| 具有PDEB LB膜的声表面波湿度传感器 |
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| 引用本文： | 凌明芳,祝运海. 具有PDEB LB膜的声表面波湿度传感器[J]. 压电与声光, 1998, 20(1): 4-7 |
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| 作者姓名： | 凌明芳 祝运海 |
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| 作者单位： | 浙江大学信电系 |
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| 摘 要： | 介绍一种新型聚炔离子导体湿敏材料－聚对二炔苯的Ｌａｎｇｍｕｉｒ－Ｂｏｌｄｇｅｔｔ成膜原理与制备，淀积有１０层ＰＤＥＢ ＬＢ膜层的声表面波延迟线型湿度传感器的特性。由于ＬＢ成膜技术拉制的膜可以在分子水平上进行定量控制，保证了膜的均匀性和一致性。
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| 关 键 词： | 声表面波 LB膜 温度传感器 传感器 |
SAW Humidity Sensor with PDEB Langmuri Blodgett Membrane |
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| Ling Mingfang Zhu Yunhai. SAW Humidity Sensor with PDEB Langmuri Blodgett Membrane[J]. Piezoelectrics & Acoustooptics, 1998, 20(1): 4-7 |
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| Authors: | Ling Mingfang Zhu Yunhai |
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| Abstract: | This paper describes the principle and preparation of the Langmuir Blodgett (LB) membrane formed by a new type of humidity sensitive material:polyeiethynl benezene (PDEB).Humidity sensor made by SAW delay line oscillator is deposited with 10 layers of the PDEB LB membranes and its property is also discussed in this paper.Since the LB membrane can well be controlled in molecular degree,thus ensure the uniformity and unity of the LB membrane.Experiments show that SAW humidity sensor with PDEB LB membrane has sensitivity of 0.5 kHz/RH% with good linearity. |
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| Keywords: | SAW LB membrane humidity sensor polyeiethynl benezene |
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