| ZrO2薄膜的表层结构 |
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| 引用本文： | 夏风 邹道文. ZrO2薄膜的表层结构[J]. 功能材料, 1999, 30(6): 644-645 |
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| 作者姓名： | 夏风 邹道文 |
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| 作者单位： | [1]华中理工大学材料学院 [2]江西师范大学 |
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| 摘 要： | 用射频溅射技术制备了ＺｒＯ２薄膜，用恒正电子束分析该谱膜，发现它的的表层存在一高正电子吸收区，它与钇的表面富集有关，提出了相应的模型。
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| 关 键 词： | 薄膜 慢正电子束 表面结构 YSZ 氧化锆 |
Surface Layer of ZrO_2 Thin Film |
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| XIA Feng ,ZOU Liujuan ,QIAN Xiaoliang ,ZOU Daowen ,WENG Huimin ,HUANG Qianfeng ,ZHOU Xianyi ,HAN Rongdian. Surface Layer of ZrO_2 Thin Film[J]. Journal of Functional Materials, 1999, 30(6): 644-645 |
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| Authors: | XIA Feng ZOU Liujuan QIAN Xiaoliang ZOU Daowen WENG Huimin HUANG Qianfeng ZHOU Xianyi HAN Rongdian |
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| Affiliation: | XIA Feng 1,ZOU Liujuan 1,QIAN Xiaoliang 1,ZOU Daowen 2,WENG Huimin 3,HUANG Qianfeng 3,ZHOU Xianyi 3,HAN Rongdian 3 1 Department of Material Science and Engineering,Huazhong University of Science and Technology,Wuhan,430074,China, 2 Jiangx |
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| Abstract: | ZrO 2 thin films were deposited by r.f sputtering and were analysed by slow positron beam.A intensive positron-absorbing region was found to be the surface layer of the film.A model was proposed which related the region to the yttrium richment in the film surface. |
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| Keywords: | ZrO 2 thin film slow-positron beam surface |
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