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涡旋真空泵的设计与操作
引用本文:杨广衍,滕普光,张鹏,郭海洋.涡旋真空泵的设计与操作[J].真空,2006,43(4):19-22.
作者姓名:杨广衍  滕普光  张鹏  郭海洋
作者单位:1. 东北大学机械工程及自动化学院,辽宁,沈阳,110004
2. 辽阳市科学技术咨询中心,辽宁,辽阳,111000
摘    要:本文总结了涡旋真空泵的工作原理、设计原则与经验、制造要点和使用注意事项;介绍了涡旋真空泵的设计与加工方法;讨论了涡旋盘的加工、密封的设计与选择、间隙的确定以及泵体的动平衡等问题并阐明这些问题是影响泵性能指标的几个重要因素;同时指出了涡旋真空泵使用的几个注意事项。

关 键 词:真空泵  涡旋技术  设计
文章编号:1002-0322(2006)04-0019-04
收稿时间:2005-12-25
修稿时间:2005-12-25

Design and operation of scroll vacuum pump
YANG Guang-yan,TENG Pu-guang,ZHANG Peng,GUO Hai-yang.Design and operation of scroll vacuum pump[J].Vacuum,2006,43(4):19-22.
Authors:YANG Guang-yan  TENG Pu-guang  ZHANG Peng  GUO Hai-yang
Affiliation:1. School of Mechanical Engineering and Automation,Northeastern University, S henyan g 110004, China; 2. Liaoyang Scintech Information Center Liaoyang , Liaoyang 111000, china
Abstract:The operating principle, design principle/experience, keys to manufacturing and cautions in operation of a scroll vacuum pump are generalized, with the design and fabrication of a scroll pump introduced. Discusses the processing of scroll disk sealing, design and choice of sealing material, determination of clearance between fixed and orbiting scroll disks and the dynamic balance of pump, and they are proved the key factors influencing pump performance. Some cautions are proposed that the gas ballest and isolating valve are needed to pay attention in pump operation,
Keywords:vacuum pumps scroll technology  design
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