| 衬底温度对Cu2O薄膜结构和性能的影响 |
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| 引用本文： | 董国波,张铭,王玫,李英姿,李朝荣,李华,黄安平,严辉. 衬底温度对Cu2O薄膜结构和性能的影响[J]. 人工晶体学报, 2012, 41(2): 457-460,467 |
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| 作者姓名： | 董国波 张铭 王玫 李英姿 李朝荣 李华 黄安平 严辉 |
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| 作者单位： | 1. 北京航空航天大学物理科学与核能工程学院,北京,100191
2. 北京工业大学材料科学与工程学院,北京,100124 |
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| 摘 要： | 采用射频磁控溅射技术在石英衬底上制备了Cu2O薄膜。系统研究了衬底温度对薄膜结构、光学和电学性能的影响。XRD的结果显示,在所有衬底温度条件下均可得到单相的Cu2O结构,而且随着衬底温度由500 K升至800 K,薄膜表现出(111)择优取向的生长特点。电学和光学测试结果表明,室温电导率和光学带隙随着衬底温度的升高而增加,800 K制备的薄膜的带隙值最高约为2.58 eV。
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| 关 键 词： | Cu2O薄膜 电导率 光学带隙 衬底温度 |
Effect of Substrate Temperature on the Structure and Properties of Cu2O Thin Films |
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| DONG Guo-bo , ZHANG Ming , WANG Mei , LI Ying-zi , LI Chao-rong , LI Hua , HUANG An-ping , YAN Hui. Effect of Substrate Temperature on the Structure and Properties of Cu2O Thin Films[J]. Journal of Synthetic Crystals, 2012, 41(2): 457-460,467 |
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| Authors: | DONG Guo-bo ZHANG Ming WANG Mei LI Ying-zi LI Chao-rong LI Hua HUANG An-ping YAN Hui |
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| Affiliation: | 1.School of Physics and Nuclear Energy Engineering,Beihang University,Beijing 100191;China; 2.College of Materials Science and Engineering,Beijing University of Technology,Beijing 100124,China) |
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| Abstract: | The Cu2O thin films were deposited by radio-frequency(RF) magnetron sputtering at different substrate temperatures.The effect of substrate temperature on the crystal structure,optical and electrical properties were studied.The X-ray diffraction patterns show that the single-phase Cu2O was obtained and present a preferred growth orientation(111) as the substrate temperatures increased from 500 K to 800 K.The room temperature conductivity and optotical bandgap(Eg) increase as the substrate temperature increasing.The biggest Eg,2.58 eV,is achieved for the sample prepared at 800 K. |
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| Keywords: | Cu2O thin film conductivity optical bandgap substrate temperature |
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