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Simulation of multilayer homoepitaxial growth on Cu (100) surface
引用本文:吴锋民,陆杭军,吴自勤.Simulation of multilayer homoepitaxial growth on Cu (100) surface[J].中国物理 B,2006,15(4):807-812.
作者姓名:吴锋民  陆杭军  吴自勤
作者单位:(1)Department of Astronomy and Applied Physics, University of Science and Technology of China, Hefei 230026, China; (2)Institute of Condensed Matter Physics, Zhejiang Normal University,Jinhua 321004, China
基金项目:Project supported by the Natural Science Foundation for Young Scientists of Zhejiang Province, China (Grant No RC02069).
摘    要:The processes of multilayer thin Cu films grown on Cu (100) surfaces at elevated temperature (250--400\,K) are simulated by mean of kinetic Monte Carlo (KMC) method, where the realistic growth model and physical parameters are used. The effects of small island (dimer and trimer) diffusion, edge diffusion along the islands, exchange of the adatom with an atom in the existing island, as well as mass transport between interlayers are included in the simulation model. Emphasis is placed on revealing the influence of the Ehrlich--Schwoebel (ES) barrier on growth mode and morphology during multilayer thin film growth. We present numerical evidence that the ES barrier does exist for the Cu/Cu(100) system and an ES barrier $E_{\rm B} >0.125$\,eV is estimated from a comparison of the KMC simulation with the realistic experimental images. The transitions of growth modes with growth conditions and the influence of exchange barrier on growth mode are also investigated.

关 键 词:生长模式  ES屏障  多层生长  动态蒙特卡洛模拟
收稿时间:2005-11-22
修稿时间:2005-11-222005-12-27

Simulation of multilayer homoepitaxial growth on Cu (100) surface
Wu Feng-Min,Lu Hang-Jun and Wu Zi-Qin.Simulation of multilayer homoepitaxial growth on Cu (100) surface[J].Chinese Physics B,2006,15(4):807-812.
Authors:Wu Feng-Min  Lu Hang-Jun and Wu Zi-Qin
Affiliation:Institute of Condensed Matter Physics, Zhejiang Normal University, Jinhua 321004, China; Department of Astronomy and Applied Physics, University of Science and Technology of China, Hefei 230026, China
Abstract:The processes of multilayer thin Cu films grown on Cu (100) surfaces at elevated temperature (250--400\,K) are simulated by mean of kinetic Monte Carlo (KMC) method, where the realistic growth model and physical parameters are used. The effects of small island (dimer and trimer) diffusion, edge diffusion along the islands, exchange of the adatom with an atom in the existing island, as well as mass transport between interlayers are included in the simulation model. Emphasis is placed on revealing the influence of the Ehrlich--Schwoebel (ES) barrier on growth mode and morphology during multilayer thin film growth. We present numerical evidence that the ES barrier does exist for the Cu/Cu(100) system and an ES barrier $E_{\rm B} >0.125$\,eV is estimated from a comparison of the KMC simulation with the realistic experimental images. The transitions of growth modes with growth conditions and the influence of exchange barrier on growth mode are also investigated.
Keywords:growth mode  ES barrier  multilayer growth  kinetic Monte Carlo simulation
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