| 多自由度测量技术研究现状及发展趋势 |
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| 引用本文： | 钟挺,陈本永.多自由度测量技术研究现状及发展趋势[J].四川激光,2007,28(5):10-12. |
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| 作者姓名： | 钟挺 陈本永 |
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| 作者单位： | 浙江理工大学纳米测量技术实验室 杭州310018 |
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| 基金项目： | 国家自然科学基金
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浙江省自然科学基金 |
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| 摘 要： | 介绍了用于实时多自由度测量的测量方法和当前的发展动态,给出了每种测试技术的测试原理和应用场合,比较各种技术的优缺点和适用范围.提出了一种新颖的基于激光外差干涉的多自由度测量方法,该方法有很高的精度和测量范围.
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| 关 键 词： | 多目由度 外差十涉 测量技术 多自由度测量 技术研究 现状 发展 趋势 measurement freedom degree multi 测量范围 精度 测量方法 激光外差干涉 比较 应用场合 原理 测试技术 动态 |
| 文章编号： | 0253-2743（2007）05-0010-03 |
| 修稿时间： | 2007-04-11 |
Review on multi - degree - of- freedom measurement |
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| ZHONG Ting,CHEN Ben-yong.Review on multi - degree - of- freedom measurement[J].Laser Journal,2007,28(5):10-12. |
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| Authors: | ZHONG Ting CHEN Ben-yong |
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| Affiliation: | Nanometer Measurement Lab, Zhejiang Sci- Tech University, Hangzhou 310018, China |
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| Abstract: | Several methods for measuring simultaneously multi-degree-of-freedom are introduced,and the development trend of the measuring technique is given.The principles and application situations in measuring multi-degree-of-freedom are discussed.in this paper.The advantages and disadvantages of various measuring methods are compared.At last,a novel method based on laser heterodyne interferometer for measuring multi-degree-of-freedom is proposed,and this method is capable of realizing long-range and high-accuracy. |
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| Keywords: | multi-degree-of-freedom heterodyne interferometer measuring technology |
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