Electrical Performance of Electron Irradiated SiGe HBT and Si BJT |
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Authors: | Wentao HUANG Jilin WANG Zhinong LIU Peiyi CHEN Peihsin TSIEN Xiangti MENG |
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Affiliation: | Institute of Microelectronics, Tsinghua University, Beijing 100084, China... |
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Abstract: | The change of electrical performances of 1 MeV electron irradiated silicon-germanium (SiGe) heterojunction bipolar transistor (HBT) and Si bipolar junction transistor (BJT) was studied. After electron irradiation, both the collector current IC and the base current IB changed a little, and the current gainβ decreased a little for SiGe HBT. The higher the electron irradiation fluence was, the lower the IC decreased. For conventional Si BJT, IC and IB increased as well asβ decreased much larger than SiGe HBT under the same fluence. The contribution of IB was more important to the degradation ofβ for both SiGeHBT and Si BJT. It was shown that SiGe HBT had a larger anti-radiation threshold and better anti-radiation performance than Si BJT. The mechanism of electrical performance changes induced by irradiation was preliminarily discussed. |
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Keywords: | Electron irradiation SiGe HBT Si BJT Electrical performance |
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