高g值压阻式微加速度计设计

利用加速度计的机械变形导致电阻的变化,设计了一种测量高g值的加速度计。在CoventorWare软件下建立了加速度计的加工工艺流程和实体模型。利用压阻分析模块MemPZR,采用FEM分析方法,通过改变压阻块在悬臂梁上的位置,得到压阻块位置与器件输出电流之间的关系,找到了压阻块在悬臂梁上的最优放置位置。改变压阻块的电导率,验证了器件的灵敏度变化与压阻率变化的趋势是一致的。在20 kg加速度的输入下,得到了压阻块应力的分布,以及电流的大小及分布,和悬臂梁的应力大小及分布,验证了加速度计的抗过载能力。

Design of high g piezoresistive micro-accelerometer

The change in resistivity caused by the mechanical deformation in a micro-accelerometer was used to design an accelerator to measure physical quantities such as high g acceleration. The process and a solid model were constructed in CoventorWare. With changing the position of a piezoresistive sensing element on the fix-end cantilever,the optimizing location of the sensing element as well as the relationship between the output current and the location are obtained by using Finite Element Mothod(FEM) in the Me...