| SG滤波在朗缪尔探针信号处理中的应用 |
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| 引用本文： | 桑庆双,程健. SG滤波在朗缪尔探针信号处理中的应用[J]. 计算机工程, 2011, 37(17): 220-222,226 |
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| 作者姓名： | 桑庆双 程健 |
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| 作者单位： | 中国科学技术大学自动化系,合肥,230027 |
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| 摘 要： | 利用朗缪尔探针检测射频耦合等离子体特性参数时，测得的伏安特性曲线会受电磁干扰而产生畸变，从而影响等离子体参数的计算和特性分析。为此，利用Savitzky-Golay(SG)滤波算法对伏安特性曲线进行分段滤波，给出平滑效果较好的特性参数。实验结果表明，SG算法对原始信号特征改变较少，求出的电子能量概率函数准确度较高。
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| 关 键 词： | 朗缪尔探针 等离子体 伏安特性曲线 SG滤波 电子能量概率函数 |
| 收稿时间： | 2011-02-22 |
Application of SG Filtering in Langmuir Probe Signal Processing |
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| SANG Qing-shuang,CHENG Jian. Application of SG Filtering in Langmuir Probe Signal Processing[J]. Computer Engineering, 2011, 37(17): 220-222,226 |
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| Authors: | SANG Qing-shuang CHENG Jian |
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| Affiliation: | SANG Qing-shuang,CHENG Jian(Department of Automation,University of Science and Technology of China,Hefei 230027,China) |
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| Abstract: | While measuring radio frequency plasma's parameters by Langmuir probe,the I-V characteristic curve is always distorted by electromagnetic interference,and this influences the parameters calculation and analysis.This paper adopts a Savitzky-Golay(SG) filtering algorithm which is used for smoothing I-V characteristic curve,and this brings accurate parameters.Experimental results show Savitzky-Golay filtering of the divided I-V characteristic can bring low signal distortion rate and high accurate Electron Ener... |
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| Keywords: | Langmuir probe plasma I-V characteristic curve Savitzky-Golay(SG) filtering Electron Energy Probability Function(EEPF) |
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