CMOS-Based Bio/Chemosensor and Bioelectronic Microsystems

Microfabrication techniques and, in particular, complementary-metal-oxide-semiconductor (CMOS) technology have been used to devise chemo/biosensors 1-3] as well as bioelectronic microsystems 4-7]. Examples of micromachined bio- or chemosensors, such as cantilevers or micoelectrode arrays, will be shown, and the electrical interfacing of CMOS microelectronics with biological entities or electrogenic cells, i.e., cells that react upon electrical stimulation and, in turn, produce electrical signals (heart cells or neurons) are detailed. CMOS-based, fully integrated microelectrode arrays for bidirectional communication (stimulation and recording) with electrogenic cells are presented. These devices are capable of monitoring relevant electrophysiological responses of cells to electrical stimuli or to pharmacological agents with prospective applications in the field of bio-inspired information processing or pharmascreening.