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On‐Chip: Direct Microrolling Processing on a Silicon Wafer (Small 36/2017) |
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| Authors: | Kanna Aoki Keita Ishiguro Masaki Denokami Yuya Tanahashi Kentaro Furusawa Norihiko Sekine Tadafumi Adschiri Minoru Fujii |
| Affiliation: | 1. Department of Electrical and Electronic Engineering, Graduate School of Engineering, Kobe University, Kobe, Hyogo, Japan;2. Frontier Research Laboratory, National Institute of Information and Communications Technology, Koganei, Tokyo, Japan;3. World Premier International Research Center‐Advanced Institute for Materials Research (WPI‐AIMR), Tohoku University, Aoba‐ku, Sendai, Japan |
| Abstract: | |
| Keywords: | 3D microfabrication porous silicon layers self‐rolling structural dynamics |
