| 退火气氛对SnO2薄膜结构与成分的影响 |
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| 引用本文： | 王磊,杜军,毛昌辉.退火气氛对SnO2薄膜结构与成分的影响[J].材料导报,2009,23(Z2). |
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| 作者姓名： | 王磊 杜军 毛昌辉 |
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| 作者单位： | 北京有色金属研究总院先进电子材料研究所,北京,100088 |
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| 摘 要： | 研究了低氧分压反应溅射法生长的SnO2薄膜于600℃ O2气氛和Ar气氛退火处理后的表面形貌、晶体结构以及表面成分,发现经氧化性气氛退火处理的SnO2为具有金红石结构的表面多孔薄膜.相比较而言,Ar气氛退火处理后的SnO2薄膜表面较为致密,相结构包含朱氧化完全的β-Sn.XPS分析进一步表明,氧化性气氛退火形成单一组分的SnO2,而惰性气氛退火后薄膜表面含有Sn、SnO和SnO2.另外,研究还发现薄膜表面吸附氧形态与退火气氛有关.
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| 关 键 词： | 二氧化锡 薄膜 反应磁控溅射 退火气氛 |
Influence of Various Atmospheres on Structure and Surface Compositions of SnO2 Thin Films |
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| WANG Lei,DU Jun,MAO Changhui.Influence of Various Atmospheres on Structure and Surface Compositions of SnO2 Thin Films[J].Materials Review,2009,23(Z2). |
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| Authors: | WANG Lei DU Jun MAO Changhui |
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| Abstract: | SnO2 thin films, deposited by reactive magnetron sputtering under low oxygen partial pressure, are annealed in oxygen and argon atmosphere,respectively. Morphology, phase structure and surface compositions are investigated through SEM,XRD and XPS at room temperature. It is observed that the SnO2 thin film annealed in oxygen atmosphere is rutile structure with porous surface. On the other hand,Sn, SnO and SnO2 are detected on compact surface of the thin film annealed in argon atmosphere. Furthermore,it is confirmed that the forms of the adsorbed oxygen depend on annealed atmosphere. |
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| Keywords: | tin dioxide thin film reactive magnetron sputtering annealing atmospheres |
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