| 光刻照明系统参数测试的数据通信可靠性研究 |
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| 引用本文： | 梁有伟,曹益平. 光刻照明系统参数测试的数据通信可靠性研究[J]. 工具技术, 2011, 45(11): 73-76 |
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| 作者姓名： | 梁有伟 曹益平 |
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| 作者单位： | 四川大学光电科学技术系;四川大学; |
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| 基金项目： | 国家863高技术研究发展计划(2007AA01Z333); 国家重大专(2009ZX02204-008); 四川省学术和技术带头人培养基金(07GRC-01) |
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| 摘 要： | 本文实现了光刻照明系统参数测试的串行数据通信,及参数数据实时曲线绘制,并通过RS - 232与RS-485的转换,达到了在50m的数据远程通信.分析了通信过程中误码的来源,提出采取选择下位机适配晶振频率的方法,解决了串行通讯高速率与可靠性之间矛盾,可实现串行数据高速低误差传输.
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| 关 键 词： | 光刻照明系统 串行通信 VC++6.0 MsComm控件 误码率 |
Reliability Research of Data Communication for Parameter Measuring in Lithographic Illumination System |
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| Liang Youwei,Cao Yiping. Reliability Research of Data Communication for Parameter Measuring in Lithographic Illumination System[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2011, 45(11): 73-76 |
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| Authors: | Liang Youwei Cao Yiping |
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| Abstract: | Serial communication and real-time cure drawing have been realized in the parameters measurement of lithographic illumination system.Data remote telecommunication far from 50m has been come true by taking advantage of the transform between RS-232 and RS-485.The origins of bit errors have been also analyzed and an error restrain method by properly choosing crystal frequency has been proposed.The conflict between reliability and high speed in serial communication has been improved effectively. |
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| Keywords: | lithography illumination system serial communication VC 6.0 MsComm control BER(bit error rate) |
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