Abstract: | Abstract— Europium‐activated yttrium oxysulfide thin films were fabricated by electron‐beam deposition of Y2O2S:Eu with consequent annealing in an H2S/Ar gas mixture. Transformations in film composition and surface morphology as well as corresponding changes in the optical, photoluminescent, and cathodoluminescent properties were studied and will be discussed. It is shown that 248‐nm laser irradiation of heat‐treated films improves cathodoluminescence by as much as 30%, supposedly due to annealing. The developed phosphor films have a luminance comparable to that of annealed europium‐activated yttrium oxide films and improved color properties (CIE color coordinates: x = 0.624, y = 0.329), and are suitable for display and optoelectronics applications. |