CO2激光锡等离子体极端紫外及可见光光谱

利用CO2激光烧蚀锡靶产生等离子体,当入射到靶面的单个脉冲能量为400mJ,半峰全宽(FWHM)为75ns时,使用光谱仪和增强型电荷耦合器件(ICCD)采集了等离子体的时间分辨光谱。在局域热平衡假设下,利用谱线的斯塔克展宽和五条Sn II谱线的相对强度计算并得到了等离子体电子密度、电子温度和辐射谱线强度随时间的变化规律;利用掠入射极端紫外平场光栅光谱仪,结合X射线CCD同时探测了光源在6.5～16.8nm波段的时间积分极端紫外辐射光谱。实验结果表明:激光点燃等离子体早期的100ns内有很强的连续谱,此后才能分辨出明显的原子和离子线状谱。在延时0.1～2.0μs的时间区间内,等离子体中的电子温度和密度分别在2.3～0.5eV和7.6×1017～1.2×1016 cm-3范围内,均随时间经历了快速下降,然后再较缓慢下降的过程。激光锡等离子体极端紫外不可分辨辐射跃迁光谱峰值中心位于13.5nm,FWHM为1.1nm。

Extreme Ultraviolet and Visible Emission Spectroscopic Characterization of CO2 Laser Produced Tin Plasma for Lithography

The experiments of laser-produced tin plasma are carried out using a CO2 laser with the energy of 400 mJ of each pulse and the full width at half maximum (FWHM) of 75 ns. The temporal evolution of visible emission spectrum are measured using a spectrograph coupled with an intensified charge-coupled device (ICCD) in vacuum. The plasma electron temperature is inferred by the Bolzmann plot method from five singly ionized Sn emission lines, while electron density measurements are made using Stark broadening method by assuming the conditions of local thermodynamic equilibrium. Extreme ultraviolet (EUV) spectral measurement is made throughout the wavelength region of 6.5~16.8 nm using a grazing incidence flat-field grating spectrometer coupled with an X-ray CCD for the detection of time-integrated spectrum. The results show that optical emission spectrum is mainly the continuous spectrum at the early stage of plasma expansion (within the first 100 ns) and the continuous spectrum weakens gradually while the line spectrum becomes dominating. Electron temperature is measured in the range of 2.3~0.5 eV, and electron density is measured in the range of 7.6×1017~1.2×1016 cm-3, as the time delay is varied from 0.1 to 2.0 μs. Both the electron temperature and density decrease fast at early delay time and slowly decrease at later delay time. The extreme ultraviolet emission measurement of laser-produced-tin plasma shows that the peak of the EUV spectrum is located at 13.5 nm and the FWHM of the unresolved transition arrays is 1.1 nm.