| Calibration of the Width of Micro－Step with Two－Mode Laser Heterodyne Interferometer |
| |
| 引用本文： | 赵慧洁,李鹏生,强锡富,张琢.Calibration of the Width of Micro－Step with Two－Mode Laser Heterodyne Interferometer[J].哈尔滨工业大学学报(英文版),1994(2). |
| |
| 作者姓名： | 赵慧洁 李鹏生 强锡富 张琢 |
| |
| 作者单位： | Dept. of Precision Instrument，Harbin institute of Technology，Harbin，150001，China |
| |
| 摘 要： | ＣａｌｉｂｒａｔｉｏｎｏｆｔｈｅＷｉｄｔｈｏｆＭｉｃｒｏ－ＳｔｅｐｗｉｔｈＴｗｏ－ＭｏｄｅＬａｓｅｒＨｅｔｅｒｏｄｙｎｅＩｎｔｅｒｆｅｒｏｍｅｔｅｒ￥（赵慧洁）（李鹏生）（强锡富）（张琢）ＺＨＡＯＨｕｉｊｉｅ；ＬＩＰｅｎｇｓｈｅｎｇ；ＱＩＡＮＧＸｉｆ...
|
Calibration of the Width of Micro-Step with Two-Mode Laser Heterodyne Interferometer |
| |
| ZHAO Huijie, LI Pengsheng, QIANG Xifu, ZHANG Zhuo.Calibration of the Width of Micro-Step with Two-Mode Laser Heterodyne Interferometer[J].Journal of Harbin Institute of Technology,1994(2). |
| |
| Authors: | ZHAO Huijie LI Pengsheng QIANG Xifu ZHANG Zhuo |
| |
| Abstract: | |
| |
| Keywords: | ss: Heterodyne interferometer Gaussian distribution least square width calibration |
| 本文献已被 CNKI 等数据库收录！ |
