利用广角衍射仪对软X射线超薄膜的测量

利用X射线衍射,是目前国际上对超薄多层膜进行检测常用的方法之一,但只局限于双晶或小角衍射仪。本文利用的方法解决了广角衍射仪在低角区测量时由于样品放置误差所造成的衍射峰偏移和得不到衍射曲线的问题,从而使广角衍射仪得以应用在小角区测量。文中重点对测量曲线进行了分析,准确计算了多层膜的周期和单层膜厚度,并与测量值进行了比较,结果表明利用广角衍射仪测量膜厚是切实可行的。在目前我国X射线波段反射率测量装置还没有完善的条件下,利用X射线衍射仪对超薄膜的检测更显得格外重要。

The Measurement of Soft X-ray Supper Thin Film by Means of the Wide Angle Diffractometer

The measurement of soft X-ray supper thin film by means of diffractometer is the most common method employed abroad, but usually is limited to double crystal or small angle diffractometer. This paper intruduce a method, which solved the problem of diffraction peak shift and diffraction curve lossing due to the locating error of the sample when the wide angle diffractometer is used at low angle range, so that the wide angle diffractometer can be used in the small angle range. The paper emphasizes the analyses of the measurement results and the corparison of the experimental and theoretiod results, based on the calculating period of multilayered coatings and the thickness of single layer coatings. The measurement results of the thickness by means of wide angle diffraction are very believable and reliable. At present, the equipment for reflectance measurement in the soft X-ray spectral range has not been developed perfectly,the measurement of soft X-ray supper thin film by means of X-ray diffractometer seems to be more important.