| LTCC专用烧结炉的研制 |
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| 引用本文： | 彭志坚,邓斌. LTCC专用烧结炉的研制[J]. 电子工业专用设备, 2009, 38(10): 16-21 |
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| 作者姓名： | 彭志坚 邓斌 |
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| 作者单位： | 中国电子科技集团公司第四十八研究所,湖南长沙,410111;中国电子科技集团公司第四十八研究所,湖南长沙,410111 |
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| 摘 要： | 随着低温共烧陶瓷（Low Temperature Co—fired Ceramic，LTCC）多层基板为适应电子器件向着小型化、高密度、多功能的发展，从而对低温共烧工艺设备的也提出了更为严格的要求。针对目前低温共烧工艺设备的主要特点介绍了低温共烧陶瓷技术中新型烧结炉的研制方案及技术难点。
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| 关 键 词： | LTCC 烧结炉 方案 |
Study on the Manufacturing of LTCC Special Sintering Furnace |
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| PENG Zhijian,DENG Bin. Study on the Manufacturing of LTCC Special Sintering Furnace[J]. Equipment for Electronic Products Marufacturing, 2009, 38(10): 16-21 |
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| Authors: | PENG Zhijian DENG Bin |
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| Affiliation: | PENG Zhijian,DENG Bin (48th Research institute of CETC,Changsha,410111,China) |
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| Abstract: | As the electronic devices which used the LTCC (Low Temperature Co-fired Ceramic, LTCC) multi-layer substrates becoming smaller, more high-density and more function, the requirements are higher and stricter for the LTCC process equipment. This paper mainly introduces the LTCC technology development and technical difficulties on the new type sintering furnace. |
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| Keywords: | LTCC |
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