| 一种基于标准CMOS工艺的光互连方案探讨 |
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| 引用本文： | 余长亮,毛陆虹,肖新东,谢生,张世林. 一种基于标准CMOS工艺的光互连方案探讨[J]. 半导体学报, 2009, 30(5): 055012-4 |
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| 作者姓名： | 余长亮 毛陆虹 肖新东 谢生 张世林 |
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| 作者单位： | School;Electronic;Information;Engineering;Tianjin;University; |
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| 摘 要： | A standard CMOS optical interconnect is proposed, including an octagonal-annular emitter, a field oxide, metal 1-PSG/BPSG-metal 2 dual waveguide, and an ultra high-sensitivity optical receiver integrated with a fingered P＋/N-well/P-sub dual photodiode detector. The optical interconnect is implemented in a Chartered 3.3-V 0.35-μm standard analog CMOS process with two schemes for the research of the substrate noise coupling effect on the optical interconnect performance： with or without a GND-guardring around the emitter. The experiment results show that the optical interconnect can work at 100 kHz, and it is feasible to implement optical interconnects in standard CMOS processes.
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| 关 键 词： | CMOS工艺 光互连 标准 光学接收器 超高灵敏度 光电探测器 耦合效应 衬底噪声 |
| 修稿时间： | 2009-01-05 |
An approach to the optical interconnect made in standard CMOS process |
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| Yu Changliang,Mao Luhong,Xiao Xindong,Xie Sheng and Zhang Shilin. An approach to the optical interconnect made in standard CMOS process[J]. Chinese Journal of Semiconductors, 2009, 30(5): 055012-4 |
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| Authors: | Yu Changliang Mao Luhong Xiao Xindong Xie Sheng Zhang Shilin |
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| Affiliation: | School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China |
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| Abstract: | optical interconnect standard CMOS emitter waveguide ultra high-sensitivity |
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| Keywords: | optical interconnect standard CMOS emitter waveguide ultra high-sensitivity |
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