带电粒子光学系统优化问题的研究

对带电粒子光学系统的优化过程进行了研究,提出将象差的优化与透镜场形的优化分离开来。在象差的优化中考虑含光学参数的隐式约束条件。该优化过程只需做简单的积分运算,因此不必花费时间计算电磁场。在透镜场形的优化中,其优化模型与一般电磁系统的优化完全一样,因而可以采用已经研究的很多的电磁场的优化方法来优化透镜的场形。计算了两个优化的实例。

STUDY ON THE OPTIMIZATION IN CHARGED PARTICLE OPTICAL SYSTEM

It studies the optimization of charged particle optical system and proposes to separate the optimization of aberration from the optimzation of field in lens. In the optimization of aberration, the implication constraints are considered. In this optimization, it needs to do some simple integral calculations so that the calculation of field which will takes a lot of time is avoided. In the optimization of filed in lens, the mathmatical model is just the same as in other electromagnetic system. Therefore, the optimzation methods of electromagnetic system can be used to optimize the field in lens. In the end, two examples for optimization are given to verify the new method.