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Structure and Photoluminescence of Nano-ZnO Films Grown on a Si (100) Substrate by Oxygen- and Argon-Plasma-Assisted Thermal Evaporation of Metallic Zn
引用本文:路丽霞,汤庆鑫,邵长路,刘益春.Structure and Photoluminescence of Nano-ZnO Films Grown on a Si (100) Substrate by Oxygen- and Argon-Plasma-Assisted Thermal Evaporation of Metallic Zn[J].中国物理快报,2005,22(4):998-1001.
作者姓名:路丽霞  汤庆鑫  邵长路  刘益春
作者单位:[1]CenterforAdvancedOptoelectronicFunctionalMaterialResearch,NortheastNormalUniversity,Changchun130024//SchoolofScience,HebeiUniversityofTechnology,Tianjin300130 [2]CenterforAdvancedOptoelectronicFunctionalMaterialResearch,NortheastNormalUniversity,Changchun130024 [3]KeyLaboratoryofExcitedStateProcesses,ChangchunInstituteofOptics,FineMechanics&Physics,ChineseAcademyofSciences,Changchun130021
摘    要:Nano-ZnO thin films were prepared by oxygen- and argon-plasma-assisted thermal evaporation of metallic Zn at low temperature, followed by low-temperature annealing at 300℃ to 500℃ in oxygen ambient. X-ray diffraction patterns indicate that the nano-ZnO films have a polycrystalline hexagonal wurtzite structure. Raman scattering spectra demonstrate the existence of interface layers between Zn and ZnO. Upon annealing at 400℃ for i h, the interface mode disappears, and photoluminescence spectra show a very strong ultraviolet emission peak around 381 nm. The temperature-dependent PL spectra indicate that the UV band is due to free-exciton emission.

关 键 词:结构性质  光激发光  氧化锌  薄膜生长  硅亚态  热蒸发
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