基于压力补偿原理的抛光面形快速收敛技术

 为解决强激光系统中大口径光学元件抛光面形精度收敛困难的问题,提出了一种基于压力补偿原理的抛光面形快速收敛技术。利用独特的抛光垫修整技术，将抛光垫表面修整成特定形状，使工件与抛光垫的接触面产生不均匀的压力分布，并结合精确的抛光转速控制，以加快工件面形精度的收敛速度。实验结果表明，将抛光垫修整成微凸面形,可以有效避免抛光中元件过早塌边问题，能将大口径平面元件的初抛时间从数天缩短到6 h以内，元件面形精度提高到1个波长左右。

Fast correcting technique of polishing surface form by pressure compensation

A technique based on contact pressure compensation is presented in order to quicken the convergence of surface of large-aperture optical components during the pre-polishing processes.The pad surface is conditioned to a specific shape using an innovative pad conditioning technique,and thus the non-uniform distribution of contact pressure will be engendered at the interface between workpiece and polishing pad.Combining with accurate polishing speed controlling,the uneven pressure distribution will make workpi...