纳米粒子陶瓷薄膜结构稳定性的工艺控制

主要基于前期研究工作结果 ,并参考了国内外相关研究成果 ,介绍和阐述了利用溶胶 -凝胶技术制备的氧化钼、氧化钛、钛酸锶陶瓷薄膜过程中 ,控制薄膜稳定性的主要工艺因素。特别对以无机盐为原料的溶胶 -凝胶工艺 (ISG工艺 )溶胶稳定性原理和措施做了较为详细描述和说明不同出发原料、溶剂和络合剂相匹配性很重要。以钼酸铵为原料 ,乙二醇和水为溶剂 ,柠檬酸为络合稳定剂 ,溶胶在室温下可稳定存放 2年以上。干燥控制剂 (DCCA)添加于溶胶中 ,可调整凝胶膜网络质点及其间孔隙的大小与分布 ,减小热处理过程中膜层应力和薄膜开裂

Process Controlling of Structural Stability of Nano-particle Ceramic Thin Film

On the basis of our previous research work and the achievement obtained in the field for ceramic thin films made by sol-gel technology,the major parameters to control the structure stability of thin films in the process of preparing molybdenum oxide,titanium dioxide,strontium titanate by sol-gel method were reviewed.The sol-gel process and the stability mechanism of the sol which was synthesized from inorganic salt,were also described to explain the importance of the matching among the raw materials,solvent and the complex agent.The sol prepared from ammonium,glycol and water solvent,and the complex stabilizer of citric acid could be steadily preserved at room temperature for over two years.The addition of DCCA to the sol could adjust the network particles of gel films,the size and the distribution of the pores between the particles and reduce the crack formation caused by the stress,which was induced in the film layers during the heat treated procedure.