Uncooled IR imaging using optomechanical detectors |
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| Authors: | Miao Zhengyu Zhang Qingchuan Chen Dapeng Guo Zheying Dong Fengliang Xiong Zhiming Wu Xiaoping Li Chaobo Jiao Binbin |
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| Affiliation: | CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China. |
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| Abstract: | In this study, we present an uncooled infrared imaging detector using knife-edge filter optical readout method. The tilt angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10(-5) degrees. A deformation magnifying substrate-free microcantilever unit is specially designed. The multi-fold legs of microcantilever are interval metal coated to form a thermal deformation magnifying structure. Thermal and thermomechanical performance of this microcantilever unit are modeled and analyzed. An FPA with 100 x 100 pixels is fabricated and thermal images of human body are obtained by this detector. |
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| Keywords: | Uncooled IR imaging Microcantilevers Optical readout |
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