稀土Ce对电弧离子镀涂层颗粒和致密性的改善作用

电弧离子镀涂层的颗粒和致密度直接影响涂层的力学性能和表面质量.通过在阴极靶中引入约0.5%的稀土Ce,制得了TiN、Ti(Ce)N、(Ti,Cr)N、(Ti,Cr,Ce)N和CrN电弧离子镀层.SEM分析及研究表明:电弧离子镀涂层颗粒的形态除鹅卵状外,圆球形也很常见,炉灰夹杂也是一种涂层颗粒,它对涂层质量的影响更甚于液滴;在阴极靶和涂层中引入稀土Ce可显著减少液滴颗粒,提高涂层致密性.最后,还探讨了稀土元素改善离子镀涂层表面颗粒状况和提高涂层致密度的机理.

Improvement of Particle Conformation and Compactness of Arc Ion Plated Coatings by Cerium

Arc ion plated TiN,Ti(Ce)N,(Ti,Cr)N,(Ti,Cr,Ce)N,and CrN coatings were prepared by introduction of 0.5%(mass fraction) cerium in the cathodic target.The morphologies of the coatings were observed using a scanning electron microscope and the action of the rare earth cerium in improving the particle conformation and compactness of the coatings was explored.It was found that the coatings were mainly composed of cobblestone-like and circular particulates,and a little amount of ash inclusions originated from the electric-arc furnace also existed as impurities in the coatings,which was much harmful to the quality of the coatings.Moreover,the introduction of the rare earth contributed to greatly decrease the amount of liquid-dripping particles and increase the compactness of the coatings and hence led to increased compactness of the coatings.