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Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes |
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| Authors: | Yuichiro Ezoe Ikuyuki Mitsuishi Utako Takagi Masaki Koshiishi Kazuhisa Mitsuda Noriko Y. Yamasaki Takaya Ohashi Fumiki Kato Susumu Sugiyama Raul E. Riveros Hitomi Yamaguchi Shinya Fujihira Yoshiaki Kanamori Kohei Morishita Kazuo Nakajima Ryutaro Maeda |
| Affiliation: | 1. Tokyo Metropolitan University, 1-1 Minami-Osawa, Hachioji, Tokyo, 192-0397, Japan 2. Institute of Space and Astronautical Science (ISAS), Japan Aerospace Exploration Agency (JAXA), 3-1-1 Yoshinodai, Sagamihara, Kanagawa, 229-8510, Japan 3. Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu, Shiga, 525-8577, Japan 4. University of Florida, 226 MAE-B, Gainesville, FL, 32911, USA 5. Tohoku University, 6-6-1 Aramaki-Aza-Aoba, Aoba, Sendai, Miyagi, 980-8579, Japan 6. Tohoku University, 2-1-1 Katahira, Aoba, Sendai, Miyagi, 980-8577, Japan 7. National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan |
| Abstract: | We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. In our method, curvilinear micro pore structures are firstly fabricated by silicon deep reactive ion etching (DRIE) or X-ray LIGA processes. Secondly, side walls of the micro structures are smoothed by magnetic field assisted finishing and/or hydrogen annealing techniques for high reflectivity mirrors. Thirdly, to focus parallel X-ray lights from astronomical objects, these structures are elastically or plastically bent into a spherical shape. Fourthly, the bent structures are stacked to form a multi-stage X-ray telescope. In this paper, we report on fabrication and X-ray reflection tests of silicon and nickel X-ray mirrors using the DRIE and LIGA processes, respectively. For the first time, X-ray reflections were confirmed on both of the mirrors. Estimated rms roughnesses were 5 nm and 3 nm for the silicon and nickel mirrors, respectively. |
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