| 纳米TiO2膜的制备及电学性能研究 |
| |
| 引用本文： | 王浚,高濂,宋哲,周伟. 纳米TiO2膜的制备及电学性能研究[J]. 无机材料学报, 1998, 13(6): 866-870 |
| |
| 作者姓名： | 王浚 高濂 宋哲 周伟 |
| |
| 作者单位： | 上海硅酸盐研究所高性能陶瓷与超微结构国家重点实验室!上海，200050，上海硅酸盐研究所高性能陶瓷与超微结构国家重点实验室!上海，200050，上海硅酸盐研究所高性能陶瓷与超微结构国家重点实验室!上海，200050，上海硅酸盐研究所高性能陶瓷与超微结构国家重点实验室!上海，200050 |
| |
| 摘 要： | 本文通过采用丝网印刷法制备了以)α－Al2O3基片为衬底的纳米和微米级TiO2厚膜，气敏性测试表明，纳米TiO2膜的电阻略高于微米TiO2膜，在实验温度范围内，电阻随氧分压的变化率明显高于微米膜，同时还以XRD，SEM对膜材料的结构和形貌进行了表征．
|
| 关 键 词： | 纳米TiO_2 电阻 气敏性 传感器 厚膜 |
| 收稿时间： | 1997-12-29 |
| 修稿时间： | 1998-01-15 |
Preparation of Nano-TiO2 Thick Film and its Electrical Properities |
| |
| WANG Jun,GAO Lian,SONG Zhe,ZHOU Wei. Preparation of Nano-TiO2 Thick Film and its Electrical Properities[J]. Journal of Inorganic Materials, 1998, 13(6): 866-870 |
| |
| Authors: | WANG Jun GAO Lian SONG Zhe ZHOU Wei |
| |
| Affiliation: | StateKeyLabofHighPerformanceCeramicsSuperfineMicrostructure;ShanghaiInstituteofCeramics;ChineseAcademyofSciencesShanghai200050China |
| |
| Abstract: | Nano-TiO2 and micro-TiO2 thick films were prepared on a-Al2O3 substrates by silk netlithograph method, the measured film resistance of nano-TiO2 was higher than that of micro-TiO2in experimental temperature range, nano-TiO2 film demonstrated more change as the O2 partialpressure changed. XRD and SEM were also used to characterize the stucture of the prepared films. |
| |
| Keywords: | nano-TiO2 resistance gas sensitivity sensor thick film |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《无机材料学报》浏览原始摘要信息 |
|
点击此处可从《无机材料学报》下载全文 |
