悬臂式坐标测量机误差分离与补偿的研究

对一台自主设计的,专用于连铸结晶器测量的悬臂式坐标测量机进行研究,分析了影响其精度的主要误差源。用齐次坐标变换矩阵建立测量机的几何误差修正模型,并附加了非刚性误差补偿项。使用激光干涉仪和激光跟踪仪将误差模型中的各项误差给予逐项的分离,经计算后代入误差模型进行补偿。实测结果表明,当测量机沿体对角线运动时,其最大位移误差从补偿前的600μm降低到50μm,因此该补偿方法是有效可行的。

Study on error separation and compensation for cantilever CMM

A self-designed cantilever coordinate measuring machine（CMM） for measuring continuous casting mold was studied, main error sources impacted on the measuring accuracy of measuring machine were analyzed. The geometric error model was founded by the theory of homogeneous coordinate, and non-rigid error compensation was added. Each error was separated using laser interferometer and laser tracker, then these errors were compensated after calculation. The measured results demonstrate that, when measuring machine move along the diagonal of measuring space, the maximum displacement error reduce to 50 μm from 600 μm after compensation. So the feasibility of the method is proved.