飞行时间二次离子质谱--强有力的表面、界面和薄膜分析手段

二次离子质谱（Secondary ion mass spectrometry，简称SIMS）是一种对表面灵敏的质谱技术，建立在表面各种类型带正、负电荷原子或分子发射的基础上。用飞行时间（Time of flight，简称TOF）仪器对这些二次离子进行质量分析，能确保并行质量登录、高质量范围、高流通率下的高分辨和精确质量测定这些优异性能。配合细聚焦扫描一次离子束，可在优于1nm的高深度分辨和优于50nm的横向分辨本领下，实现对表面优于单层ppm(百万分之一）量级的极高检测灵敏度。当今TOF－SIMS已发展为一种成熟且完善的表面分析技术。极高的灵敏度，再加上即使对大分子及不易挥发性分子都独具的敏感性，使它成为很多高技术领域不可缺少的分析手段，这些领域包括微电子学、化学和材料科学以至纳米技术和生命科学等。本文简述了TOF－SIMS的原理、仪器及其多方面的应用和展望。

TOF-SIMS A powerful tool for practical surface, interface and thin film analysis

SIMS is a surface sensitive mass spectrometry, based upon the emission of positively and negatively charged atomic and molecular surface species. Mass analysis of these secondary ions by time of flight (TOF) instrumentation guarantees parallel mass registration, high mass range, high mass resolution at high transmission, and precise mass determination. In combination with a fine focussed primary ion beam, this results in an extreme sensitivity (<1 ppm of one ML) combined with high depth (<1 nm) and lateral (<50 nm) resolution. Today TOF SIMS is a mature and well established analytical technique. Its extreme sensitivity in combination with its unique sensitivity for even large and involatile molecular species makes the technique indispensable in many high technology areas, ranging from microelectronic, chemistry and material sciences, to nanotechnology and life sciences. This paper outlines TOF SIMS fundamentals and instrumentation, as well as its manifold applications and perspectives.