| Al掺杂ZnO薄膜的制备及红外光学性能的研究 |
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| 引用本文： | 封宾,何大伟,富鸣,杜玙璠,鞠长滨,王永生.Al掺杂ZnO薄膜的制备及红外光学性能的研究[J].稀有金属材料与工程,2009,38(Z2). |
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| 作者姓名： | 封宾 何大伟 富鸣 杜玙璠 鞠长滨 王永生 |
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| 作者单位： | 北京交通大学,发光与信息技术教育部重点实验室,北京,100044 |
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| 基金项目： | 国家自然科学基金，北京市科学技术委员会，国家杰出青年科学基金，北京自然科学基金 |
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| 摘 要： | 采用溶胶-凝胶法合成Al掺杂ZnO胶体,通过浸涂法在石英衬底上制备不同退火温度的ZAO薄膜.通过XRD、FT-IR、IR-2型红外辐射仪等手段对薄膜进行表征并研究不同工艺条件对薄膜红外性能的影响.结果显示,Al的掺杂并未改变ZnO的晶型结构,薄膜材料具有沿(002)晶面趋向性生长的特点.ZAO薄膜在可见光区具有高透过率,平均透过率在80%左右,在红外波段具有较高的透过率,所得到的ZAO薄膜在红外波段具有较低的发射率.
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| 关 键 词： | 掺铝氧化锌 红外辐射 涂层材料 掺杂半导体 |
Preparation and Infrared Character Study of Al-Doped ZnO Thin Film |
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| Feng Bin,He Dawei,Fu Ming,Du Yufan,Ju Changbin,Wang Yongsheng.Preparation and Infrared Character Study of Al-Doped ZnO Thin Film[J].Rare Metal Materials and Engineering,2009,38(Z2). |
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| Authors: | Feng Bin He Dawei Fu Ming Du Yufan Ju Changbin Wang Yongsheng |
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| Affiliation: | Feng Bin,He Dawei,Fu Ming,Du Yufan,Ju Changbin,Wang Yongsheng (Key Laboratory of Luminescence , Optical Information,Ministry of Education,Beijing Jiaotong University,Beijing 100044,China) |
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| Abstract: | Al-doped ZnO(ZAO)thin film was deposited on quartz glass by sol-gel process with different sintering temperatures. The infrared characters and the effect of technics were investigated through X-ray diffraction (XRD),FT-IR and IR-2 infrared actinograph. The XRD results show that the phase structure of ZAO thin films was the same as that of ZnO with highly C-axis oriented. The FT-IR results show that ZAO thin films had a high transparence ( about 80% ) for visible light and a high transparence for infrared.Th... |
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| Keywords: | Al-doped ZnO infrared emissivity coated materials doped semiconductor |
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