| CVD金刚石膜中的缺陷 |
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| 引用本文： | 张恒大,刘敬明,宋建华,吕反修,唐伟忠. CVD金刚石膜中的缺陷[J]. 北京科技大学学报, 2002, 24(4): 426-428. DOI: 10.3321/j.issn:1001-053X.2002.04.011 |
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| 作者姓名： | 张恒大 刘敬明 宋建华 吕反修 唐伟忠 |
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| 作者单位： | 北京科技大学材料科学与工程学院,北京,100083 |
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| 基金项目： | 国家高技术研究发展计划(863计划);863-715-Z38-03; |
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| 摘 要： | 研究了利用直流电弧等离子体喷射(DC Arc Plasma Jet)制备的大面积金刚石膜中的缺陷问题.研究表明:金刚石膜中的缺陷包括表面缺陷、晶内缺陷和晶界缺陷,以及由于内应力产生的金刚石膜宏观和微观裂纹.金刚石膜中的缺陷与制备工艺参数有着密切关系.
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| 关 键 词： | 金刚石膜 缺陷 成因 等离子体喷射 |
| 修稿时间： | 2001-03-22 |
Defects in CVD Diamond Films |
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| ZHANG Hengda,LIU Jingming,SONG Jianhua,LU Fanxiu,TANG WeizhongMaterial Science and Engineering School,UST Beijing,Beijing ,China. Defects in CVD Diamond Films[J]. Journal of University of Science and Technology Beijing, 2002, 24(4): 426-428. DOI: 10.3321/j.issn:1001-053X.2002.04.011 |
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| Authors: | ZHANG Hengda LIU Jingming SONG Jianhua LU Fanxiu TANG WeizhongMaterial Science Engineering School UST Beijing Beijing China |
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| Affiliation: | ZHANG Hengda,LIU Jingming,SONG Jianhua,LU Fanxiu,TANG WeizhongMaterial Science and Engineering School,UST Beijing,Beijing 100083,China |
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| Abstract: | The defects in large area diamond films prepared by DC arc plasma jet CVD method are researched. The defects in diamond films are investigated, including the surface, bulk , boundry defects and the macro-cracks and micro-cracks caused by internal stresses. The results show that the growth parameters often led to defects in diamond films . |
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| Keywords: | diamond films defects formation mechanism |
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