra-man和XPS分析结果表明,CNx薄膜中N原子分别与sp,sp2和sp3杂化状态的C原子结合,其中sp3型C-N键含量先随着衬底偏压(Vb)的升高而增加,并在偏压Vb=-50V时达到最大值,但随着Vb继续升高,sp3型C-N键含量减少,这表明CNx薄膜中,sp3型C-N键的含量与轰击离子的能量变化密切相关. |
| 关 键 词： | CNx薄膜 化学键合 sp3C-N键 |
| 文章编号： | 0251-0790(2003)05-0880-04 |
| 收稿时间： | 2002-01-25 |
Influence of Bombarding Ions Energy on the Content of sp3 C-N Bonds in Carbon Nitride Films |
|
| LI Jun-Jie,CAO Pei-Jiang,ZHENG Wei-Tao,LU Xian-Yi,BIAN Hai-Jiao,JIN Zeng-Sun.Influence of Bombarding Ions Energy on the Content of sp3 C-N Bonds in Carbon Nitride Films[J].Chemical Research In Chinese Universities,2003,24(5):880-883. | |
| Authors: | LI Jun-Jie CAO Pei-Jiang ZHENG Wei-Tao LU Xian-Yi BIAN Hai-Jiao JIN Zeng-Sun |
| Affiliation: | 1. National Key Laboratory of Superhard Materials; 2. College of Materials Science and Engineering, Jilin University, Changchun 130023, China; 3. College of Science and Engineering, Yanbian University, Yanji 133002, China |
| Abstract: | The chemical bonding states and the structure of CNx films grown on Si (001) substrate by using RF magnetron sputtering were studied at different substrate bias voltages (Vb) The incident ions energy bombarding the substrate surface could be controlled by the substrate negative bias, which would influence the chemical bonding states of CNx films. The results of Raman, FTIR and XPS showed that the nitrogen atoms were bound to sp, sp2 and sp3 hybridized carbon atoms. The content of sp3 C-N increased firstly with the increase of Vb, reached to the maximum value at Vb=- 50 V, and then decreased continually. This trend indicated the content of sp3 C-N bonds in the CNx films were closely related to change of ions energy. |
| Keywords: | CNx films Chemical bonding state sp3 C-N bond |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |
| 点击此处可从《高等学校化学学报》浏览原始摘要信息 | |
| 点击此处可从《高等学校化学学报》下载全文 | |
