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基于TiO2薄膜电阻式随机存储器电致阻变性质的研究
引用本文:邹利兰.基于TiO2薄膜电阻式随机存储器电致阻变性质的研究[J].电子测试,2017(16).
作者姓名:邹利兰
作者单位:广东海洋大学电子与信息工程学院,广东湛江,524088
摘    要:本论文采用溶胶凝胶法制备了TiO2薄膜,研究Pt/TiO2/Pt器件的电致阻变性质,并结合I-V特性曲线分析器件内部的阻变机制,器件高低阻态的导电机制分别为肖特基发射机制和欧姆导电机制.结果表明,Pt/TiO2/Pt器件在非易失性存储器领域具有潜在的应用.

关 键 词:TiO2薄膜  电致阻变  物理机制

Resistive switching properties of TiO2-based thin film resistance random access memory
Zou Lilan.Resistive switching properties of TiO2-based thin film resistance random access memory[J].Electronic Test,2017(16).
Authors:Zou Lilan
Abstract:The resistive switching properties of Pt/TiO2/Pt devices were investigated, in which the TiO2 thin film was prepared by sol-gel method. Combining with analysis of I-V characteristic and fitting results, the conductive mechanism of the devices were Schottky emission mechanism in HRS and Ohmic mechanism in LRS. Our results show the potential application of the Pt/TiO2/Pt cell in non-volatile memory field.
Keywords:TiO2 thin film  Resistive switching  Physical mechanism
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