| 热驱动薄膜式微型泵 |
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| 引用本文： | 尹执中,庞江涛,刘理天,胡桅林,过增元. 热驱动薄膜式微型泵[J]. 清华大学学报(自然科学版), 2000, 40(6): 36-38 |
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| 作者姓名： | 尹执中 庞江涛 刘理天 胡桅林 过增元 |
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| 作者单位： | 1. 清华大学,工程力学系,北京,100084
2. 清华大学,微电子所,北京,100084 |
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| 基金项目： | 国家自然科学基金项目 !( 5 9995 5 5 0 -2 ) |
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| 摘 要： | 微型泵在化学分析、环境监测和药物传送等领域有广阔应用前景。为了解热驱动薄膜式微型泵的性能 ,对泵的主要部件进行了理论分析 ,然后对泵的整体性能进行了数值模拟。得到了微型泵的频率特性 ,流量 -压头曲线及流量随功率的变化。发现泵的流量在 3 .3 3 Hz左右达到最大 ,泵的零流量压头为 64 k Pa左右 ;由于预应力的作用 ,使输入功率低时泵的流量比没有预应力时显著减小 ,而当输入功率较大时 ,泵的流量随输入功率增大而迅速增大。实验测定了微型泵流量的频率特性和随功率的变化 ,实测结果与模拟结果基本吻合
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| 关 键 词： | 微型机械 微型泵 传热 流动 模拟 |
| 修稿时间： | 1999-07-13 |
Thermally actuated membrane micropump |
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| YINZhizhong,PANGJiangtao,LIULitian,HUWeilin,GUOZengyuan. Thermally actuated membrane micropump[J]. Journal of Tsinghua University(Science and Technology), 2000, 40(6): 36-38 |
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| Authors: | YINZhizhong PANGJiangtao LIULitian HUWeilin GUOZengyuan |
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| Abstract: | Micropumps used as actuators of microfluid devices are an important part of micro electro mechanical systems (MEMS). Three main parts of a thermally actuated membrane micropump were analyzed, then the micropump was simulated as whole. Simulation results were presented for the flow rate versus frequency, pressure head and input power. The simulation results show that the micropump has a maximum flow rate at 3.33Hz, the pressure head can rise to 64kPa at zero flow rate and the flow rate increases rapidly with input power because of the buckling effect. The simulation results agree well with experimentally measured flow rates measured as a function of driving frequency and input power. |
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| Keywords: | micro-electro-mechanical systems (MEMS) micropump heat transfer flow simulation |
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